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Class Information
Number: 438/56
Name: Semiconductor device manufacturing: process > Making device or circuit responsive to nonelectrical signal > Responsive to corpuscular radiation (e.g., nuclear particle detector, etc.)
Description: Process for making a device or circuit responsive to atomic or subatomic discrete particles (e.g., alpha, neutron, fission fragment or fissionable isotope).

Patents under this class:
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Patent Number Title Of Patent Date Issued
8691613 Method for manufacturing photoelectric conversion device Apr. 8, 2014
8647909 Array of alpha particle sensors Feb. 11, 2014
8637867 Electrostatic discharge device and organic electro-luminescence display device having the same Jan. 28, 2014
8618624 UV curable encapsulant Dec. 31, 2013
8614111 Fully depleted silicon on insulator neutron detector Dec. 24, 2013
8552429 Proximity charge sensing for semiconductor detectors Oct. 8, 2013
8552616 Micro-scale power source Oct. 8, 2013
8546928 Micromechanical housing comprising at least two cavities having different internal pressure and/or different gas compositions and method for the production thereof Oct. 1, 2013
8525340 Flexible electronic devices and related methods Sep. 3, 2013
8519456 Solid-state image pickup device, image pickup apparatus including the same, and method of manufacturing the same Aug. 27, 2013
8487392 High power density betavoltaic battery Jul. 16, 2013
8450820 Radiation detector May. 28, 2013
8445307 Monolithic IC and MEMS microfabrication process May. 21, 2013
8357906 Lithography system, sensor, converter element and method of manufacture Jan. 22, 2013
8310021 Neutron detector with wafer-to-wafer bonding Nov. 13, 2012
8286578 Device for coating a peripheral surface of a sleeve body Oct. 16, 2012
8216931 Methods for forming multi-layer three-dimensional structures Jul. 10, 2012
8207008 Affixing method and solar decal device using a thin film photovoltaic Jun. 26, 2012
8158449 Particle emission analysis for semiconductor fabrication steps Apr. 17, 2012
8153453 Betavoltaic battery with a shallow junction and a method for making same Apr. 10, 2012
8134216 Nuclear batteries Mar. 13, 2012
8114698 High light extraction efficiency nitride based light emitting diode by surface roughening Feb. 14, 2012
8093095 Semiconductor device with a bulk single crystal on a substrate Jan. 10, 2012
8063462 Semiconductor device and method of manufacturing the same Nov. 22, 2011
8017412 Betavoltaic battery with a shallow junction and a method for making same Sep. 13, 2011
7998788 Techniques for use of nanotechnology in photovoltaics Aug. 16, 2011
7989250 Membrane grating for beam steering device and method of fabricating same Aug. 2, 2011
7968959 Methods and systems of thick semiconductor drift detector fabrication Jun. 28, 2011
7960646 Silicon-based thin-film photoelectric converter and method of manufacturing the same Jun. 14, 2011
7910394 Photodiode with improved charge capacity Mar. 22, 2011
7875484 Monolithic IC and MEMS microfabrication process Jan. 25, 2011
7858425 Monolithic nuclear event detector and method of manufacture Dec. 28, 2010
7838324 Neutron detection structure and method of fabricating Nov. 23, 2010
7759150 Nanorod sensor with single-plane electrodes Jul. 20, 2010
7732238 Method of manufacturing an image sensing apparatus in which two members are bonded together Jun. 8, 2010
7659149 Method of electrically detecting biomolecule Feb. 9, 2010
7659131 Process for producing a flat panel radiation detector and a flat panel radiation detector Feb. 9, 2010
7635600 Photovoltaic structure with a conductive nanowire array electrode Dec. 22, 2009
7629196 Method for manufacturing an integrated circuit having increased radiation hardness and reliability Dec. 8, 2009
7491948 Method of detecting and transmitting radiation detection information to a network Feb. 17, 2009
7462512 Floating gate field effect transistors for chemical and/or biological sensing Dec. 9, 2008
7402736 Method of fabricating a probe having a field effect transistor channel structure Jul. 22, 2008
7368794 Boron carbide particle detectors May. 6, 2008
7364942 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor Apr. 29, 2008
7338829 Semiconductor structures having through-holes sealed with feed through metalization Mar. 4, 2008
7259381 Methodology for determining electron beam penetration depth Aug. 21, 2007
7250323 Methods of making energy conversion devices with a substantially contiguous depletion regions Jul. 31, 2007
7220614 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor May. 22, 2007
7172910 Web fabrication of devices Feb. 6, 2007
7151006 Process to reduce the dark current in semiconducting films Dec. 19, 2006

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