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Class Information
Number: 438/535
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > By application of corpuscular or electromagnetic radiation (e.g., electron, laser, etc.)
Description: Process having a step of applying corpuscular or electromagnetic radiation to the semiconductor substrate to affect the incorporation of an electrically active dopant therein.

Sub-classes under this class:

Class Number Class Name Patents
438/536 Recoil implantation 14

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8703582 Laser processing method Apr. 22, 2014
8673755 Semiconductor device having metal gate and manufacturing method thereof Mar. 18, 2014
8669155 Hybrid channel semiconductor device and method for forming the same Mar. 11, 2014
8652893 Semiconductor device and manufacturing method thereof Feb. 18, 2014
8623694 Methods of forming fast ion conductors and memory devices comprising diffused metal ions Jan. 7, 2014
8604584 Semiconductor device and method of manufacturing semiconductor device Dec. 10, 2013
8603902 Engineering flat surfaces on materials doped via pulsed laser irradiation Dec. 10, 2013
8598050 Laser annealing method and apparatus Dec. 3, 2013
8586460 Controlling laser annealed junction depth by implant modification Nov. 19, 2013
8580646 Method of fabricating field effect transistors with low k sidewall spacers Nov. 12, 2013
8530979 Semiconductor package and method for manufacturing the same Sep. 10, 2013
8481393 Semiconductor substrate and method for manufacturing the same, and method for manufacturing semiconductor device Jul. 9, 2013
8435872 Method and apparatus for manufacturing semiconductor device May. 7, 2013
8372762 Manufacturing method of semiconductor device and laser processing apparatus Feb. 12, 2013
8309444 System and method of dosage profile control Nov. 13, 2012
8288292 Depositing conformal boron nitride film by CVD without plasma Oct. 16, 2012
8278739 Crystalline semiconductor film, semiconductor device, and method for manufacturing thereof Oct. 2, 2012
8173473 Laser system for processing solar wafers in a carrier May. 8, 2012
8148636 Electric device Apr. 3, 2012
8138071 Isotopically-enriched boron-containing compounds, and methods of making and using same Mar. 20, 2012
8114693 Method of fabricating solid state gas dissociating device by laser doping Feb. 14, 2012
8108159 Method of detecting degradation of semiconductor devices and method of detecting degradation of integrated circuits Jan. 31, 2012
8084331 Method of treating semiconductor element Dec. 27, 2011
8080467 Silicon-based visible and near-infrared optoelectric devices Dec. 20, 2011
8076226 Apparatus for annealing, method for annealing, and method for manufacturing a semiconductor device Dec. 13, 2011
8067303 Solid state energy conversion device Nov. 29, 2011
8062965 Isotopically-enriched boron-containing compounds, and methods of making and using same Nov. 22, 2011
8040604 Imaging system and method for providing extended depth of focus, range extraction and super resolved imaging Oct. 18, 2011
8030192 Process for manufacturing a large-scale integration MOS device and corresponding MOS device Oct. 4, 2011
8017528 Impurity-activating thermal process method and thermal process apparatus Sep. 13, 2011
7994031 Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions Aug. 9, 2011
7989333 Methods of forming integrated circuit devices having anisotropically-oxidized nitride layers Aug. 2, 2011
7981816 Impurity-activating thermal process method and thermal process apparatus Jul. 19, 2011
7955938 Wiring technique Jun. 7, 2011
7947584 Suitably short wavelength light for laser annealing of silicon in DSA type systems May. 24, 2011
7935946 Ion implantation method and apparatus May. 3, 2011
7935945 Ion implantation method and apparatus May. 3, 2011
7915153 Passivation film and method of forming the same Mar. 29, 2011
7906405 Polysilicon structures resistant to laser anneal lightpipe waveguide effects Mar. 15, 2011
7888251 Photo-assisted hydrogenation process Feb. 15, 2011
7867868 Absorber layer candidates and techniques for application Jan. 11, 2011
7851318 Semiconductor substrate and method for manufacturing the same, and method for manufacturing semiconductor device Dec. 14, 2010
7846803 Multiple millisecond anneals for semiconductor device fabrication Dec. 7, 2010
7846804 Method for fabricating high tensile stress film Dec. 7, 2010
7838402 Method of manufacturing electronic apparatus and electronic apparatus Nov. 23, 2010
7829446 Method for dividing wafer, method for manufacturing silicon devices, and method for manufacturing liquid ejecting heads Nov. 9, 2010
7811914 Apparatus and method for increasing thermal conductivity of a substrate Oct. 12, 2010
7799666 Method of spatially selective laser-assisted doping of a semiconductor Sep. 21, 2010
7745297 Method of substrate with transparent electrodes and devices incorporating it Jun. 29, 2010
7732311 Methods of manufacturing semiconductor devices Jun. 8, 2010

1 2 3 4 5

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