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Class Information
Number: 438/548
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Diffusing a dopant > Plural dopants simultaneously in plural regions
Description: Processes for permeating multiple electrically active impurities in multiple localized areas.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7495347 |
Ion implantation with multiple concentration levels |
Feb. 24, 2009 |
| 7407875 |
Low resistance contact structure and fabrication thereof |
Aug. 5, 2008 |
| 7384825 |
Methods of fabricating phase change memory elements having a confined portion of phase change material on a recessed contact |
Jun. 10, 2008 |
| 7371648 |
Method for manufacturing a transistor device having an improved breakdown voltage and a method for manufacturing an integrated circuit using the same |
May. 13, 2008 |
| 7338876 |
Method for manufacturing a semiconductor device |
Mar. 4, 2008 |
| 7235436 |
Method for doping structures in FinFET devices |
Jun. 26, 2007 |
| 7144751 |
Back-contact solar cells and methods for fabrication |
Dec. 5, 2006 |
| 7115437 |
Micromachined device having electrically isolated components and a method for making the same |
Oct. 3, 2006 |
| 7109098 |
Semiconductor junction formation process including low temperature plasma deposition of an optical absorption layer and high speed optical annealing |
Sep. 19, 2006 |
| 7045449 |
Methods of forming semiconductor constructions |
May. 16, 2006 |
| 7005364 |
Method for manufacturing semiconductor device |
Feb. 28, 2006 |
| 6900113 |
Method for producing bonded wafer and bonded wafer |
May. 31, 2005 |
| 6897103 |
MOS integrated circuit with reduced on resistance |
May. 24, 2005 |
| 6887745 |
Polysilicon thin film transistor and method of forming the same |
May. 3, 2005 |
| 6852563 |
Process of fabricating electro-optic polymer devices with polymer sustained microelectrodes |
Feb. 8, 2005 |
| 6797597 |
Process for treating complementary regions of the surface of a substrate and semiconductor product obtained by this process |
Sep. 28, 2004 |
| 6706606 |
Buried zener diode structure and method of manufacture |
Mar. 16, 2004 |
| 6645820 |
Polycrystalline silicon diode string for ESD protection of different power supply connections |
Nov. 11, 2003 |
| 6613974 |
Tandem Si-Ge solar cell with improved conversion efficiency |
Sep. 2, 2003 |
| 6468825 |
Method for producing semiconductor temperature sensor |
Oct. 22, 2002 |
| 6342418 |
Semiconductor device and manufacturing method thereof |
Jan. 29, 2002 |
| 6329251 |
Microelectronic fabrication method employing self-aligned selectively deposited silicon layer |
Dec. 11, 2001 |
| 6303436 |
Method for fabricating a type of trench mask ROM cell |
Oct. 16, 2001 |
| 6180442 |
Bipolar transistor with an inhomogeneous emitter in a BICMOS integrated circuit method |
Jan. 30, 2001 |
| 6177298 |
Electrostatic discharge protection circuit for an integrated circuit and method of manufacturing |
Jan. 23, 2001 |
| 6162711 |
In-situ boron doped polysilicon with dual layer and dual grain structure for use in integrated circuits manufacturing |
Dec. 19, 2000 |
| 6156594 |
Fabrication of bipolar/CMOS integrated circuits and of a capacitor |
Dec. 5, 2000 |
| 6117719 |
Oxide spacers as solid sources for gallium dopant introduction |
Sep. 12, 2000 |
| 6110276 |
Method for making n-type semiconductor diamond |
Aug. 29, 2000 |
| 6103561 |
Depletion mode MOS capacitor with patterned V.sub.T implants |
Aug. 15, 2000 |
| 6051488 |
Methods of forming semiconductor switching devices having trench-gate electrodes |
Apr. 18, 2000 |
| 5933721 |
Method for fabricating differential threshold voltage transistor pair |
Aug. 3, 1999 |
| 5930616 |
Methods of forming a field effect transistor and method of forming CMOS circuitry |
Jul. 27, 1999 |
| 5913116 |
Method of manufacturing an active region of a semiconductor by diffusing a dopant out of a sidewall spacer |
Jun. 15, 1999 |
| 5908305 |
Electro-optic device |
Jun. 1, 1999 |
| 5909616 |
Method of forming CMOS circuitry |
Jun. 1, 1999 |
| 5902117 |
PN-diode of SiC and a method for production thereof |
May. 11, 1999 |
| 5897364 |
Method of forming N- and P-channel transistors with shallow junctions |
Apr. 27, 1999 |
| 5773349 |
Method for making ultrahigh speed bipolar transistor |
Jun. 30, 1998 |
| 5770490 |
Method for producing dual work function CMOS device |
Jun. 23, 1998 |
| 5766964 |
Processes for producing low cost, high efficiency silicon solar cells |
Jun. 16, 1998 |
| 5721165 |
Method of forming CMOS circuitry |
Feb. 24, 1998 |
| 5686322 |
Process for doping two levels of a double poly bipolar transistor after formation of second poly layer |
Nov. 11, 1997 |
| 5643810 |
Methods of forming BiCMOS semiconductor devices |
Jul. 1, 1997 |
| 5637525 |
Method of forming a CMOS circuitry |
Jun. 10, 1997 |
| 5627081 |
Method for processing silicon solar cells |
May. 6, 1997 |
| 5543356 |
Method of impurity doping into semiconductor |
Aug. 6, 1996 |
| 5510271 |
Processes for producing low cost, high efficiency silicon solar cells |
Apr. 23, 1996 |
| 5498554 |
Method of making extended drain resurf lateral DMOS devices |
Mar. 12, 1996 |
| 5496744 |
Method of fabricating complementary poly emitter transistors |
Mar. 5, 1996 |
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