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Class Information
Number: 438/553
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Diffusing a dopant > Using metal mask
Description: Processes involving use of a mask made from metal to retard the diffusion of an electrically active impurity.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 8569181 |
Manufacturing method of semiconductor apparatus and semiconductor apparatus |
Oct. 29, 2013 |
| 8461005 |
Method of manufacturing doping patterns |
Jun. 11, 2013 |
| 8394711 |
Systems and methods for co-doping wide band gap materials |
Mar. 12, 2013 |
| 8198183 |
Forming method of etching mask, control program and program storage medium |
Jun. 12, 2012 |
| 8148641 |
Anisotropic conductive material, connected structure, and production method thereof |
Apr. 3, 2012 |
| 8110488 |
Method for increasing etch rate during deep silicon dry etch |
Feb. 7, 2012 |
| 7985667 |
Method for patterning semiconductor device having magnetic tunneling junction structure |
Jul. 26, 2011 |
| 7879726 |
Methods of forming semiconductor devices using selective etching of an active region through a hardmask |
Feb. 1, 2011 |
| 7651950 |
Method for forming a pattern of a semiconductor device |
Jan. 26, 2010 |
| 7615420 |
Method for manufacturing indium gallium aluminium nitride thin film on silicon substrate |
Nov. 10, 2009 |
| 7544592 |
Method for increasing etch rate during deep silicon dry etch |
Jun. 9, 2009 |
| 7442625 |
Apparatus for annealing, method for annealing, and method for manufacturing a semiconductor device |
Oct. 28, 2008 |
| 7303949 |
High performance stress-enhanced MOSFETs using Si:C and SiGe epitaxial source/drain and method of manufacture |
Dec. 4, 2007 |
| 7176114 |
Method of depositing patterned films of materials using a positive imaging process |
Feb. 13, 2007 |
| 6955726 |
Mask and mask frame assembly for evaporation |
Oct. 18, 2005 |
| 6780781 |
Method for manufacturing an electronic device |
Aug. 24, 2004 |
| 6703307 |
Method of implantation after copper seed deposition |
Mar. 9, 2004 |
| 6670251 |
Method of fabricating semiconductor device |
Dec. 30, 2003 |
| 6444542 |
Integrated circuit and method |
Sep. 3, 2002 |
| 6124167 |
Method for forming an etch mask during the manufacture of a semiconductor device |
Sep. 26, 2000 |
| 6100172 |
Method for forming a horizontal surface spacer and devices formed thereby |
Aug. 8, 2000 |
| 6005260 |
Non-linear switching element of an electro-optical display device with metallic protective layer |
Dec. 21, 1999 |
| 5070029 |
Semiconductor process using selective deposition |
Dec. 3, 1991 |
| 4002513 |
Bucket-brigade delay line having reduced parasitic capacitances and method for making the same |
Jan. 11, 1977 |
| 3998675 |
Method of doping a semiconductor body |
Dec. 21, 1976 |
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