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Class Information
Number: 438/531
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Ion implantation of dopant into semiconductor region > Using shadow mask
Description: Process involving the use of a spaced templet positioned with respect to the ion source and the semiconductor substrate in such a manner as to allow the electrically active dopant ions to impinge only a portion of the semiconductor substrate.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8710633 Semiconductor overlapped PN structure and manufacturing method thereof Apr. 29, 2014
8637385 High voltage durability transistor and method for fabricating same Jan. 28, 2014
8569157 Stepped masking for patterned implantation Oct. 29, 2013
8524586 Semiconductor overlapped PN structure and manufacturing method thereof Sep. 3, 2013
8519403 Angled implantation for deep submicron device optimization Aug. 27, 2013
8476153 Method of manufacturing a semiconductor device Jul. 2, 2013
8461553 Masked ion implant with fast-slow scan Jun. 11, 2013
8445384 High density six transistor FinFET SRAM cell layout May. 21, 2013
8372708 Device structure and manufacturing method using HDP deposited using deposited source-body implant block Feb. 12, 2013
8372737 Use of a shadow mask and a soft mask for aligned implants in solar cells Feb. 12, 2013
8334193 Method of manufacturing semiconductor device Dec. 18, 2012
8330128 Implant mask with moveable hinged mask segments Dec. 11, 2012
8328936 Producing a diamond semiconductor by implanting dopant using ion implantation Dec. 11, 2012
8258052 Method of manufacturing silicon carbide semiconductor device Sep. 4, 2012
8258042 Buried layer of an integrated circuit Sep. 4, 2012
8252670 Production method for a lateral electro-optical modulator on silicon with auto-aligned implanted zones Aug. 28, 2012
8242005 Using multiple masks to form independent features on a workpiece Aug. 14, 2012
8202789 Implanting a solar cell substrate using a mask Jun. 19, 2012
8193018 Patterning method for light-emitting devices Jun. 5, 2012
8189634 Method of manufacturing a laser gain medium having a spatially variable gain profile May. 29, 2012
8173527 Stepped masking for patterned implantation May. 8, 2012
8008176 Masked ion implant with fast-slow scan Aug. 30, 2011
7977126 Method of manufacturing organic light emitting device having photo diode Jul. 12, 2011
7977225 Reducing implant degradation in tilted implantations by shifting implantation masks Jul. 12, 2011
7955929 Method of forming a semiconductor device having an active area and a termination area Jun. 7, 2011
7927969 Cleaning of photolithography masks Apr. 19, 2011
7884001 Image sensor and method for manufacturing the same Feb. 8, 2011
7883909 Method to measure ion beam angle Feb. 8, 2011
7883946 Angled implantation for deep submicron device optimization Feb. 8, 2011
7871908 Method of manufacturing semiconductor device Jan. 18, 2011
7816273 Technique for removing resist material after high dose implantation in a semiconductor device Oct. 19, 2010
7767562 Method of implanting using a shadow effect Aug. 3, 2010
7749874 Deep implant self-aligned to polysilicon gate Jul. 6, 2010
7691713 Method of manufacturing semiconductor device capable of suppressing impurity concentration reduction in doped channel region arising from formation of gate insulating film Apr. 6, 2010
7659186 Method of manufacturing CMOS image sensor Feb. 9, 2010
7618867 Method of forming a doped portion of a semiconductor and method of forming a transistor Nov. 17, 2009
7598161 Method of forming transistor devices with different threshold voltages using halo implant shadowing Oct. 6, 2009
7579232 Method of making a nonvolatile memory device including forming a pillar shaped semiconductor device and a shadow mask Aug. 25, 2009
7573052 Exposure apparatus, exposure method, and device manufacturing method Aug. 11, 2009
7550355 Low-leakage transistor and manufacturing method thereof Jun. 23, 2009
7541266 Covert transformation of transistor properties as a circuit protection method Jun. 2, 2009
7535104 Structure and method for bond pads of copper-metallized integrated circuits May. 19, 2009
7491586 Semiconductor device with leakage implant and method of fabrication Feb. 17, 2009
7488653 Semiconductor device and method for implantation of doping agents in a channel Feb. 10, 2009
7432179 Controlling gate formation by removing dummy gate structures Oct. 7, 2008
7381607 Method of forming a spiral inductor in a semiconductor substrate Jun. 3, 2008
7375012 Method of forming multilayer film May. 20, 2008
7314803 Method for producing a semiconductor structure Jan. 1, 2008
7297581 SRAM formation using shadow implantation Nov. 20, 2007
7268065 Methods of manufacturing metal-silicide features Sep. 11, 2007

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