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Class Information
Number: 438/580
Name: Semiconductor device manufacturing: process > Forming schottky junction (i.e., semiconductor-conductor rectifying junction contact) > Using platinum group metal (i.e., platinum (pt), palladium (pd), rhodium (rh), ruthenium (ru), iridium (ir), osmium (os), or alloy thereof)
Description: Processes for forming a contact using a platinum group metals (i.e., platinum (Pt), palladium (Pd), rhodium (Rh), ruthenium (Ru), iridium (Ir), osmium (Os), or alloy thereof).

Sub-classes under this class:

Class Number Class Name Patents
438/581 Silicide 165

Patents under this class:
1 2

Patent Number Title Of Patent Date Issued
8703611 Method for manufacturing a semiconductor structure Apr. 22, 2014
8685849 Semiconductor device with buffer layer Apr. 1, 2014
8455293 Method for processing solar cell substrates Jun. 4, 2013
8435873 Unguarded Schottky barrier diodes with dielectric underetch at silicide interface May. 7, 2013
8350290 Light-receiving device and manufacturing method for a light-receiving device Jan. 8, 2013
8349679 Semiconductor device and method of manufacturing the same Jan. 8, 2013
8093071 Semiconductor device and method of manufacturing the same Jan. 10, 2012
8084342 Method of manufacturing a CMOS device with zero soft error rate Dec. 27, 2011
7955961 Process for manufacture of trench Schottky Jun. 7, 2011
7935620 Method for forming semiconductor devices with low leakage Schottky contacts May. 3, 2011
7923362 Method for manufacturing a metal-semiconductor contact in semiconductor components Apr. 12, 2011
7902055 Method of manufacturing a dual metal Schottky diode Mar. 8, 2011
7901545 Ionized physical vapor deposition (iPVD) process Mar. 8, 2011
7749877 Process for forming Schottky rectifier with PtNi silicide Schottky barrier Jul. 6, 2010
7732301 Bonded intermediate substrate and method of making same Jun. 8, 2010
7669320 Coreless cavity substrates for chip packaging and their fabrication Mar. 2, 2010
7588667 Depositing rhuthenium films using ionized physical vapor deposition (IPVD) Sep. 15, 2009
7553746 Method for manufacturing electrodes on a semiconducting material of type II-VI or on a compound of this material Jun. 30, 2009
7276796 Formation of oxidation-resistant seed layer for interconnect applications Oct. 2, 2007
7157383 Method for forming silicon dioxide film on silicon substrate, method for forming oxide film on semiconductor substrate, and method for producing semiconductor device Jan. 2, 2007
6872644 Semiconductor device with non-compounded contacts, and method of making Mar. 29, 2005
6852612 Semiconductor device and method for fabricating the same Feb. 8, 2005
6846731 Schottky diode with silver layer contacting the ZnO and MgxZn1-xO films Jan. 25, 2005
6825073 Schottky diode with high field breakdown and low reverse leakage current Nov. 30, 2004
6809212 Method for producing organometallic compounds Oct. 26, 2004
6734086 Semiconductor integrated circuit device and method of manufacturing the same May. 11, 2004
6727194 Wafer batch processing system and method Apr. 27, 2004
6699775 Manufacturing process for fast recovery diode Mar. 2, 2004
6683001 Method for manufacturing a semiconductor device whereby degradation of surface morphology of a metal layer from thermal oxidation is suppressed Jan. 27, 2004
6656823 Semiconductor device with schottky contact and method for forming the same Dec. 2, 2003
6551932 Method for forming metal line in a semiconductor device Apr. 22, 2003
6509234 Method of fabricating an ultra-thin fully depleted SOI device with T-shaped gate Jan. 21, 2003
6506676 Method of manufacturing semiconductor devices with titanium aluminum nitride work function Jan. 14, 2003
6495423 Electronic power device monolithically integrated on a semiconductor and comprising edge protection structures having a limited planar dimension Dec. 17, 2002
6486524 Ultra low Irr fast recovery diode Nov. 26, 2002
6448162 Method for producing schottky diodes Sep. 10, 2002
6372616 Method of manufacturing an electrical interconnection of a semiconductor device using an erosion protecting plug in a contact hole of interlayer dielectric layer Apr. 16, 2002
6313539 Semiconductor memory device and production method of the same Nov. 6, 2001
6303479 Method of manufacturing a short-channel FET with Schottky-barrier source and drain contacts Oct. 16, 2001
6271131 Methods for forming rhodium-containing layers such as platinum-rhodium barrier layers Aug. 7, 2001
6268230 Semiconductor light emitting device Jul. 31, 2001
6245650 Process for production of semiconductor device Jun. 12, 2001
6229193 Multiple stage high power diode May. 8, 2001
6221788 Semiconductor and a method for manufacturing an oxide film on the surface of a semiconductor substrate Apr. 24, 2001
6162712 Platinum source compositions for chemical vapor deposition of platinum Dec. 19, 2000
6150246 Method of making Os and W/WC/TiC ohmic and rectifying contacts on SiC Nov. 21, 2000
6140215 Method and apparatus for low temperature deposition of CVD and PECVD films Oct. 31, 2000
6096629 Uniform sidewall profile etch method for forming low contact leakage schottky diode contact Aug. 1, 2000
6087702 Rare-earth schottky diode structure Jul. 11, 2000
6063692 Oxidation barrier composed of a silicide alloy for a thin film and method of construction May. 16, 2000

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