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Class Information
Number: 438/525
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Ion implantation of dopant into semiconductor region > Using oblique beam
Description: Process wherein the angle of the ion beam relative to the major surface of the semiconductor substrate is other than 90 degrees.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8709928 Semiconductor fin device and method for forming the same using high tilt angle implant Apr. 29, 2014
8703592 Methods of forming semiconductor devices having faceted semiconductor patterns Apr. 22, 2014
8669160 Method for manufacturing a semiconductor device Mar. 11, 2014
8669170 Methods of reducing gate leakage Mar. 11, 2014
8664100 Manufacturing high efficiency solar cell with directional doping Mar. 4, 2014
8647970 Electronic device comprising conductive structures and an insulating layer between the conductive structures and within a trench Feb. 11, 2014
8643107 Body-tied asymmetric N-type field effect transistor Feb. 4, 2014
8642456 Implementing semiconductor signal-capable capacitors with deep trench and TSV technologies Feb. 4, 2014
8623718 Tilt implantation for forming FinFETs Jan. 7, 2014
8598007 Methods of performing highly tilted halo implantation processes on semiconductor devices Dec. 3, 2013
8598006 Strain preserving ion implantation methods Dec. 3, 2013
8569185 Method of fabricating gate electrode using a treated hard mask Oct. 29, 2013
8569154 Three dimensional integration and methods of through silicon via creation Oct. 29, 2013
8519403 Angled implantation for deep submicron device optimization Aug. 27, 2013
8513103 Method for manufacturing vertical transistor having buried junction Aug. 20, 2013
8513105 Flexible integration of logic blocks with transistors of different threshold voltages Aug. 20, 2013
8492252 Three dimensional integration and methods of through silicon via creation Jul. 23, 2013
8492250 Method for fabricating semiconductor device Jul. 23, 2013
8470677 Method of manufacturing semiconductor device Jun. 25, 2013
8450195 Method of reducing floating body effect of SOI MOS device via a large tilt ion implantation May. 28, 2013
8426324 Manufacturing method of memory element, laser irradiation apparatus, and laser irradiation method Apr. 23, 2013
8421130 Method for manufacturing SRAM devices with reduced threshold voltage deviation Apr. 16, 2013
8415238 Three dimensional integration and methods of through silicon via creation Apr. 9, 2013
8404546 Source/drain carbon implant and RTA anneal, pre-SiGe deposition Mar. 26, 2013
8399321 Method for manufacturing memory device Mar. 19, 2013
8399342 Method for fabricating semiconductor device with buried bit lines Mar. 19, 2013
8309445 Bi-directional self-aligned FET capacitor Nov. 13, 2012
8304331 Angled ion implantation in a semiconductor device Nov. 6, 2012
8299530 Structure and method to fabricate pFETS with superior GIDL by localizing workfunction Oct. 30, 2012
8298925 Mechanisms for forming ultra shallow junction Oct. 30, 2012
8298895 Selective threshold voltage implants for long channel devices Oct. 30, 2012
8258577 CMOS inverter device with fin structures Sep. 4, 2012
8236648 Trench MOS transistor and method of manufacturing the same Aug. 7, 2012
8232151 Structure and method for manufacturing asymmetric devices Jul. 31, 2012
8227316 Method for manufacturing double gate finFET with asymmetric halo Jul. 24, 2012
8222154 Fin and finFET formation by angled ion implantation Jul. 17, 2012
8193065 Asymmetric source and drain stressor regions Jun. 5, 2012
8168494 Trench MOS transistor and method of manufacturing the same May. 1, 2012
8163588 Manufacturing method of a photoelectric conversion device Apr. 24, 2012
8154055 CMOS image sensor and method for fabricating the same Apr. 10, 2012
8138071 Isotopically-enriched boron-containing compounds, and methods of making and using same Mar. 20, 2012
8133804 Method and system for modifying patterned photoresist using multi-step ion implantation Mar. 13, 2012
8084330 Thin body semiconductor devices having improved contact resistance and methods for the fabrication thereof Dec. 27, 2011
8062965 Isotopically-enriched boron-containing compounds, and methods of making and using same Nov. 22, 2011
8039376 Methods of changing threshold voltages of semiconductor transistors by ion implantation Oct. 18, 2011
8039349 Methods for fabricating non-planar semiconductor devices having stress memory Oct. 18, 2011
8039330 Method for manufacturing semiconductor device Oct. 18, 2011
8017482 Method of manufacturing semiconductor device Sep. 13, 2011
8017483 Method of creating asymmetric field-effect-transistors Sep. 13, 2011
7998849 Semiconductor device used as high-speed switching device and power device Aug. 16, 2011

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