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Class Information
Number: 438/551
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Diffusing a dopant > Using multiple layered mask
Description: Processes involving use of a mask composed of plural layers to retard the diffusion of an electrically active impurity.

Sub-classes under this class:

Class Number Class Name Patents
438/552 Having plural predetermined openings in master mask 71

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8703570 Methods of fabricating substrates Apr. 22, 2014
8673681 Electrical device fabrication Mar. 18, 2014
8603884 Methods of fabricating substrates Dec. 10, 2013
8420499 Concave-convex pattern forming method and magnetic tunnel junction element forming method Apr. 16, 2013
8415239 Method for manufacturing a power semiconductor device Apr. 9, 2013
8367540 Interconnect structure including a modified photoresist as a permanent interconnect dielectric and method of fabricating same Feb. 5, 2013
8309460 Methods of manufacturing semiconductor devices Nov. 13, 2012
8273634 Methods of fabricating substrates Sep. 25, 2012
8247302 Methods of fabricating substrates Aug. 21, 2012
8222130 High voltage device Jul. 17, 2012
8202789 Implanting a solar cell substrate using a mask Jun. 19, 2012
8198183 Forming method of etching mask, control program and program storage medium Jun. 12, 2012
8105929 Gate control and endcap improvement Jan. 31, 2012
8080485 Localized temperature control during rapid thermal anneal Dec. 20, 2011
8071451 Method of doping semiconductors Dec. 6, 2011
8021985 Method to form semiconductor laser diode Sep. 20, 2011
8003543 Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same Aug. 23, 2011
7972949 Electronic component and display device and a method of manufacturing the same Jul. 5, 2011
7964485 Method of forming a region of graded doping concentration in a semiconductor device and related apparatus Jun. 21, 2011
7960258 Method for fabricating nanoscale thermoelectric device Jun. 14, 2011
7943498 Method of forming micro pattern in semiconductor device May. 17, 2011
7927987 Method of reducing channeling of ion implants using a sacrificial scattering layer Apr. 19, 2011
7906400 Method of manufacturing a semiconductor device having transistors and semiconductor device having transistors Mar. 15, 2011
7892945 Nanowire mesh device and method of fabricating same Feb. 22, 2011
7892956 Methods of manufacture of vertical nanowire FET devices Feb. 22, 2011
7858458 CMOS fabrication Dec. 28, 2010
7851371 Method for manufacturing semiconductor device Dec. 14, 2010
7829447 Semiconductor structure pattern formation Nov. 9, 2010
7767509 Methods of forming a multilayer capping film to minimize differential heating in anneal processes Aug. 3, 2010
7754591 Method for forming fine pattern of semiconductor device Jul. 13, 2010
7745338 Method of forming fine pitch hardmask patterns and method of forming fine patterns of semiconductor device using the same Jun. 29, 2010
7732341 Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same Jun. 8, 2010
7713882 Patterning method for a semiconductor substrate May. 11, 2010
7687385 Semiconductor device exhibiting a high breakdown voltage and the method of manufacturing the same Mar. 30, 2010
7642101 Semiconductor device having in-chip critical dimension and focus patterns Jan. 5, 2010
7625766 Methods of forming carbon nanotubes and methods of fabricating integrated circuitry Dec. 1, 2009
7618867 Method of forming a doped portion of a semiconductor and method of forming a transistor Nov. 17, 2009
7615420 Method for manufacturing indium gallium aluminium nitride thin film on silicon substrate Nov. 10, 2009
7563712 Method of forming micro pattern in semiconductor device Jul. 21, 2009
7521312 Method and system for creating self-aligned twin wells with co-planar surfaces in a semiconductor device Apr. 21, 2009
7510980 Method for manufacturing semiconductor device Mar. 31, 2009
7488671 Nanostructure arrays and methods of making same Feb. 10, 2009
7482727 Composite material with conductive nanowires Jan. 27, 2009
7459334 Method of manufacturing quartz crystal vibrating piece Dec. 2, 2008
7432179 Controlling gate formation by removing dummy gate structures Oct. 7, 2008
7407851 DMOS device with sealed channel processing Aug. 5, 2008
7396757 Interconnect structure with dielectric air gaps Jul. 8, 2008
7348198 Liquid crystal display device and fabricating method thereof Mar. 25, 2008
7323401 Semiconductor substrate process using a low temperature deposited carbon-containing hard mask Jan. 29, 2008
7318993 Resistless lithography method for fabricating fine structures Jan. 15, 2008

1 2 3

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