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Class Information
Number: 438/530
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Ion implantation of dopant into semiconductor region > Including heat treatment
Description: Process including a step of heat treating the semiconductive substrate.

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
8691676 Substrate heat treating apparatus, temperature control method of substrate heat treating apparatus, manufacturing method of semiconductor device, temperature control program of substrate heat Apr. 8, 2014
8679959 High sensitivity photodetectors, imaging arrays, and high efficiency photovoltaic devices produced using ion implantation and femtosecond laser irradiation Mar. 25, 2014
8664116 Heat treatment method for growing silicide Mar. 4, 2014
8633096 Creating anisotropically diffused junctions in field effect transistor devices Jan. 21, 2014
8629016 Multiple transistor types formed in a common epitaxial layer by differential out-diffusion from a doped underlayer Jan. 14, 2014
8603900 Reducing surface recombination and enhancing light trapping in solar cells Dec. 10, 2013
8580663 Formation of shallow junctions by diffusion from a dielectronic doped by cluster or molecular ion beams Nov. 12, 2013
8580646 Method of fabricating field effect transistors with low k sidewall spacers Nov. 12, 2013
8581329 Semiconductor device and method for manufacturing same Nov. 12, 2013
8569156 Reducing or eliminating pre-amorphization in transistor manufacture Oct. 29, 2013
8563408 Spin-on formulation and method for stripping an ion implanted photoresist Oct. 22, 2013
8557693 Contact resistivity reduction in transistor devices by deep level impurity formation Oct. 15, 2013
8551842 Method of manufacturing semiconductor device Oct. 8, 2013
8536034 Methods of forming stressed silicon-carbon areas in an NMOS transistor Sep. 17, 2013
8536035 Silicon-on-insulator substrate and method of forming Sep. 17, 2013
8530286 Low power semiconductor transistor structure and method of fabrication thereof Sep. 10, 2013
8530313 Method of manufacturing trench MOSFET structures using three masks process Sep. 10, 2013
8501570 Method of manufacturing source/drain structures Aug. 6, 2013
8497205 Semiconductor device manufacturing method, wiring and semiconductor device Jul. 30, 2013
8490029 Method of fabricating a device using low temperature anneal processes, a device and design structure Jul. 16, 2013
8486784 Vertical semiconductor device and method of manufacturing the same Jul. 16, 2013
8486781 Method of manufacturing flash memory device Jul. 16, 2013
8476127 Integrated lateral high voltage MOSFET Jul. 2, 2013
8476153 Method of manufacturing a semiconductor device Jul. 2, 2013
8461034 Localized implant into active region for enhanced stress Jun. 11, 2013
8461033 Heat treatment apparatus and method for heating substrate by light-irradiation Jun. 11, 2013
8461032 Use of dopants with different diffusivities for solar cell manufacture Jun. 11, 2013
8461031 Method for making a thin-film structure and resulting thin-film structure Jun. 11, 2013
8450193 Techniques for temperature-controlled ion implantation May. 28, 2013
8436330 Electrically actuated devices May. 7, 2013
8404573 Plasma processing method and apparatus Mar. 26, 2013
8404546 Source/drain carbon implant and RTA anneal, pre-SiGe deposition Mar. 26, 2013
8394658 Methods of using a silicon nanoparticle fluid to control in situ a set of dopant diffusion profiles Mar. 12, 2013
8343862 Semiconductor device with a field stop zone and process of producing the same Jan. 1, 2013
8328936 Producing a diamond semiconductor by implanting dopant using ion implantation Dec. 11, 2012
8309474 Ultrafast laser annealing with reduced pattern density effects in integrated circuit fabrication Nov. 13, 2012
8304323 Semiconductor element manufacturing method Nov. 6, 2012
8304330 Method for low temperature ion implantation Nov. 6, 2012
8299530 Structure and method to fabricate pFETS with superior GIDL by localizing workfunction Oct. 30, 2012
8288259 Plasma processing method and apparatus Oct. 16, 2012
8288258 Method for producing a semiconductor Oct. 16, 2012
8288255 N-type doping of zinc telluride Oct. 16, 2012
8283648 Resistance variable memory cell Oct. 9, 2012
8278196 High surface dopant concentration semiconductor device and method of fabricating Oct. 2, 2012
8273633 Method of enhancing dopant activation without suffering additional dopant diffusion Sep. 25, 2012
8263484 High resistivity silicon wafer and method for manufacturing the same Sep. 11, 2012
8263483 Method including producing a monocrystalline layer Sep. 11, 2012
8258042 Buried layer of an integrated circuit Sep. 4, 2012
8252673 Spin-on formulation and method for stripping an ion implanted photoresist Aug. 28, 2012
8236709 Method of fabricating a device using low temperature anneal processes, a device and design structure Aug. 7, 2012

1 2 3 4 5 6 7 8 9 10 11

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