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Class Information
Number: 438/558
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Diffusing a dopant > From solid dopant source in contact with semiconductor region
Description: Processes wherein the electrically active impurity is produced by a solid substance which is in physical contact with the semiconductor region to be doped.

Sub-classes under this class:

Class Number Class Name Patents
438/561 Dopant source within trench or groove 123
438/563 Glassy source or doped oxide 196
438/562 Organic source 25
438/560 Plural diffusion stages 66
438/564 Polycrystalline semiconductor source 226
438/559 Using capping layer over dopant source to prevent out-diffusion of dopant 91

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8703593 Techniques for FinFET doping Apr. 22, 2014
8673673 Trench process and structure for backside contact solar cells with polysilicon doped regions Mar. 18, 2014
8659110 Single-junction photovoltaic cell Feb. 25, 2014
8647939 Non-relaxed embedded stressors with solid source extension regions in CMOS devices Feb. 11, 2014
8647911 Backside contact solar cell with formed polysilicon doped regions Feb. 11, 2014
8637386 Diffused junction termination structures for silicon carbide devices and methods of fabricating silicon carbide devices incorporating same Jan. 28, 2014
8633097 Single-junction photovoltaic cell Jan. 21, 2014
8623694 Methods of forming fast ion conductors and memory devices comprising diffused metal ions Jan. 7, 2014
8598025 Doping of planar or three-dimensional structures at elevated temperatures Dec. 3, 2013
8592270 Non-relaxed embedded stressors with solid source extension regions in CMOS devices Nov. 26, 2013
8580665 MOSFET integrated circuit having doped conductive interconnects and methods for its manufacture Nov. 12, 2013
8580664 Method for forming ultra-shallow boron doping regions by solid phase diffusion Nov. 12, 2013
8558308 Method of manufacturing a semiconductor device using a contact implant and a metallic recombination element and semiconductor Oct. 15, 2013
8551872 Low series resistance transistor structure on silicon on insulator layer Oct. 8, 2013
8546249 Selective growth of polycrystalline silicon-containing semiconductor material on a silicon-containing semiconductor surface Oct. 1, 2013
8513104 Methods of forming a floating junction on a solar cell with a particle masking layer Aug. 20, 2013
8492253 Method of forming contacts for a back-contact solar cell Jul. 23, 2013
8486747 Backside silicon photovoltaic cell and method of manufacturing thereof Jul. 16, 2013
8481413 Doping of semiconductor substrate through carbonless phosphorous-containing layer Jul. 9, 2013
8481414 Incorporating impurities using a discontinuous mask Jul. 9, 2013
8460963 Trench process and structure for backside contact solar cells with polysilicon doped regions Jun. 11, 2013
8450134 Trench process and structure for backside contact solar cells with polysilicon doped regions May. 28, 2013
8450130 Method of manufacturing a semiconductor laser May. 28, 2013
8420517 Methods of forming a multi-doped junction with silicon-containing particles Apr. 16, 2013
8420518 Structure and method of latchup robustness with placement of through wafer via within CMOS circuitry Apr. 16, 2013
8415239 Method for manufacturing a power semiconductor device Apr. 9, 2013
8404512 Crystallization methods for preparing group IBIIIAVIA thin film solar absorbers Mar. 26, 2013
8394711 Systems and methods for co-doping wide band gap materials Mar. 12, 2013
8394710 Semiconductor devices fabricated by doped material layer as dopant source Mar. 12, 2013
8361895 Ultra-shallow junctions using atomic-layer doping Jan. 29, 2013
8349698 Integrated semiconductor device and method of manufacturing the same Jan. 8, 2013
8309446 Hybrid heterojunction solar cell fabrication using a doping layer mask Nov. 13, 2012
8304323 Semiconductor element manufacturing method Nov. 6, 2012
8236675 Semiconductor device and method of fabricating a semiconductor device Aug. 7, 2012
8222131 Methods of forming an image sensor Jul. 17, 2012
8183137 Use of dopants to provide low defect gate full silicidation May. 22, 2012
8163638 Back side contact solar cell structures and fabrication processes Apr. 24, 2012
8138072 Semiconductor structures and methods of manufacture Mar. 20, 2012
8124502 Semiconductor device manufacturing method, semiconductor device and semiconductor device manufacturing installation Feb. 28, 2012
8058159 Method of making low work function component Nov. 15, 2011
8053867 Phosphorous-comprising dopants and methods for forming phosphorous-doped regions in semiconductor substrates using phosphorous-comprising dopants Nov. 8, 2011
8043946 Mixture for doping semiconductors Oct. 25, 2011
8017471 Structure and method of latchup robustness with placement of through wafer via within CMOS circuitry Sep. 13, 2011
8017427 Backside-illuminated (BSI) image sensor with backside diffusion doping Sep. 13, 2011
7994032 Method of making deep junction for electrical crosstalk reduction of an image sensor Aug. 9, 2011
7915146 Controlled doping of semiconductor nanowires Mar. 29, 2011
7863084 Contact fabrication of emitter wrap-through back contact silicon solar cells Jan. 4, 2011
7807556 Method for doping impurities Oct. 5, 2010
7799666 Method of spatially selective laser-assisted doping of a semiconductor Sep. 21, 2010
7790574 Boron diffusion in silicon devices Sep. 7, 2010

1 2 3 4 5 6

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