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Class Information
Number: 438/568
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Diffusing a dopant > From vapor phase > Solid source in operative relation with semiconductor region > In capsule-type enclosure
Description: Processes carried out in a small containerlike apparatus.










Patents under this class:

Patent Number Title Of Patent Date Issued
7989329 Removal of surface dopants from a substrate Aug. 2, 2011
7883998 Vapor phase growth method Feb. 8, 2011
6562705 Method and apparatus for manufacturing semiconductor element May. 13, 2003
6448167 Process flow to reduce spacer undercut phenomena Sep. 10, 2002
6426280 Method for doping spherical semiconductors Jul. 30, 2002
6399480 Methods and arrangements for insulating local interconnects for improved alignment tolerance and size reduction Jun. 4, 2002
6090722 Process for fabricating a semiconductor structure having a self-aligned spacer Jul. 18, 2000
6083833 Method for forming conductive film for semiconductor device Jul. 4, 2000
5223452 Method and apparatus for doping silicon spheres Jun. 29, 1993
5049524 Cd diffusion in InP substrates Sep. 17, 1991
4742022 Method of diffusing zinc into III-V compound semiconductor material May. 3, 1988
4725565 Method of diffusing conductivity type imparting material into III-V compound semiconductor material Feb. 16, 1988
4559217 Method for vacuum baking indium in-situ Dec. 17, 1985
4415385 Diffusion of impurities into semiconductor using semi-closed inner diffusion vessel Nov. 15, 1983
4266990 Process for diffusion of aluminum into a semiconductor May. 12, 1981
4210473 Process for producing a semiconductor device Jul. 1, 1980
4193826 Vapor phase diffusion of aluminum with or without boron Mar. 18, 1980
4149915 Process for producing defect-free semiconductor devices having overlapping high conductivity impurity regions Apr. 17, 1979
4129090 Apparatus for diffusion into semiconductor wafers Dec. 12, 1978
4105479 Preparation of halogen doped mercury cadmium telluride Aug. 8, 1978
4089714 Doping mercury cadmium telluride with aluminum or silicon May. 16, 1978
4086106 Halogen-doped Hg,Cd,Te Apr. 25, 1978
4064621 Cadmium diffused Pb.sub.1-x Sn.sub.x Te diode laser Dec. 27, 1977
4049478 Utilization of an arsenic diffused emitter in the fabrication of a high performance semiconductor device Sep. 20, 1977
3984267 Process and apparatus for diffusion of semiconductor materials Oct. 5, 1976
3979232 Mercury cadmium telluride annealing procedure Sep. 7, 1976
3963540 Heat treatment of mercury cadmium telluride Jun. 15, 1976
3954518 Method for reducing compositional gradients in mercury cadmium telluride May. 4, 1976
3948696 Method of diffusion into semiconductor wafers Apr. 6, 1976
3948695 Method of diffusing an impurity into semiconductor wafers Apr. 6, 1976
3939017 Process for depositing the deposition agent on the surface of a number of semiconductor substrates Feb. 17, 1976











 
 
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