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Class Information
Number: 438/529
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Ion implantation of dopant into semiconductor region > Including multiple implantation steps > Using same conductivity-type dopant
Description: Process wherein the multiple implantation steps introduce electrically active dopant ions of the same conductivity type into one or more regions of the semiconductor substrate.










Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8703578 Middle in-situ doped SiGe junctions for PMOS devices on 28 nm low power/high performance technologies using a silicon oxide encapsulation, early halo and extension implantations Apr. 22, 2014
8563381 Method for manufacturing a power semiconductor device Oct. 22, 2013
8558643 Micromechanical device including N-type doping for providing temperature compensation and method of designing thereof Oct. 15, 2013
8507373 Semiconductor device including transistors of different junction depth, and method of manufacturing the same Aug. 13, 2013
8501570 Method of manufacturing source/drain structures Aug. 6, 2013
8486815 Back-side illumination image sensor and method for fabricating back-side illumination image sensor Jul. 16, 2013
8470677 Method of manufacturing semiconductor device Jun. 25, 2013
8461032 Use of dopants with different diffusivities for solar cell manufacture Jun. 11, 2013
8431455 Method of improving memory cell device by ion implantation Apr. 30, 2013
8399309 Semiconductor device manufacturing method Mar. 19, 2013
8343863 N-type carrier enhancement in semiconductors Jan. 1, 2013
8328936 Producing a diamond semiconductor by implanting dopant using ion implantation Dec. 11, 2012
8329568 Semiconductor device and method for making the same Dec. 11, 2012
8309445 Bi-directional self-aligned FET capacitor Nov. 13, 2012
8298875 Method for fabrication of a semiconductor device and structure Oct. 30, 2012
8227329 Semiconductor device and method for manufacturing the same Jul. 24, 2012
8211784 Method for manufacturing a semiconductor device with less leakage current induced by carbon implant Jul. 3, 2012
8187959 Semiconductor substrate with solid phase epitaxial regrowth with reduced junction leakage and method of producing same May. 29, 2012
8178412 Semiconductor memory device and method of manufacturing the same May. 15, 2012
8105926 Method for producing a semiconductor device by plasma doping a semiconductor region to form an impurity region Jan. 31, 2012
8084341 Semiconductor device and method for manufacturing the same Dec. 27, 2011
8003501 Method of doping P-type impurity ions in dual poly gate and method of forming dual poly gate using the same Aug. 23, 2011
7981747 Semiconductor device and a method of manufacturing the same Jul. 19, 2011
7972947 Method for fabricating a semiconductor element, and semiconductor element Jul. 5, 2011
7968401 Reducing photoresist layer degradation in plasma immersion ion implantation Jun. 28, 2011
7943459 Semiconductor device and method of manufacturing the semiconductor device May. 17, 2011
7939440 Junction leakage suppression in memory devices May. 10, 2011
7927954 Method for fabricating strained-silicon metal-oxide semiconductor transistors Apr. 19, 2011
7868387 Low leakage protection device Jan. 11, 2011
7867884 Sample wafer fabrication method Jan. 11, 2011
7863147 Semiconductor device and fabrication method thereof Jan. 4, 2011
7825016 Method of producing a semiconductor element Nov. 2, 2010
7825441 Junction field effect transistor with a hyperabrupt junction Nov. 2, 2010
7790586 Plasma doping method Sep. 7, 2010
7781289 Method for fabricating higher quality thicker gate oxide in a non-volatile memory cell and associated circuits Aug. 24, 2010
7776726 Semiconductor devices and methods of manufacture thereof Aug. 17, 2010
7759208 Low temperature ion implantation for improved silicide contacts Jul. 20, 2010
7749874 Deep implant self-aligned to polysilicon gate Jul. 6, 2010
7749798 Optimized photodiode process for improved transfer gate leakage Jul. 6, 2010
7704822 Semiconductor device Apr. 27, 2010
7700468 Semiconductor device and method of fabricating the same Apr. 20, 2010
7696053 Implantation method for doping semiconductor substrate Apr. 13, 2010
7678674 Memory cell dual pocket implant Mar. 16, 2010
7662690 Method of preparing a semiconductor substrate utilizing plural implants under an isolation region to isolate adjacent wells Feb. 16, 2010
7659188 Semiconductor device and method for manufacturing the same Feb. 9, 2010
7625774 Method of manufacturing CMOS image sensor Dec. 1, 2009
7598162 Method of manufacturing semiconductor device Oct. 6, 2009
7589366 Solid-state imaging device and method for manufacturing the same Sep. 15, 2009
7585737 Method of manufacturing double diffused drains in semiconductor devices Sep. 8, 2009
7550355 Low-leakage transistor and manufacturing method thereof Jun. 23, 2009

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