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Class Information
Number: 438/542
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Diffusing a dopant
Description: Processes for permeating an electrically active impurity in a semiconductive region of the substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/556 Edge diffusion by using edge portion of structure other than masking layer to mask 42
438/545 Forming partially overlapping regions 106
438/557 From melt 35
438/558 From solid dopant source in contact with semiconductor region 284
438/565 From vapor phase 103
438/555 Laterally under mask opening 84
438/550 Nonuniform heating 31
438/554 Outwardly 57
438/546 Plural dopants in same region (e.g., through same mask opening, etc.) 167
438/548 Plural dopants simultaneously in plural regions 96
438/549 Single dopant forming plural diverse regions (e.g., forming regions of different concentrations or of different depths, etc.) 189
438/543 To control carrier lifetime (i.e., deep level dopant) 60
438/544 To solid-state solubility concentration 17
438/553 Using metal mask 25
438/551 Using multiple layered mask 107

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8669169 Diffusion sources from liquid precursors Mar. 11, 2014
8658454 Method of fabricating a solar cell Feb. 25, 2014
8629046 Semiconductor device with a dislocation structure and method of forming the same Jan. 14, 2014
8623749 Reduction of stored charge in the base region of a bipolar transistor to improve switching speed Jan. 7, 2014
8587113 Thermal plate with planar thermal zones for semiconductor processing Nov. 19, 2013
8557662 Method for fabricating side contact in semiconductor device using double trench process Oct. 15, 2013
8513642 Patterned doping of semiconductor substrates using photosensitive monolayers Aug. 20, 2013
8508016 Bipolar punch-through semiconductor device and method for manufacturing such a semiconductor device Aug. 13, 2013
8497570 Wafer, fabricating method of the same, and semiconductor substrate Jul. 30, 2013
8488644 Semiconductor laser element and manufacturing method thereof Jul. 16, 2013
8481413 Doping of semiconductor substrate through carbonless phosphorous-containing layer Jul. 9, 2013
8481414 Incorporating impurities using a discontinuous mask Jul. 9, 2013
8475690 Diffusing agent composition, method of forming impurity diffusion layer, and solar battery Jul. 2, 2013
8461032 Use of dopants with different diffusivities for solar cell manufacture Jun. 11, 2013
8461674 Thermal plate with planar thermal zones for semiconductor processing Jun. 11, 2013
8455339 Method for fabricating semiconductor device with side junction Jun. 4, 2013
8445368 Semiconductor device and method for manufacturing same May. 21, 2013
8420496 Semiconductor device and method of fabricating the same Apr. 16, 2013
8420517 Methods of forming a multi-doped junction with silicon-containing particles Apr. 16, 2013
8409976 Solar cell structures, photovoltaic panels and corresponding processes Apr. 2, 2013
8399342 Method for fabricating semiconductor device with buried bit lines Mar. 19, 2013
8378393 Conductive oxynitride and method for manufacturing conductive oxynitride film Feb. 19, 2013
8354333 Patterned doping of semiconductor substrates using photosensitive monolayers Jan. 15, 2013
8349698 Integrated semiconductor device and method of manufacturing the same Jan. 8, 2013
8338275 Methods of forming a metal contact on a silicon substrate Dec. 25, 2012
8339758 Transient voltage suppressor and method Dec. 25, 2012
8324062 Method for manufacturing a power semiconductor device Dec. 4, 2012
8236596 Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing Aug. 7, 2012
8236675 Semiconductor device and method of fabricating a semiconductor device Aug. 7, 2012
8236676 Integrated circuit having doped semiconductor body and method Aug. 7, 2012
8237239 Schottky diode device and method for fabricating the same Aug. 7, 2012
8222129 Method for manufacturing solar cell Jul. 17, 2012
8216926 Method of producing a partly or completely semi-insulating or p-type doped ZnO substrate, substrates obtained, and electronic, electro-optic or optoelectronic devices comprising them Jul. 10, 2012
8182710 Structuring method May. 22, 2012
8178410 Method for fabricating a semiconductor power device May. 15, 2012
8178431 Process for producing a PN homojunction in a nanostructure May. 15, 2012
8175131 Laser media with controlled concentration profile of active laser ions and method of making the same May. 8, 2012
8143094 Silicon carbide semiconductor device and manufacturing method thereof Mar. 27, 2012
8093133 Transient voltage suppressor and methods Jan. 10, 2012
8076227 Electroactive polymers for lithography Dec. 13, 2011
8076218 Method for the production of photo-patterned carbon electronics Dec. 13, 2011
8071451 Method of doping semiconductors Dec. 6, 2011
8053343 Method for forming selective emitter of solar cell and diffusion apparatus for forming the same Nov. 8, 2011
8053340 Method for fabricating semiconductor devices with reduced junction diffusion Nov. 8, 2011
8039289 Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing Oct. 18, 2011
8034700 Method of fabricating a diode Oct. 11, 2011
8017528 Impurity-activating thermal process method and thermal process apparatus Sep. 13, 2011
7998727 DNA-based electronic diodes and their applications Aug. 16, 2011
7998844 Method for manufacturing a semiconductor device Aug. 16, 2011
7993800 Multilayer active mask lithography Aug. 9, 2011

1 2 3 4 5 6

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