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Class Information
Number: 438/537
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Fusing dopant with substrate (i.e., alloy junction)
Description: Processes for incorporating an electrically active impurity into a semiconductor material during an operation affecting the partial melting of the substrate.

Sub-classes under this class:

Class Number Class Name Patents
438/539 Application of pressure to material during fusion 7
438/540 Including plural controlled heating or cooling steps or nonuniform heating 115
438/538 Using additional material to improve wettability or flow characteristics (e.g., flux, etc.) 21

Patents under this class:

Patent Number Title Of Patent Date Issued
8669169 Diffusion sources from liquid precursors Mar. 11, 2014
8658454 Method of fabricating a solar cell Feb. 25, 2014
8614115 Photovoltaic solar cell device manufacture Dec. 24, 2013
8501604 Method for forming a doped region in a semiconductor layer of a substrate and use of such method Aug. 6, 2013
8481419 Method for producing a metal contact on a coated semiconductor substrate Jul. 9, 2013
8455323 Method for manufacturing semiconductor wafer Jun. 4, 2013
8216926 Method of producing a partly or completely semi-insulating or p-type doped ZnO substrate, substrates obtained, and electronic, electro-optic or optoelectronic devices comprising them Jul. 10, 2012
8174074 Asymmetric embedded silicon germanium field effect transistor May. 8, 2012
7629243 Method for manufacturing semiconductor device Dec. 8, 2009
7268065 Methods of manufacturing metal-silicide features Sep. 11, 2007
7262119 Method for incorporating germanium into a semiconductor wafer Aug. 28, 2007
7189623 Semiconductor processing method and field effect transistor Mar. 13, 2007
7109098 Semiconductor junction formation process including low temperature plasma deposition of an optical absorption layer and high speed optical annealing Sep. 19, 2006
7060547 Method for forming a junction region of a semiconductor device Jun. 13, 2006
7012008 Dual spacer process for non-volatile memory devices Mar. 14, 2006
6872644 Semiconductor device with non-compounded contacts, and method of making Mar. 29, 2005
6784018 Method of forming chalcogenide comprising devices and method of forming a programmable memory cell of memory circuitry Aug. 31, 2004
6709959 Semiconductor device having a shallow junction and a fabrication process thereof Mar. 23, 2004
6703295 Method and apparatus for self-doping contacts to a semiconductor Mar. 9, 2004
6531379 High resolution dopant/impurity incorporation in semiconductors via a scanned atomic force probe Mar. 11, 2003
6507626 Bandpass phase tracker that automatically samples at prescribed carrier phases when digitizing VSB I-F signal Jan. 14, 2003
6500741 Method for making high voltage device Dec. 31, 2002
6479885 High voltage device and method Nov. 12, 2002
6376346 High voltage device and method for making the same Apr. 23, 2002
6287881 Semiconductor device with low parasitic capacitance Sep. 11, 2001
5589408 Method of forming an alloyed drain field effect transistor and device formed Dec. 31, 1996
5561079 Stalagraphy Oct. 1, 1996
4703553 Drive through doping process for manufacturing low back surface recombination solar cells Nov. 3, 1987
4436557 Modified laser-annealing process for improving the quality of electrical P-N junctions and devices Mar. 13, 1984
4392010 Photovoltaic cells having contacts and method of applying same Jul. 5, 1983
4389256 Method of manufacturing pn junction in group II-VI compound semiconductor Jun. 21, 1983
4349691 Method of making constant voltage solar cell and product formed thereby utilizing low-temperature aluminum diffusion Sep. 14, 1982
4301188 Process for producing contact to GaAs active region Nov. 17, 1981
4297149 Method of treating SiPOS passivated high voltage semiconductor device Oct. 27, 1981
4297391 Method of applying electrical contacts to a photovoltaic cell Oct. 27, 1981
4293587 Low resistance backside preparation for semiconductor integrated circuit chips Oct. 6, 1981
4246693 Method of fabricating semiconductor device by bonding together silicon substrate and electrode or the like with aluminum Jan. 27, 1981
4226017 Method for making a semiconductor device Oct. 7, 1980
4128897 Archival memory media and method for information recording thereon Dec. 5, 1978
4126496 Method of making a single chip temperature compensated reference diode Nov. 21, 1978
4081794 Alloy junction archival memory plane and methods for writing data thereon Mar. 28, 1978
4066485 Method of fabricating a semiconductor device Jan. 3, 1978
4056879 Method of forming silicon solar energy cell having improved back contact Nov. 8, 1977
3975756 Gadolinium doped germanium Aug. 17, 1976
3965279 Ohmic contacts for group III-V n-type semiconductors Jun. 22, 1976

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