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Class Information
Number: 438/52
Name: Semiconductor device manufacturing: process > Making device or circuit responsive to nonelectrical signal > Physical stress responsive > Having cantilever element
Description: Process for making a physical stress responsive device or circuit which has a projecting beam or horizontal member supported at only one end.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8703516 MEMS substrates, devices, and methods of manufacture thereof Apr. 22, 2014
8685778 Planar cavity MEMS and related structures, methods of manufacture and design structures Apr. 1, 2014
8679887 Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained Mar. 25, 2014
8680631 High aspect ratio capacitively coupled MEMS devices Mar. 25, 2014
8673670 Micro-electro-mechanical system (MEMS) structures and design structures Mar. 18, 2014
8669822 Resonator Mar. 11, 2014
8664029 Process for fabricating a capacitance type tri-axial accelerometer Mar. 4, 2014
8659167 Sensor packaging method and sensor packages Feb. 25, 2014
8652867 Micrometer-scale grid structure based on single crystal silicon and method of manufacturing the same Feb. 18, 2014
8648432 Fully embedded micromechanical device, system on chip and method for manufacturing the same Feb. 11, 2014
8648433 Method for producing oblique surfaces in a substrate and wafer having an oblique surface Feb. 11, 2014
8642370 Cavity open process to improve undercut Feb. 4, 2014
8643125 Structure and process for microelectromechanical system-based sensor Feb. 4, 2014
8643127 Sensor device packaging Feb. 4, 2014
8643128 Micro-electro-mechanical-system sensor and method for making same Feb. 4, 2014
8643129 MEMS device Feb. 4, 2014
8633088 Glass frit wafer bond protective structure Jan. 21, 2014
8633048 Method for fabricating package structure having MEMS elements Jan. 21, 2014
8627566 Method for packaging a microelectromechanical system (MEMS) device Jan. 14, 2014
8628993 Method for using laser ablation process for forming solar cell components Jan. 14, 2014
8629517 Wafer level packaging Jan. 14, 2014
8629739 Out-of plane MEMS resonator with static out-of-plane deflection Jan. 14, 2014
8623736 Memory devices with enhanced isolation of memory cells, systems including same and methods of forming same Jan. 7, 2014
8614492 Nanowire stress sensors, stress sensor integrated circuits, and design structures for a stress sensor integrated circuit Dec. 24, 2013
8610997 Micro-electromechanical device Dec. 17, 2013
8603848 Three-dimensional MEMS structure and method of manufacturing the same Dec. 10, 2013
8592242 Etching growth layers of light emitting devices to reduce leakage current Nov. 26, 2013
8592926 Substrate bonding with metal germanium silicon material Nov. 26, 2013
8587390 MEMS vibrator, oscillator, and method for manufacturing MEMS vibrator Nov. 19, 2013
8580126 Piezoelectric vibrating pieces comprising edge mesa steps, and methods for manufacturing same Nov. 12, 2013
8580596 Front end micro cavity Nov. 12, 2013
8569091 Integrated circuit switches, design structure and methods of fabricating the same Oct. 29, 2013
8569092 Method for fabricating a microelectromechanical sensor with a piezoresistive type readout Oct. 29, 2013
8564026 Chip, method for producing a chip and device for laser ablation Oct. 22, 2013
8551798 Microstructure with an enhanced anchor Oct. 8, 2013
8551800 Methods of forming semiconductor structures including a movable switching element Oct. 8, 2013
8552512 MEMS device and fabrication method thereof Oct. 8, 2013
8546170 MEMS process and device Oct. 1, 2013
8541861 Infrared detection device Sep. 24, 2013
8541313 Method for etching a sacrificial layer for a micro-machined structure Sep. 24, 2013
8541850 Method and system for forming resonators over CMOS Sep. 24, 2013
8541854 Method of minimizing beam bending of MEMS device by reducing the interfacial bonding strength between sacrificial layer and MEMS structure Sep. 24, 2013
8535967 Method and system for etching a diaphragm pressure sensor Sep. 17, 2013
8530258 Method and apparatus for MEMS oscillator Sep. 10, 2013
8530982 Micromechanical structure, method for manufacturing a micromechanical structure, and use of a micromechanical structure Sep. 10, 2013
8530261 Method for producing a component, and sensor element Sep. 10, 2013
8524520 Method for producing a structure comprising a mobile element by means of a heterogeneous sacrificial layer Sep. 3, 2013
8525168 Integrated circuit (IC) test probe Sep. 3, 2013
8513043 Method for MEMS device fabrication and device formed Aug. 20, 2013
8513042 Method of forming an electromechanical transducer device Aug. 20, 2013

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