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Class Information
Number: 438/553
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Diffusing a dopant > Using metal mask
Description: Processes involving use of a mask made from metal to retard the diffusion of an electrically active impurity.










Patents under this class:

Patent Number Title Of Patent Date Issued
8569181 Manufacturing method of semiconductor apparatus and semiconductor apparatus Oct. 29, 2013
8461005 Method of manufacturing doping patterns Jun. 11, 2013
8394711 Systems and methods for co-doping wide band gap materials Mar. 12, 2013
8198183 Forming method of etching mask, control program and program storage medium Jun. 12, 2012
8148641 Anisotropic conductive material, connected structure, and production method thereof Apr. 3, 2012
8110488 Method for increasing etch rate during deep silicon dry etch Feb. 7, 2012
7985667 Method for patterning semiconductor device having magnetic tunneling junction structure Jul. 26, 2011
7879726 Methods of forming semiconductor devices using selective etching of an active region through a hardmask Feb. 1, 2011
7651950 Method for forming a pattern of a semiconductor device Jan. 26, 2010
7615420 Method for manufacturing indium gallium aluminium nitride thin film on silicon substrate Nov. 10, 2009
7544592 Method for increasing etch rate during deep silicon dry etch Jun. 9, 2009
7442625 Apparatus for annealing, method for annealing, and method for manufacturing a semiconductor device Oct. 28, 2008
7303949 High performance stress-enhanced MOSFETs using Si:C and SiGe epitaxial source/drain and method of manufacture Dec. 4, 2007
7176114 Method of depositing patterned films of materials using a positive imaging process Feb. 13, 2007
6955726 Mask and mask frame assembly for evaporation Oct. 18, 2005
6780781 Method for manufacturing an electronic device Aug. 24, 2004
6703307 Method of implantation after copper seed deposition Mar. 9, 2004
6670251 Method of fabricating semiconductor device Dec. 30, 2003
6444542 Integrated circuit and method Sep. 3, 2002
6124167 Method for forming an etch mask during the manufacture of a semiconductor device Sep. 26, 2000
6100172 Method for forming a horizontal surface spacer and devices formed thereby Aug. 8, 2000
6005260 Non-linear switching element of an electro-optical display device with metallic protective layer Dec. 21, 1999
5070029 Semiconductor process using selective deposition Dec. 3, 1991
4002513 Bucket-brigade delay line having reduced parasitic capacitances and method for making the same Jan. 11, 1977
3998675 Method of doping a semiconductor body Dec. 21, 1976











 
 
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