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Class Information
Number: 438/563
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Diffusing a dopant > From solid dopant source in contact with semiconductor region > Glassy source or doped oxide
Description: Processes wherein the solid dopant source material is composed of a glass-type material or an oxide which has been doped.

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8669169 Diffusion sources from liquid precursors Mar. 11, 2014
8653665 Barrier layer, film forming method, and processing system Feb. 18, 2014
8513104 Methods of forming a floating junction on a solar cell with a particle masking layer Aug. 20, 2013
8492253 Method of forming contacts for a back-contact solar cell Jul. 23, 2013
8440552 Method to form low series resistance transistor devices on silicon on insulator layer May. 14, 2013
8399343 Method for the selective doping of silicon and silicon substrate treated therewith Mar. 19, 2013
8377738 Fabrication of solar cells with counter doping prevention Feb. 19, 2013
8324089 Compositions for forming doped regions in semiconductor substrates, methods for fabricating such compositions, and methods for forming doped regions using such compositions Dec. 4, 2012
8293553 Method for producing an area having reduced electrical conductivity within a semiconductor layer and optoelectronic semiconductor element Oct. 23, 2012
8163639 Photo diode and method for manufacturing the same Apr. 24, 2012
8124502 Semiconductor device manufacturing method, semiconductor device and semiconductor device manufacturing installation Feb. 28, 2012
8114761 Method for doping non-planar transistors Feb. 14, 2012
8058159 Method of making low work function component Nov. 15, 2011
7999268 Low temperature impurity doping of silicon carbide Aug. 16, 2011
7998823 Method for reducing leakage currents caused by misalignment of a contact structure by increasing an error tolerance of the contact patterning process Aug. 16, 2011
7851339 Method of repairing deep subsurface defects in a silicon substrate that includes diffusing negatively charged ions into the substrate from a sacrificial oxide layer Dec. 14, 2010
7799650 Method for making a transistor with a stressor Sep. 21, 2010
7785945 Method for fabricating PMOS transistor Aug. 31, 2010
7767541 Methods for forming germanium-on-insulator semiconductor structures using a porous layer and semiconductor structures formed by these methods Aug. 3, 2010
7615393 Methods of forming multi-doped junctions on a substrate Nov. 10, 2009
7611977 Process of phosphorus diffusion for manufacturing solar cell Nov. 3, 2009
7566600 SOI device with reduced drain induced barrier lowering Jul. 28, 2009
7524743 Conformal doping apparatus and method Apr. 28, 2009
7235468 FinFET device with reduced DIBL Jun. 26, 2007
7144751 Back-contact solar cells and methods for fabrication Dec. 5, 2006
7115476 Semiconductor manufacturing method and semiconductor device Oct. 3, 2006
7105411 Methods of forming a transistor gate Sep. 12, 2006
7078315 Method for eliminating inverse narrow width effects in the fabrication of DRAM device Jul. 18, 2006
7022576 Method of manufacturing a semiconductor device Apr. 4, 2006
6995061 Multi-bit stacked-type non-volatile memory and manufacture method thereof Feb. 7, 2006
6924200 Methods using disposable and permanent films for diffusion and implantation doping Aug. 2, 2005
6903025 Method of purging semiconductor manufacturing apparatus and method of manufacturing semiconductor device Jun. 7, 2005
6890825 Method for controlling dopant profiles and dopant activation by electron beam processing May. 10, 2005
6849529 Deep-trench capacitor with hemispherical grain silicon surface and method for making the same Feb. 1, 2005
6828214 Semiconductor member manufacturing method and semiconductor device manufacturing method Dec. 7, 2004
6806173 Method for producing highly doped semiconductor components Oct. 19, 2004
6746907 Methods of forming field effect transistors and field effect transistor circuitry Jun. 8, 2004
6737342 Composite spacer scheme with low overlapped parasitic capacitance May. 18, 2004
6723587 Ultra small-sized SOI MOSFET and method of fabricating the same Apr. 20, 2004
6696354 Method of forming salicide Feb. 24, 2004
6649542 Multi-level type nonvolatile semiconductor memory device Nov. 18, 2003
6607966 Selective method to form roughened silicon Aug. 19, 2003
6593196 Methods of forming a transistor gate Jul. 15, 2003
6566212 Method of fabricating an integrated circuit with ultra-shallow source/drain extensions May. 20, 2003
6524880 Solar cell and method for fabricating the same Feb. 25, 2003
6506653 Method using disposable and permanent films for diffusion and implant doping Jan. 14, 2003
6498079 Method for selective source diffusion Dec. 24, 2002
6479352 Method of fabricating high voltage power MOSFET having low on-resistance Nov. 12, 2002
6448105 Method for doping one side of a semiconductor body Sep. 10, 2002
6410410 Method of forming lightly doped regions in a semiconductor device Jun. 25, 2002

1 2 3 4

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