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Class Information
Number: 438/53
Name: Semiconductor device manufacturing: process > Making device or circuit responsive to nonelectrical signal > Physical stress responsive > Having diaphragm element
Description: Process for making a physical stress responsive device or circuit which has a thin deflectable membrane.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8710601 MEMS structure and method for making the same Apr. 29, 2014
8703517 Method of Manufacturing a Semiconductor Device Including Removing a Reformed Layer Apr. 22, 2014
8691611 Method for creating a micromechanical membrane structure and MEMS component Apr. 8, 2014
8683847 Microelectromechanical systems type semiconductor gas sensor using microheater having many holes and method for manufacturing the same Apr. 1, 2014
8685778 Planar cavity MEMS and related structures, methods of manufacture and design structures Apr. 1, 2014
8673671 Methods and devices for fabricating tri-layer beams Mar. 18, 2014
8674464 MEMS component, method for producing a MEMS component, and method for handling a MEMS component Mar. 18, 2014
8664029 Process for fabricating a capacitance type tri-axial accelerometer Mar. 4, 2014
8658453 Capacitive micromachined ultrasonic transducer Feb. 25, 2014
8659099 Method for manufacturing a micromechanical structure, and micromechanical structure Feb. 25, 2014
8659167 Sensor packaging method and sensor packages Feb. 25, 2014
8653613 Electromechanical transducer and method of manufacturing the same Feb. 18, 2014
8652971 Cavity process etch undercut monitor Feb. 18, 2014
8647908 Semiconductor pressure sensor and method of manufacturing semiconductor pressure sensor Feb. 11, 2014
8646335 Contact stress sensor Feb. 11, 2014
8648433 Method for producing oblique surfaces in a substrate and wafer having an oblique surface Feb. 11, 2014
8642986 Integrated circuit having microelectromechanical system device and method of fabricating the same Feb. 4, 2014
8637943 Multi-axis integrated MEMS devices with CMOS circuits and method therefor Jan. 28, 2014
8633088 Glass frit wafer bond protective structure Jan. 21, 2014
8627566 Method for packaging a microelectromechanical system (MEMS) device Jan. 14, 2014
8629517 Wafer level packaging Jan. 14, 2014
8613287 Apparatus for preventing stiction of MEMS microstructure Dec. 24, 2013
8614492 Nanowire stress sensors, stress sensor integrated circuits, and design structures for a stress sensor integrated circuit Dec. 24, 2013
8610223 Embedded microelectromechanical systems sensor and related devices and methods Dec. 17, 2013
8605920 Condenser microphone having flexure hinge diaphragm and method of manufacturing the same Dec. 10, 2013
8604566 Sensor module and semiconductor chip Dec. 10, 2013
8601879 Capacitance type pressure sensor and method for manufacturing a capacitance type pressure sensor Dec. 10, 2013
8590389 MEMS pressure sensor device and manufacturing method thereof Nov. 26, 2013
8587078 Integrated circuit and fabricating method thereof Nov. 19, 2013
8580126 Piezoelectric vibrating pieces comprising edge mesa steps, and methods for manufacturing same Nov. 12, 2013
8569092 Method for fabricating a microelectromechanical sensor with a piezoresistive type readout Oct. 29, 2013
8569851 Sensor and method for fabricating the same Oct. 29, 2013
8564026 Chip, method for producing a chip and device for laser ablation Oct. 22, 2013
8557718 Method for blister-free passivation of a silicon surface Oct. 15, 2013
8558250 Displays with embedded MEMS sensors and related methods Oct. 15, 2013
8558327 Micromechanical component and corresponding production method Oct. 15, 2013
8558330 Deep well process for MEMS pressure sensor Oct. 15, 2013
8552513 Semiconductor pressure sensor Oct. 8, 2013
8551798 Microstructure with an enhanced anchor Oct. 8, 2013
8541313 Method for etching a sacrificial layer for a micro-machined structure Sep. 24, 2013
8541853 High frequency CMUT Sep. 24, 2013
8535967 Method and system for etching a diaphragm pressure sensor Sep. 17, 2013
8536663 Metal mesh lid MEMS package and method Sep. 17, 2013
8536667 Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy Sep. 17, 2013
8530261 Method for producing a component, and sensor element Sep. 10, 2013
8524585 Method of manufacturing semiconductor device Sep. 3, 2013
8516896 Semiconductor pressure sensor and method of manufacturing the same Aug. 27, 2013
8518733 Method of manufacturing an electromechanical transducer Aug. 27, 2013
8511171 Device for measuring environmental forces and method of fabricating the same Aug. 20, 2013
8513041 MEMS integrated chip and method for making same Aug. 20, 2013

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