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Class Information
Number: 438/569
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Diffusing a dopant > From vapor phase > Into compound semiconductor region
Description: Process wherein an electrically active dopant is diffused into a compound semiconductor.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8642431 N-type carrier enhancement in semiconductors Feb. 4, 2014
8470626 Method of fabricating light emitting diode Jun. 25, 2013
8325475 Electronic device Dec. 4, 2012
8105867 Self-aligned three-dimensional non-volatile memory fabrication Jan. 31, 2012
7998842 Atomic layer deposition metallic contacts, gates and diffusion barriers Aug. 16, 2011
7883998 Vapor phase growth method Feb. 8, 2011
7554138 Method of manufacturing a strained semiconductor layer, method of manufacturing a semiconductor device and semiconductor substrate suitable for use in such a method including having a thin del Jun. 30, 2009
7553748 Semiconductor device and method of manufacturing the same Jun. 30, 2009
7544625 Silicon oxide thin-films with embedded nanocrystalline silicon Jun. 9, 2009
7504322 Growth of a semiconductor layer structure Mar. 17, 2009
7449401 Semiconductor device with asymmetric transistor and method for fabricating the same Nov. 11, 2008
7071043 Methods of forming a field effect transistor having source/drain material over insulative material Jul. 4, 2006
7018728 Boron phosphide-based semiconductor device and production method thereof Mar. 28, 2006
6943097 Atomic layer deposition of metallic contacts, gates and diffusion barriers Sep. 13, 2005
6830995 Method of diffusing zinc into article and method of heating article Dec. 14, 2004
6821871 Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus Nov. 23, 2004
6498079 Method for selective source diffusion Dec. 24, 2002
6495433 Method of activating compound semiconductor layer to p-type compound semiconductor layer Dec. 17, 2002
6472300 Method for growing p-n homojunction-based structures utilizing HVPE techniques Oct. 29, 2002
6429103 MOCVD-grown emode HIGFET buffer Aug. 6, 2002
6291328 Opto-electronic device with self-aligned ohmic contact layer Sep. 18, 2001
6265290 Method for fabricating a thin film transistor and a substrate and thin film transistor manufactured using the same Jul. 24, 2001
6242328 Method of activating compound semiconductor layer to p-type compound semiconductor layer Jun. 5, 2001
6214708 Method and apparatus for diffusing zinc into groups III-V compound semiconductor crystals Apr. 10, 2001
6191014 Method for manufacturing compound semiconductor Feb. 20, 2001
6136627 High-resolution light-sensing and light-emitting diode array and fabrication method thereof Oct. 24, 2000
6133125 Selective area diffusion control process Oct. 17, 2000
6096587 Manufacturing method of a junction field effect transistor Aug. 1, 2000
5937318 Monocrystalline three-dimensional integrated circuit Aug. 10, 1999
5856208 Epitaxial wafer and its fabrication method Jan. 5, 1999
5506186 Method of manufacturing an optoelectronic device Apr. 9, 1996
5354694 Method of making highly doped surface layer for negative electron affinity devices Oct. 11, 1994
5169799 Method for forming a doped ZnSe single crystal Dec. 8, 1992
5124278 Amino replacements for arsine, antimony and phosphine Jun. 23, 1992
5049524 Cd diffusion in InP substrates Sep. 17, 1991
4889830 Zinc diffusion in the presence of cadmium into indium phosphide Dec. 26, 1989
4755485 Method of making light-emitting diodes Jul. 5, 1988
4742022 Method of diffusing zinc into III-V compound semiconductor material May. 3, 1988
4725565 Method of diffusing conductivity type imparting material into III-V compound semiconductor material Feb. 16, 1988
4698122 Method of diffusion of impurities Oct. 6, 1987
4634474 Coating of III-V and II-VI compound semiconductors Jan. 6, 1987
4592793 Process for diffusing impurities into a semiconductor body vapor phase diffusion of III-V semiconductor substrates Jun. 3, 1986
4588455 Planar diffusion source May. 13, 1986
4455351 Preparation of photodiodes Jun. 19, 1984
4350990 Electrode for lead-salt diodes Sep. 21, 1982
4280858 Method of manufacturing a semiconductor device by retarding the diffusion of zinc or cadmium into a device region Jul. 28, 1981
4264381 Fabrication of injection lasers utilizing a porous host diffusion layer Apr. 28, 1981
4233090 Method of making a laser diode Nov. 11, 1980
4116725 Heat treatment of cadmium mercury telluride and product Sep. 26, 1978
4105479 Preparation of halogen doped mercury cadmium telluride Aug. 8, 1978

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