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Class Information
Number: 438/511
Name: Semiconductor device manufacturing: process > Introduction of conductivity modifying dopant into semiconductive material > Ordering or disordering
Description: Process for making semiconductor regions of the substrate ordered or disordered prior to, simultaneous with, or subsequent to a step of doping semiconductor regions of the substrate.

Patents under this class:

Patent Number Title Of Patent Date Issued
8664098 Plasma processing apparatus Mar. 4, 2014
8629047 Quantum tunneling devices and circuits with lattice-mismatched semiconductor structures Jan. 14, 2014
8372736 Method and apparatus for reducing flicker noise in a semiconductor device Feb. 12, 2013
8241942 Method of fabricating a back-illuminated image sensor Aug. 14, 2012
8216951 Quantum tunneling devices and circuits with lattice-mismatched semiconductor structures Jul. 10, 2012
8124506 USJ techniques with helium-treated substrates Feb. 28, 2012
8119496 Semiconductor device and manufacturing method thereof Feb. 21, 2012
8101510 Plasma processing apparatus Jan. 24, 2012
7923357 Method for forming poly-silicon film Apr. 12, 2011
7741192 Semiconductor device and manufacturing method thereof Jun. 22, 2010
7622372 Method for shallow dopant distribution Nov. 24, 2009
7517776 Method for controlling dislocation positions in silicon germanium buffer layers Apr. 14, 2009
7494886 Uniaxial strain relaxation of biaxial-strained thin films using ion implantation Feb. 24, 2009
7468313 Engineering strain in thick strained-SOI substrates Dec. 23, 2008
7282427 Method of implanting a substrate and an ion implanter for performing the method Oct. 16, 2007
7276431 Method of fabricating isolated semiconductor devices in epi-less substrate Oct. 2, 2007
7268065 Methods of manufacturing metal-silicide features Sep. 11, 2007
7157356 Method for forming a notched gate insulator for advanced MIS semiconductor devices and devices thus obtained Jan. 2, 2007
6998303 Manufacture method for semiconductor device with patterned film of ZrO.sub.2 or the like Feb. 14, 2006
6936526 Method of disordering quantum well heterostructures Aug. 30, 2005
6908836 Method of implanting a substrate and an ion implanter for performing the method Jun. 21, 2005
6855592 Method for manufacturing semiconductor device Feb. 15, 2005
6808970 Semiconductor device having an improved strained surface layer and method of forming a strained surface layer in a semiconductor device Oct. 26, 2004
6544899 Process for manufacturing silicon epitaxial wafer Apr. 8, 2003
6544888 Advanced contact integration scheme for deep-sub-150 nm devices Apr. 8, 2003
6426519 Epitaxial growth substrate and a method for producing the same Jul. 30, 2002
6410413 Semiconductor device with transparent link area for silicide applications and fabrication thereof Jun. 25, 2002
6403454 Silicon semiconductor devices with .delta.-doped layers Jun. 11, 2002
6391695 Double-gate transistor formed in a thermal process May. 21, 2002
6362083 Method for fabricating locally reinforced metallic microfeature Mar. 26, 2002
6358807 Bipolar semiconductor device and method of forming same having reduced transient enhanced diffusion Mar. 19, 2002
6284630 Method for fabrication of abrupt drain and source extensions for a field effect transistor Sep. 4, 2001
6255122 Amorphous dielectric capacitors on silicon Jul. 3, 2001
6232208 Semiconductor device and method of manufacturing a semiconductor device having an improved gate electrode profile May. 15, 2001
6168981 Method and apparatus for the localized reduction of the lifetime of charge carriers, particularly in integrated electronic devices Jan. 2, 2001
5993538 Method of forming single-crystalline thin film using beam irradiating method Nov. 30, 1999
5238868 Bandgap tuning of semiconductor quantum well structures Aug. 24, 1993
5182229 Method for diffusing an n type impurity from a solid phase source into a III-V compound semiconductor Jan. 26, 1993
4671830 Method of controlling the modeling of the well energy band profile by interdiffusion Jun. 9, 1987

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