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Class Information
Number: 438/554
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Diffusing a dopant > Outwardly
Description: Processes wherein the electrically active impurity moves from an internal location toward the major surface of the semiconductor substrate.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8623749 Reduction of stored charge in the base region of a bipolar transistor to improve switching speed Jan. 7, 2014
8524559 Manufacturing method of power transistor device Sep. 3, 2013
8283717 Semiconductor storage device Oct. 9, 2012
8263484 High resistivity silicon wafer and method for manufacturing the same Sep. 11, 2012
8028621 Three-dimensional structures and methods of fabricating the same using a printing plate Oct. 4, 2011
7838401 Semiconductor device and manufacturing method thereof Nov. 23, 2010
7605064 Selective laser annealing of semiconductor material Oct. 20, 2009
7528058 Method for producing a contact and electronic component comprising said type of contact May. 5, 2009
7419872 Method for preparing a trench capacitor structure Sep. 2, 2008
6930007 Integration of pre-S/D anneal selective nitride/oxide composite cap for improving transistor performance Aug. 16, 2005
6887745 Polysilicon thin film transistor and method of forming the same May. 3, 2005
6849528 Fabrication of ultra shallow junctions from a solid source with fluorine implantation Feb. 1, 2005
6844245 Method of preparing a self-passivating Cu laser fuse Jan. 18, 2005
6809336 Semiconductor device comprising sense amplifier and manufacturing method thereof Oct. 26, 2004
6617209 Method for making a semiconductor device having a high-k gate dielectric Sep. 9, 2003
6436800 Method for fabricating a non-volatile memory with a shallow junction Aug. 20, 2002
6350645 Strapping via for interconnecting integrated circuit structures Feb. 26, 2002
6255190 Method for dielectrically isolated deep pn-junctions in silicon substrates using deep trench sidewall predeposition technology Jul. 3, 2001
6207540 Method for manufacturing high performance MOSFET device with raised source and drain Mar. 27, 2001
6204110 Methods of forming an SRAM Mar. 20, 2001
5976940 Method of making plurality of bipolar transistors Nov. 2, 1999
5970343 Fabrication of conductivity enhanced MOS-gated semiconductor devices Oct. 19, 1999
5789282 Method for fabricating thin film transistor Aug. 4, 1998
5759887 Semiconductor device and a method of manufacturing a semiconductor device Jun. 2, 1998
5688714 Method of fabricating a semiconductor device having a top layer and base layer joined by wafer bonding Nov. 18, 1997
5567644 Method of making a resistor Oct. 22, 1996
5529943 Method of making buried bit line ROM with low bit line resistance Jun. 25, 1996
5491107 Semiconductor processing method for providing large grain polysilicon films Feb. 13, 1996
5407857 Method for producing a semiconductor device with a doped polysilicon layer by updiffusion Apr. 18, 1995
5198370 Method for producing an infrared detector Mar. 30, 1993
5185294 Boron out-diffused surface strap process Feb. 9, 1993
5116784 Method of forming semiconductor film May. 26, 1992
5098861 Method of processing a semiconductor substrate including silicide bonding Mar. 24, 1992
4977104 Method for producing a semiconductor device by filling hollows with thermally decomposed doped and undoped polysilicon Dec. 11, 1990
4960730 Method of making a semiconductor light emitting device using out-diffusion from a buried stripe Oct. 2, 1990
4904618 Process for doping crystals of wide band gap semiconductors Feb. 27, 1990
4883769 Method of making a multidimensional quantum-well array Nov. 28, 1989
4833094 Method of making a dynamic ram cell having shared trench storage capacitor with sidewall-defined bridge contacts and gate electrodes May. 23, 1989
4761385 Forming a trench capacitor Aug. 2, 1988
4734168 Method of making n-silicon electrodes Mar. 29, 1988
4605451 Process for making thyristor devices Aug. 12, 1986
4588446 Method for producing graded band gap mercury cadmium telluride May. 13, 1986
4575466 Treatment process for semiconductor wafer Mar. 11, 1986
4549914 Integrated circuit contact technique Oct. 29, 1985
4475964 Method of manufacturing a semiconductor device Oct. 9, 1984
4467518 Process for fabrication of stacked, complementary MOS field effect transistor circuits Aug. 28, 1984
4329772 Method for manufacturing a semiconductor device utilizing selective epitaxial growth and post heat treating May. 18, 1982
4279671 Method for manufacturing a semiconductor device utilizing dopant predeposition and polycrystalline deposition Jul. 21, 1981
4263066 Process for concurrent formation of base diffusion and p.sup.+ profile from single source predeposition Apr. 21, 1981
4244753 Method for purification of II-VI crystals Jan. 13, 1981

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