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Class Information
Number: 438/517
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Ion implantation of dopant into semiconductor region > Of semiconductor layer on insulating substrate or layer
Description: Process wherein the electrically active dopant ions are implanted into a semiconductor layer or portion thereof, the semiconductor layer residing on an insulating substrate or layer.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7615473 |
Method of introducing ion and method of manufacturing semiconductor device |
Nov. 10, 2009 |
| 7615823 |
SOI substrate and method of manufacturing the same |
Nov. 10, 2009 |
| 7601568 |
MOS transistor and method for producing a MOS transistor structure |
Oct. 13, 2009 |
| 7601620 |
Methods for fabricating nanocoils |
Oct. 13, 2009 |
| 7592209 |
Integration of a floating body memory on SOI with logic transistors on bulk substrate |
Sep. 22, 2009 |
| 7592239 |
Flexible single-crystal film and method of manufacturing the same |
Sep. 22, 2009 |
| 7579654 |
Semiconductor on insulator structure made using radiation annealing |
Aug. 25, 2009 |
| 7569463 |
Method of thermal processing structures formed on a substrate |
Aug. 4, 2009 |
| 7566605 |
Epitaxial silicon germanium for reduced contact resistance in field-effect transistors |
Jul. 28, 2009 |
| 7556994 |
Normally-off integrated JFET power switches in wide bandgap semiconductors and methods of making |
Jul. 7, 2009 |
| 7553709 |
MOSFET with body contacts |
Jun. 30, 2009 |
| 7544585 |
Structure of strained silicon on insulator and method of manufacturing the same |
Jun. 9, 2009 |
| 7538390 |
Semiconductor device with PMOS and NMOS transistors |
May. 26, 2009 |
| 7538013 |
Method of manufacturing a field effect transistor comprising an insulating film including metal oxide having crystallinity and different in a lattice distance from semiconductor substrate |
May. 26, 2009 |
| 7537981 |
Silicon on insulator device and method of manufacturing the same |
May. 26, 2009 |
| 7534667 |
Structure and method for fabrication of deep junction silicon-on-insulator transistors |
May. 19, 2009 |
| 7534705 |
Method of manufacturing a semiconductor device |
May. 19, 2009 |
| 7531435 |
Semiconductor device and manufacturing method of the same |
May. 12, 2009 |
| 7524728 |
Thin film transistor manufacturing method and organic electroluminescent display device |
Apr. 28, 2009 |
| 7510915 |
Semiconductor device and method of fabricating thereof |
Mar. 31, 2009 |
| 7507647 |
Method of manufacturing a high voltage semiconductor device including a deep well and a gate oxide layer simultaneously |
Mar. 24, 2009 |
| 7498207 |
Semiconductor memory device and manufacturing method of the same |
Mar. 3, 2009 |
| 7488670 |
Direct channel stress |
Feb. 10, 2009 |
| 7488982 |
Thin film transistor and manufacturing method thereof, and active matrix display device and manufacturing method thereof |
Feb. 10, 2009 |
| 7482252 |
Method for reducing floating body effects in SOI semiconductor device without degrading mobility |
Jan. 27, 2009 |
| 7442586 |
SOI substrate and SOI device, and method for forming the same |
Oct. 28, 2008 |
| 7442614 |
Silicon on insulator devices having body-tied-to-source and methods of making |
Oct. 28, 2008 |
| 7442585 |
MOSFET with laterally graded channel region and method for manufacturing same |
Oct. 28, 2008 |
| 7427538 |
Semiconductor on insulator apparatus and method |
Sep. 23, 2008 |
| 7393724 |
Reduced dielectric breakdown/leakage semiconductor device and a method of manufacturing the same, integrated circuit, electro-optical device, and electric apparatus |
Jul. 1, 2008 |
| 7361577 |
Method of manufacturing semiconductor device |
Apr. 22, 2008 |
| 7358511 |
Plasma doping method and plasma doping apparatus |
Apr. 15, 2008 |
| 7358131 |
Methods of forming SRAM constructions |
Apr. 15, 2008 |
| 7338865 |
Method for manufacturing dual work function gate electrodes through local thickness-limited silicidation |
Mar. 4, 2008 |
| 7332412 |
Structure of strained silicon on insulator and method of manufacturing the same |
Feb. 19, 2008 |
| 7329594 |
Method of manufacturing a semiconductor device |
Feb. 12, 2008 |
| 7307467 |
Structure and method for implementing oxide leakage based voltage divider network for integrated circuit devices |
Dec. 11, 2007 |
| 7294535 |
Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same |
Nov. 13, 2007 |
| 7291521 |
Self correcting suppression of threshold voltage variation in fully depleted transistors |
Nov. 6, 2007 |
| 7276431 |
Method of fabricating isolated semiconductor devices in epi-less substrate |
Oct. 2, 2007 |
| 7268065 |
Methods of manufacturing metal-silicide features |
Sep. 11, 2007 |
| 7265435 |
Method for implanting atomic species through an uneven surface of a semiconductor layer |
Sep. 4, 2007 |
| 7235469 |
Semiconductor device and method for manufacturing the same |
Jun. 26, 2007 |
| 7223640 |
Semiconductor component and method of manufacture |
May. 29, 2007 |
| 7217602 |
Semiconductor device employing SOI substrate and method of manufacturing the same |
May. 15, 2007 |
| 7208357 |
Template layer formation |
Apr. 24, 2007 |
| 7202513 |
Stress engineering using dual pad nitride with selective SOI device architecture |
Apr. 10, 2007 |
| 7202146 |
Process for producing doped semiconductor wafers from silicon, and the wafers produced thereby |
Apr. 10, 2007 |
| 7192815 |
Method of manufacturing a thin film transistor |
Mar. 20, 2007 |
| 7183182 |
Method and apparatus for fabricating CMOS field effect transistors |
Feb. 27, 2007 |
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