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Class Information
Number: 438/561
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Diffusing a dopant > From solid dopant source in contact with semiconductor region > Dopant source within trench or groove
Description: Processes wherein the solid dopant source material resides within the confines of a recessed region in the semiconductor substrate.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8653628 Power semiconductor device and method of manufacturing the same Feb. 18, 2014
8629020 Semiconductor device and method of fabricating the same Jan. 14, 2014
8580651 Methods for manufacturing a trench type semiconductor device having a thermally sensitive refill material Nov. 12, 2013
8580664 Method for forming ultra-shallow boron doping regions by solid phase diffusion Nov. 12, 2013
8569158 Method for forming ultra-shallow doping regions by solid phase diffusion Oct. 29, 2013
8546252 Metal gate FET having reduced threshold voltage roll-off Oct. 1, 2013
8524559 Manufacturing method of power transistor device Sep. 3, 2013
8501602 Method of manufacturing devices having vertical junction edge Aug. 6, 2013
8470657 Ion implantation method for semiconductor sidewalls Jun. 25, 2013
8420518 Structure and method of latchup robustness with placement of through wafer via within CMOS circuitry Apr. 16, 2013
8415224 Method of fabricating a semiconductor device including forming trenches having particular structures Apr. 9, 2013
8367533 Semiconductor devices including doped metal silicide patterns and related methods of forming such devices Feb. 5, 2013
8361895 Ultra-shallow junctions using atomic-layer doping Jan. 29, 2013
8349689 Non-volatile memory device and method for fabricating the same Jan. 8, 2013
8298889 Process of forming an electronic device including a trench and a conductive structure therein Oct. 30, 2012
8236710 Technique to create a buried plate in embedded dynamic random access memory device Aug. 7, 2012
8232187 Doping method for semiconductor device Jul. 31, 2012
8211769 Method for forming junctions of vertical cells in semiconductor device Jul. 3, 2012
8198152 Transistors comprising high-k metal gate electrode structures and adapted channel semiconductor materials Jun. 12, 2012
8053344 Methods of forming integrated circuits Nov. 8, 2011
8034682 Power device with trenches having wider upper portion than lower portion Oct. 11, 2011
8017471 Structure and method of latchup robustness with placement of through wafer via within CMOS circuitry Sep. 13, 2011
7998823 Method for reducing leakage currents caused by misalignment of a contact structure by increasing an error tolerance of the contact patterning process Aug. 16, 2011
7955927 Semiconductor device and fabricating method thereof Jun. 7, 2011
7915155 Double trench for isolation of semiconductor devices Mar. 29, 2011
7799636 Power device with trenches having wider upper portion than lower portion Sep. 21, 2010
7750405 Low-cost high-performance planar back-gate CMOS Jul. 6, 2010
7709365 CMOS well structure and method of forming the same May. 4, 2010
7651933 Method of fabricating semiconductor device Jan. 26, 2010
7572691 Non-volatile memory and method of fabricating the same Aug. 11, 2009
7563666 Semiconductor structures including vertical diode structures and methods of making the same Jul. 21, 2009
7462541 Manufacturing method of semiconductor device Dec. 9, 2008
7419872 Method for preparing a trench capacitor structure Sep. 2, 2008
7393766 Process for integration of a high dielectric constant gate insulator layer in a CMOS device Jul. 1, 2008
7223651 Dram memory cell with a trench capacitor and method for production thereof May. 29, 2007
7208382 Semiconductor device with high conductivity region using shallow trench Apr. 24, 2007
7199006 Planarization method of manufacturing a superjunction device Apr. 3, 2007
7109100 Semiconductor device and method for manufacturing semiconductor device Sep. 19, 2006
7078315 Method for eliminating inverse narrow width effects in the fabrication of DRAM device Jul. 18, 2006
7045397 JFET and MESFET structures for low voltage high current and high frequency applications May. 16, 2006
7005364 Method for manufacturing semiconductor device Feb. 28, 2006
6995079 Ion implantation method and method for manufacturing semiconductor device Feb. 7, 2006
6982193 Method of forming a super-junction semiconductor device Jan. 3, 2006
6919255 Semiconductor trench structure Jul. 19, 2005
6762099 Method for fabricating buried strap out-diffusions of vertical transistor Jul. 13, 2004
6750091 Diode formation method Jun. 15, 2004
6723580 Method of forming a photodiode for an image sensor Apr. 20, 2004
6695903 Dopant pastes for the production of p, p+, and n, n+ regions in semiconductors Feb. 24, 2004
6660571 High voltage power MOSFET having low on-resistance Dec. 9, 2003
6645795 Polysilicon doped transistor using silicon-on-insulator and double silicon-on-insulator Nov. 11, 2003

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