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Class Information
Number: 438/582
Name: Semiconductor device manufacturing: process > Forming schottky junction (i.e., semiconductor-conductor rectifying junction contact) > Using refractory group metal (i.e., titanium (ti), zirconium (zr), hafnium (hf), vanadium (v), niobium (nb), tantalum (ta), chromium (cr), molybdenum (mo), tungsten (w), or alloy thereof)
Description: Processes for forming the contact using a refractory metal (i.e., titanium (Ti), zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo), tungsten (W), or alloy thereof).

Sub-classes under this class:

Class Number Class Name Patents
438/583 Silicide 186

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8685848 Manufacturing method of silicon carbide semiconductor device Apr. 1, 2014
8685849 Semiconductor device with buffer layer Apr. 1, 2014
8642468 NMOS metal gate materials, manufacturing methods, and equipment using CVD and ALD processes with metal based precursors Feb. 4, 2014
8618626 Trench Schottky rectifier device and method for manufacturing the same Dec. 31, 2013
8445370 Trench junction barrier controlled Schottky May. 21, 2013
8377811 Method for manufacturing silicon carbide semiconductor device Feb. 19, 2013
8324704 Silicon carbide semiconductor device with Schottky barrier diode and method of manufacturing the same Dec. 4, 2012
8304332 Structure and method for fabrication of field effect transistor gates with or without field plates Nov. 6, 2012
8278199 Method of manufacturing a semiconductor device Oct. 2, 2012
8237172 Semiconductor device having a silicon carbide substrate with an ohmic electrode layer in which a reaction layer is arranged in contact with the silicon carbide substrate Aug. 7, 2012
8143655 Trench schottky barrier diode with differential oxide thickness Mar. 27, 2012
8110489 Process for forming cobalt-containing materials Feb. 7, 2012
8084342 Method of manufacturing a CMOS device with zero soft error rate Dec. 27, 2011
8039378 Method of manufacturing a semiconductor device Oct. 18, 2011
8003504 Structure and method for fabrication of field effect transistor gates with or without field plates Aug. 23, 2011
7981785 Method for manufacturing semiconductor device and plasma oxidation method Jul. 19, 2011
7955961 Process for manufacture of trench Schottky Jun. 7, 2011
7923362 Method for manufacturing a metal-semiconductor contact in semiconductor components Apr. 12, 2011
7902054 Schottky barrier semiconductor device and method for manufacturing the same Mar. 8, 2011
7902056 Plasma treated metal silicide layer formation Mar. 8, 2011
7879705 Semiconductor devices and manufacturing method thereof Feb. 1, 2011
7868360 Semiconductor device with heat-resistant gate Jan. 11, 2011
7777292 Semiconductor device Aug. 17, 2010
7745317 Semiconductor device and method of manufacturing the same Jun. 29, 2010
7745316 Method for fabricating Schottky barrier tunnel transistor Jun. 29, 2010
7645691 Method for forming zener zap diodes and ohmic contacts in the same integrated circuit Jan. 12, 2010
7629205 Thin film transistor having double-layered gate electrode and method of manufacturing the thin film transistor Dec. 8, 2009
7618884 Method and device with durable contact on silicon carbide Nov. 17, 2009
7615839 Semiconductor device and manufacturing method thereof Nov. 10, 2009
7566642 Process of manufacturing an N-type Schottky barrier tunnel transistor Jul. 28, 2009
7544576 Diffusion barrier for nickel silicides in a semiconductor fabrication process Jun. 9, 2009
7491643 Method and structure for reducing contact resistance between silicide contact and overlying metallization Feb. 17, 2009
7491633 High switching speed two mask schottky diode with high field breakdown Feb. 17, 2009
7435670 Bit line barrier metal layer for semiconductor device and process for preparing the same Oct. 14, 2008
7384800 Method of fabricating metal-insulator-metal (MIM) device with stable data retention Jun. 10, 2008
7378310 Method for manufacturing a memory device having a nanocrystal charge storage region May. 27, 2008
7371667 Semiconductor device and method of fabricating same May. 13, 2008
7323402 Trench Schottky barrier diode with differential oxide thickness Jan. 29, 2008
7300876 Method for cleaning slurry particles from a surface polished by chemical mechanical polishing Nov. 27, 2007
7294565 Method of fabricating a wire bond pad with Ni/Au metallization Nov. 13, 2007
7294241 Method to form alpha phase Ta and its application to IC manufacturing Nov. 13, 2007
7291546 Method and apparatus for reducing charge loss in a nonvolatile memory cell Nov. 6, 2007
7285482 Method for producing solid-state imaging device Oct. 23, 2007
7202147 Semiconductor device and method for fabricating the same Apr. 10, 2007
7141861 Semiconductor device and manufacturing method there Nov. 28, 2006
7135396 Method of making a semiconductor structure Nov. 14, 2006
7094678 Electrostatic discharge protection of thin-film resonators Aug. 22, 2006
7078325 Process for producing a doped semiconductor substrate Jul. 18, 2006
7049211 In-situ-etch-assisted HDP deposition using SiF.sub.4 May. 23, 2006
7029972 Method of manufacturing a metal-insulator-metal capacitor Apr. 18, 2006

1 2 3

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