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Class Information
Number: 438/526
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Ion implantation of dopant into semiconductor region > Forming buried region
Description: Process involving a step of producing a region implanted with an electrically active dopant which is not in contact with the free surface of the semiconductor substrate through which it was implanted.

Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
8703592 Methods of forming semiconductor devices having faceted semiconductor patterns Apr. 22, 2014
8629026 Source tip optimization for high voltage transistor devices Jan. 14, 2014
8575683 Semiconductor device and method of fabricating the same Nov. 5, 2013
8557691 Method of fabricating semiconductor device having buried wiring and related device Oct. 15, 2013
8507311 Method for forming an image sensing device Aug. 13, 2013
8501603 Method for fabricating high voltage transistor Aug. 6, 2013
8501567 Manufacturing method of high voltage device Aug. 6, 2013
8486814 Wafer backside defectivity clean-up utilizing selective removal of substrate material Jul. 16, 2013
8481413 Doping of semiconductor substrate through carbonless phosphorous-containing layer Jul. 9, 2013
8476739 Graphene grown substrate and electronic/photonic integrated circuits using same Jul. 2, 2013
8476629 Enhanced wafer test line structure Jul. 2, 2013
8445357 Method of fabricating semiconductor integrated circuit device and semiconductor integrated circuit device fabricated using the method May. 21, 2013
RE44156 Method for forming single-level electrically erasable and programmable read only memory operated in environment with high/low-voltage Apr. 16, 2013
8377808 Semiconductor device and method of manufacturing the same Feb. 19, 2013
8377799 Method of manufacturing SOI substrate Feb. 19, 2013
8367519 Method for the preparation of a multi-layered crystalline structure Feb. 5, 2013
8361894 Methods of forming FinFET semiconductor devices with different fin heights Jan. 29, 2013
8328936 Producing a diamond semiconductor by implanting dopant using ion implantation Dec. 11, 2012
8329499 Method of forming lateral overflow drain and channel stop regions in image sensors Dec. 11, 2012
8314463 Method for fabricating super-steep retrograde well MOSFET on SOI or bulk silicon substrate, and device fabricated in accordance with the method Nov. 20, 2012
8314002 Semiconductor device having increased switching speed Nov. 20, 2012
8258042 Buried layer of an integrated circuit Sep. 4, 2012
8222124 Method for manufacturing SIMOX wafer and SIMOX wafer Jul. 17, 2012
8207046 Method for producing semiconductor device and semiconductor device produced by same method Jun. 26, 2012
8178411 Method for producing a stop zone in a semiconductor body and semiconductor component having a stop zone May. 15, 2012
8154055 CMOS image sensor and method for fabricating the same Apr. 10, 2012
8134224 Radio frequency semiconductor device Mar. 13, 2012
8119471 Semiconductor device and method for manufacturing the same Feb. 21, 2012
8114743 Integrated circuit device with a semiconductor body and method for the production of an integrated circuit device Feb. 14, 2012
8043947 Method to eliminate re-crystallization border defects generated during solid phase epitaxy of a DSB substrate Oct. 25, 2011
8026160 Semiconductor device and semiconductor device manufacturing method Sep. 27, 2011
8012852 Controlled process and resulting device Sep. 6, 2011
7999312 Insulated gate-type semiconductor device having a low concentration diffusion region Aug. 16, 2011
7981783 Semiconductor device and method for fabricating the same Jul. 19, 2011
7977200 Charge breakdown avoidance for MIM elements in SOI base technology and method Jul. 12, 2011
7960259 Semiconductor structure with coincident lattice interlayer Jun. 14, 2011
7951692 Method of producing semiconductor substrate having an SOI structure May. 31, 2011
7943455 CMOS image sensors and methods of fabricating the same May. 17, 2011
7943497 Method for manufacturing an SOI substrate May. 17, 2011
7919391 Methods for preparing a bonding surface of a semiconductor wafer Apr. 5, 2011
7863170 Semiconductor body comprising a transistor structure and method for producing a transistor structure Jan. 4, 2011
7846818 Controlled process and resulting device Dec. 7, 2010
7811878 Method of manufacturing SOI substrate Oct. 12, 2010
7811881 Methods for forming semiconductor structures with buried isolation collars and semiconductor structures formed by these methods Oct. 12, 2010
7807545 Method for manufacturing SIMOX wafer Oct. 5, 2010
7799652 Method for producing epitaxial wafer with buried diffusion layer and epitaxial wafer with buried diffusion layer Sep. 21, 2010
7795117 Method of producing semiconductor substrate having an SOI structure Sep. 14, 2010
7772048 Forming semiconductor fins using a sacrificial fin Aug. 10, 2010
7772098 Method for manufacturing semiconductor device Aug. 10, 2010
7759246 Semiconductor device having a plurality of semiconductor chips and method for manufacturing the same Jul. 20, 2010

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