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Class Information
Number: 438/550
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Diffusing a dopant > Nonuniform heating
Description: Processes including the nonuniform application of thermal energy to the semiconductor substrate (e.g., heating distinct areas as opposed to heating the entire substrate, etc.).










Patents under this class:

Patent Number Title Of Patent Date Issued
8490029 Method of fabricating a device using low temperature anneal processes, a device and design structure Jul. 16, 2013
8431063 Heat treatment for a panel and apparatus for carrying out the heat treatment method Apr. 30, 2013
8324011 Implementation of temperature-dependent phase switch layer for improved temperature uniformity during annealing Dec. 4, 2012
8318529 Laser anneal for image sensors Nov. 27, 2012
8236709 Method of fabricating a device using low temperature anneal processes, a device and design structure Aug. 7, 2012
8173528 Gallium-doped monocrystalline silicon solar cell and manufacture method for the same May. 8, 2012
8108159 Method of detecting degradation of semiconductor devices and method of detecting degradation of integrated circuits Jan. 31, 2012
8080485 Localized temperature control during rapid thermal anneal Dec. 20, 2011
8034700 Method of fabricating a diode Oct. 11, 2011
8017427 Backside-illuminated (BSI) image sensor with backside diffusion doping Sep. 13, 2011
8014895 Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon Sep. 6, 2011
7846823 Masking paste, method of manufacturing same, and method of manufacturing solar cell using masking paste Dec. 7, 2010
7622374 Method of fabricating an integrated circuit Nov. 24, 2009
7176112 Non-thermal annealing with electromagnetic radiation in the terahertz range of doped semiconductor material Feb. 13, 2007
7041582 Method of manufacturing semiconductor device May. 9, 2006
7001832 Method for limiting slip lines in a semiconductor substrate Feb. 21, 2006
6869865 Method of manufacturing semiconductor device Mar. 22, 2005
6551903 Melt through contact formation method Apr. 22, 2003
6544811 Micromachined device having electrically isolated components and a method for making the same Apr. 8, 2003
6475888 Method for forming ultra-shallow junctions using laser annealing Nov. 5, 2002
6413888 Method and apparatus for preventing rapid temperature variation of wafers during processing Jul. 2, 2002
6329272 Method and apparatus for iteratively, selectively tuning the impedance of integrated semiconductor devices using a focussed heating source Dec. 11, 2001
6083833 Method for forming conductive film for semiconductor device Jul. 4, 2000
5773337 Method for forming ultra-shallow junction of semiconductor device Jun. 30, 1998
5723356 Fabrication method for semiconductor device Mar. 3, 1998
5541138 Laser processing method, and method for forming insulated gate semiconductor device Jul. 30, 1996
5401686 Method of uniformly diffusing impurities into semiconductor wafers Mar. 28, 1995
4835113 Fabrication of dielectrically isolated devices with buried conductive layers May. 30, 1989
4774195 Process for the manufacture of semiconductor layers on semiconductor bodies or for the diffusion of impurities from compounds into semiconductor bodies utilizing an additional generation of ac Sep. 27, 1988
4737470 Method of making three dimensional structures of active and passive semiconductor components Apr. 12, 1988
4619036 Self-aligned low-temperature emitter drive-in Oct. 28, 1986











 
 
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