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Class Information
Number: 438/522
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Ion implantation of dopant into semiconductor region > Of compound semiconductor > Including heat treatment
Description: Process including a step of heat treating the substrate having compound semiconductive regions.

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8704229 Partial poly amorphization for channeling prevention Apr. 22, 2014
8691676 Substrate heat treating apparatus, temperature control method of substrate heat treating apparatus, manufacturing method of semiconductor device, temperature control program of substrate heat Apr. 8, 2014
8679959 High sensitivity photodetectors, imaging arrays, and high efficiency photovoltaic devices produced using ion implantation and femtosecond laser irradiation Mar. 25, 2014
8669169 Diffusion sources from liquid precursors Mar. 11, 2014
8669562 Semiconductor device and method for manufacturing the same Mar. 11, 2014
8664099 Micro-electro-mechanical-system device with particles blocking function and method for making same Mar. 4, 2014
8623748 Method of forming a semiconductor structure Jan. 7, 2014
8609521 Method of manufacturing semiconductor device Dec. 17, 2013
8603901 Method for producing single crystal SiC substrate and single crystal SiC substrate produced by the same Dec. 10, 2013
8559478 Hybrid silicon laser-quantum well intermixing wafer bonded integration platform for advanced photonic circuits with electroabsorption modulators Oct. 15, 2013
8559799 Heat treatment apparatus and method for heating substrate by photo-irradiation Oct. 15, 2013
8536032 Formation of embedded stressor through ion implantation Sep. 17, 2013
8524585 Method of manufacturing semiconductor device Sep. 3, 2013
8492250 Method for fabricating semiconductor device Jul. 23, 2013
8476153 Method of manufacturing a semiconductor device Jul. 2, 2013
8470699 Method of manufacturing silicon carbide semiconductor apparatus Jun. 25, 2013
8455322 Silicon germanium heterojunction bipolar transistor structure and method Jun. 4, 2013
8343815 TFET with nanowire source Jan. 1, 2013
8343838 Method of reducing dislocation-induced leakage in a strained-layer field-effect transistor by implanting blocking impurity into the strained-layer Jan. 1, 2013
8328494 In vacuum optical wafer heater for cryogenic processing Dec. 11, 2012
8318571 Method for forming P-type lightly doped drain region using germanium pre-amorphous treatment Nov. 27, 2012
8299530 Structure and method to fabricate pFETS with superior GIDL by localizing workfunction Oct. 30, 2012
8298926 Silicon wafer with controlled distribution of embryos that become oxygen precipitates by succeeding annealing and its manufacturing method Oct. 30, 2012
8288255 N-type doping of zinc telluride Oct. 16, 2012
8280531 Method and computer program for controlling the heat treatment of metal workpieces Oct. 2, 2012
8253175 Sealed semiconductor device Aug. 28, 2012
8216924 Methods of fabricating transistors using laser annealing of source/drain regions Jul. 10, 2012
8198182 Annealing method for semiconductor device with silicon carbide substrate and semiconductor device Jun. 12, 2012
8187958 Substrate processing method and method of manufacturing crystalline silicon carbide (SIC) substrate May. 29, 2012
8163636 Method of preparing P-type doped ZnO or ZnMgO Apr. 24, 2012
8129284 Heat treatment method and heat treatment apparatus for heating substrate by light irradiation Mar. 6, 2012
8124510 Method of manufacturing a silicon carbide semiconductor device Feb. 28, 2012
8124507 Semiconductor device and method for fabricating the same Feb. 28, 2012
8097530 Method for manufacturing SIC semiconductor device Jan. 17, 2012
8043947 Method to eliminate re-crystallization border defects generated during solid phase epitaxy of a DSB substrate Oct. 25, 2011
8014895 Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon Sep. 6, 2011
8012837 Method of manufacturing semiconductor device Sep. 6, 2011
8003503 Method of integrating stress into a gate stack Aug. 23, 2011
7998848 Method of producing field effect transistor Aug. 16, 2011
7981780 Method and apparatus for processing semiconductor wafer after impurity implantation Jul. 19, 2011
7977224 Method using multiple layer annealing cap for fabricating group III-nitride semiconductor device structures and devices formed thereby Jul. 12, 2011
7968440 Preparation of ultra-shallow semiconductor junctions using intermediate temperature ramp rates and solid interfaces for defect engineering Jun. 28, 2011
7943496 Method of manufacturing GaN-based transistors May. 17, 2011
7939441 P-type silicon wafer and method for heat-treating the same May. 10, 2011
7935946 Ion implantation method and apparatus May. 3, 2011
7936051 Silicon wafer and its manufacturing method May. 3, 2011
7935945 Ion implantation method and apparatus May. 3, 2011
7892923 Power field effect transistor and manufacturing method thereof Feb. 22, 2011
7888250 Method and apparatus for activating compound semiconductor Feb. 15, 2011
7883949 Methods of forming silicon carbide switching devices including P-type channels Feb. 8, 2011

1 2 3 4 5 6

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