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Class Information
Number: 438/533
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Ion implantation of dopant into semiconductor region > And contact formation (i.e., metallization)
Description: Process including a step of forming an electrical contact to a semiconductor region of the substrate.










Sub-classes under this class:

Class Number Class Name Patents
438/534 Rectifying contact (i.e., schottky contact) 65


Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8709929 Methods of forming semiconductor devices having diffusion regions of reduced width Apr. 29, 2014
8658530 Method of fabricating an epitaxial Ni silicide film Feb. 25, 2014
8642464 Method of manufacturing semiconductor device Feb. 4, 2014
8586431 Three dimensional integration and methods of through silicon via creation Nov. 19, 2013
8569154 Three dimensional integration and methods of through silicon via creation Oct. 29, 2013
8530313 Method of manufacturing trench MOSFET structures using three masks process Sep. 10, 2013
8518810 Method for manufacturing a semiconductor device Aug. 27, 2013
8507375 Alignment tolerant semiconductor contact and method Aug. 13, 2013
8492252 Three dimensional integration and methods of through silicon via creation Jul. 23, 2013
8487397 Method for forming self-aligned contact Jul. 16, 2013
8436330 Electrically actuated devices May. 7, 2013
8415238 Three dimensional integration and methods of through silicon via creation Apr. 9, 2013
8377739 Continuously optimized solar cell metallization design through feed-forward process Feb. 19, 2013
8319264 Semiconductor device and method for manufacturing the same Nov. 27, 2012
8252642 Fabrication methods for radiation hardened isolation structures Aug. 28, 2012
8237270 Wiring board manufacturing method, semiconductor device manufacturing method and wiring board Aug. 7, 2012
8110431 Ion implanted selective emitter solar cells with in situ surface passivation Feb. 7, 2012
8084293 Continuously optimized solar cell metallization design through feed-forward process Dec. 27, 2011
8058157 FinFET structure with multiply stressed gate electrode Nov. 15, 2011
8008179 Methods using silver compositions for micro-deposition direct writing silver conductor lines on photovoltaic wafers Aug. 30, 2011
7947583 Forming of silicide areas in a semiconductor device May. 24, 2011
7939365 Phase change memory device, manufacturing method thereof and operating method thereof May. 10, 2011
7915128 High voltage semiconductor devices Mar. 29, 2011
7915088 Wiring board manufacturing method, semiconductor device manufacturing method and wiring board Mar. 29, 2011
7863193 Integrated circuit fabrication process using a compression cap layer in forming a silicide with minimal post-laser annealing dopant deactivation Jan. 4, 2011
7863083 High temperature processing compatible metal gate electrode for pFETS and methods for fabrication Jan. 4, 2011
7816253 Surface treatment of inter-layer dielectric Oct. 19, 2010
7736984 Method of forming a low resistance semiconductor contact and structure therefor Jun. 15, 2010
7737036 Integrated circuit fabrication process with minimal post-laser annealing dopant deactivation Jun. 15, 2010
7704866 Methods for forming composite nanoparticle-metal metallization contacts on a substrate Apr. 27, 2010
7678642 Method for manufacturing phase change memory device using a patterning process Mar. 16, 2010
7670950 Copper metallization of through silicon via Mar. 2, 2010
7632736 Self-aligned contact formation utilizing sacrificial polysilicon Dec. 15, 2009
7601634 Process for producing a contact pad on a region of an integrated circuit, in particular on the electrodes of a transistor Oct. 13, 2009
7572700 EEPROM and method of manufacturing the same Aug. 11, 2009
7446008 Method for fabricating silicide layers for semiconductor device Nov. 4, 2008
7435637 Quantum wire gate device and method of making same Oct. 14, 2008
7402864 Method for forming a DRAM semiconductor device with a sense amplifier Jul. 22, 2008
7375019 Image sensor and method for fabricating the same May. 20, 2008
7341931 Methods of forming low resistivity contact for an integrated circuit device Mar. 11, 2008
7326606 Semiconductor processing methods Feb. 5, 2008
7307008 Methods of forming integrated circuit devices including a multi-layer poly film cell pad contact hole Dec. 11, 2007
7271103 Surface treated low-k dielectric as diffusion barrier for copper metallization Sep. 18, 2007
7268065 Methods of manufacturing metal-silicide features Sep. 11, 2007
7265039 Method for fabricating semiconductor device with improved refresh time Sep. 4, 2007
7241705 Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects Jul. 10, 2007
7214594 Method of making semiconductor device using a novel interconnect cladding layer May. 8, 2007
7172933 Recessed polysilicon gate structure for a strained silicon MOSFET device Feb. 6, 2007
7064048 Method of forming a semi-insulating region Jun. 20, 2006
6984574 Cobalt silicide fabrication using protective titanium Jan. 10, 2006

1 2 3 4 5 6










 
 
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