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Class Information
Number: 438/58
Name: Semiconductor device manufacturing: process > Making device or circuit responsive to nonelectrical signal > Responsive to electromagnetic radiation > Gettering of substrate
Description: Process having a step of gettering the semiconductor substrate.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7588957 |
CVD process gas flow, pumping and/or boosting |
Sep. 15, 2009 |
| 7582499 |
Photo sensor and a method for manufacturing thereof |
Sep. 1, 2009 |
| 7575948 |
Method for operating photosensitive device |
Aug. 18, 2009 |
| 7572663 |
Method for manufacturing CMOS image sensor |
Aug. 11, 2009 |
| 7566636 |
Method of scribing stuck mother substrate and method of dividing stuck mother substrate |
Jul. 28, 2009 |
| 7566957 |
Support device with discrete getter material microelectronic devices |
Jul. 28, 2009 |
| 7560820 |
Integrated getter for vacuum or inert gas packaged LEDs |
Jul. 14, 2009 |
| 7537657 |
Silicon wafer and process for producing it |
May. 26, 2009 |
| 7507640 |
Method for producing silicon wafer |
Mar. 24, 2009 |
| 7462506 |
Carbon dioxide gettering method for a chip module assembly |
Dec. 9, 2008 |
| 7459735 |
Solid-state image device |
Dec. 2, 2008 |
| 7452742 |
Solid-state imaging device, camera and method of producing the solid-state imaging device |
Nov. 18, 2008 |
| 7449358 |
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
Nov. 11, 2008 |
| 7387952 |
Semiconductor substrate for solid-state image pickup device and producing method therefor |
Jun. 17, 2008 |
| 7374978 |
Method of manufacturing semiconductor device |
May. 20, 2008 |
| 7348193 |
Hermetic seals for micro-electromechanical system devices |
Mar. 25, 2008 |
| 7327019 |
Semiconductor device of a charge storage type |
Feb. 5, 2008 |
| 7297927 |
Fabrication of low leakage-current backside illuminated photodiodes |
Nov. 20, 2007 |
| 7297573 |
Methods and apparatus for particle reduction in MEMS devices |
Nov. 20, 2007 |
| 7297630 |
Methods of fabricating via hole and trench |
Nov. 20, 2007 |
| 7232698 |
Method for fabricating CMOS image sensor protecting low temperature oxide delamination |
Jun. 19, 2007 |
| 7186597 |
Method of manufacturing transistors |
Mar. 6, 2007 |
| 7135351 |
Method for controlling of thermal donor formation in high resistivity CZ silicon |
Nov. 14, 2006 |
| 7084048 |
Process for metallic contamination reduction in silicon wafers |
Aug. 1, 2006 |
| 7075002 |
Thin-film photoelectric conversion device and a method of manufacturing the same |
Jul. 11, 2006 |
| 7008813 |
Epitaxial growth of germanium photodetector for CMOS imagers |
Mar. 7, 2006 |
| 6943051 |
Method of fabricating heterojunction photodiodes integrated with CMOS |
Sep. 13, 2005 |
| 6916678 |
Surface modification method |
Jul. 12, 2005 |
| 6897117 |
Method of manufacturing semiconductor device |
May. 24, 2005 |
| 6897084 |
Control of oxygen precipitate formation in high resistivity CZ silicon |
May. 24, 2005 |
| 6777272 |
Method of manufacturing an active matrix display |
Aug. 17, 2004 |
| 6743657 |
Method for combined fabrication of indium gallium arsenide/indium phosphide avalanche photodiodes and P-I-N photodiodes |
Jun. 1, 2004 |
| 6670258 |
Fabrication of low leakage-current backside illuminated photodiodes |
Dec. 30, 2003 |
| 6670259 |
Inert atom implantation method for SOI gettering |
Dec. 30, 2003 |
| 6660552 |
Reduced surface charging in silicon-based devices |
Dec. 9, 2003 |
| 6635517 |
Use of disposable spacer to introduce gettering in SOI layer |
Oct. 21, 2003 |
| 6617189 |
Method of fabricating an image sensor |
Sep. 9, 2003 |
| 6586270 |
Process for producing a photovoltaic element |
Jul. 1, 2003 |
| 6551866 |
Method of manufacturing a semiconductor memory device |
Apr. 22, 2003 |
| 6465873 |
Semiconductor gettering structures |
Oct. 15, 2002 |
| 6420246 |
Method of gettering a metal element for accelerating crystallization of silicon by phosphorous |
Jul. 16, 2002 |
| 6342436 |
Method of manufacturing semiconductor substrate and method of manufacturing solid-state image-pickup device |
Jan. 29, 2002 |
| 6339018 |
Silicide block bounded device |
Jan. 15, 2002 |
| 6261860 |
Method of fabricating solid-state image sensor |
Jul. 17, 2001 |
| 6221741 |
Process of fabricating a semiconductor substrate with semi-insulating polysilicon gettering site layer |
Apr. 24, 2001 |
| 6136670 |
Semiconductor processing methods of forming contacts between electrically conductive materials |
Oct. 24, 2000 |
| 6043105 |
Method for manufacturing semiconductor sensitive devices |
Mar. 28, 2000 |
| 6013873 |
Photovoltaic apparatus and method of manufacturing a photovoltaic apparatus |
Jan. 11, 2000 |
| 5961743 |
Thin-film photoelectric conversion device and a method of manufacturing the same |
Oct. 5, 1999 |
| 5944889 |
Methods of heat-treating semiconductor wafers |
Aug. 31, 1999 |
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