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Class Information
Number: 438/565
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Diffusing a dopant > From vapor phase
Description: Processes wherein an electrically active impurity is produced using a gaseous substance as the dopant source material.

Sub-classes under this class:

Class Number Class Name Patents
438/569 Into compound semiconductor region 60
438/566 Plural diffusion stages 39
438/567 Solid source in operative relation with semiconductor region 62

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8691677 Method for boron doping silicon wafers Apr. 8, 2014
8681057 Mobile terminal and method for fabricating antenna of mobile terminal Mar. 25, 2014
8637955 Semiconductor structure with reduced junction leakage and method of fabrication thereof Jan. 28, 2014
8513104 Methods of forming a floating junction on a solar cell with a particle masking layer Aug. 20, 2013
8283241 Dopant implanting method and doping apparatus Oct. 9, 2012
8076228 Low noise transistor and method of making same Dec. 13, 2011
8071451 Method of doping semiconductors Dec. 6, 2011
8017510 Semiconductor device including field-effect transistor using salicide (self-aligned silicide) structure and method of fabricating the same Sep. 13, 2011
7998842 Atomic layer deposition metallic contacts, gates and diffusion barriers Aug. 16, 2011
7935591 Method for fabricating PMOS transistor and method for forming dual gate using the same May. 3, 2011
7867551 Processing method for group IBIIIAVIA semiconductor layer growth Jan. 11, 2011
7858462 Method of manufacturing semiconductor device Dec. 28, 2010
7811916 Method for isotropic doping of a non-planar surface exposed in a void Oct. 12, 2010
7763530 Doping of particulate semiconductor materials Jul. 27, 2010
7682954 Method of impurity introduction, impurity introduction apparatus and semiconductor device produced with use of the method Mar. 23, 2010
7662652 Chemical sensor using semiconducting metal oxide nanowires Feb. 16, 2010
7507642 Vapor-phase growth method, semiconductor manufacturing method and semiconductor device manufacturing method Mar. 24, 2009
7507649 Method for electrical doping a semiconductor material with Cesium Mar. 24, 2009
7482286 Method for forming dielectric or metallic films Jan. 27, 2009
7329595 Deposition of carbon-containing layers using vitreous carbon source Feb. 12, 2008
7144751 Back-contact solar cells and methods for fabrication Dec. 5, 2006
7018728 Boron phosphide-based semiconductor device and production method thereof Mar. 28, 2006
6995079 Ion implantation method and method for manufacturing semiconductor device Feb. 7, 2006
6943097 Atomic layer deposition of metallic contacts, gates and diffusion barriers Sep. 13, 2005
6844259 Method for forming contact plug in semiconductor device Jan. 18, 2005
6825104 Semiconductor device with selectively diffused regions Nov. 30, 2004
6821871 Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus Nov. 23, 2004
6770500 Process of passivating a metal-gated complementary metal oxide semiconductor Aug. 3, 2004
6632721 Method of manufacturing semiconductor devices having capacitors with electrode including hemispherical grains Oct. 14, 2003
6555451 Method for making shallow diffusion junctions in semiconductors using elemental doping Apr. 29, 2003
6555452 Method for growing p-type III-V compound material utilizing HVPE techniques Apr. 29, 2003
6509263 Method for fabricating a semiconductor memory device having polysilicon with an enhanced surface concentration and reduced contact resistance Jan. 21, 2003
6461947 Photovoltaic device and making of the same Oct. 8, 2002
6417099 Method for controlling dopant diffusion in a plug-shaped doped polysilicon layer on a semiconductor wafer Jul. 9, 2002
6413844 Safe arsenic gas phase doping Jul. 2, 2002
6403455 Methods of fabricating a memory device Jun. 11, 2002
6350648 Formation of conductive rugged silicon Feb. 26, 2002
6348397 Method for diffusion of an impurity into a semiconductor wafer with high in-plane diffusion uniformity Feb. 19, 2002
6339015 Method of fabricating a non-volatile semiconductor device Jan. 15, 2002
6331477 Doping of spherical semiconductors during non-contact processing in the liquid state Dec. 18, 2001
6313004 Method for manufacturing semiconductor devices Nov. 6, 2001
6303393 Method of doping barium titanate ferroelectric oxide Oct. 16, 2001
6300228 Multiple precipitation doping process Oct. 9, 2001
6284632 Method for manufacturing semiconductor device with stagnated process gas Sep. 4, 2001
6225166 Method of manufacturing electrostatic discharge protective circuit May. 1, 2001
6221747 Method of fabricating a conductive plug with a low junction resistance in an integrated circuit Apr. 24, 2001
6197653 Capacitor and memory structure and method Mar. 6, 2001
6191014 Method for manufacturing compound semiconductor Feb. 20, 2001
6143632 Deuterium doping for hot carrier reliability improvement Nov. 7, 2000
6129950 Method of forming a thick polysilicon layer Oct. 10, 2000

1 2 3

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