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Class Information
Number: 438/508
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Fluid growth from gaseous state combined with subsequent diverse operation > Doping of semiconductor
Description: Process wherein a semiconductive region of the substrate is incorporated with an electrically active dopant species subsequent to a step of fluid growth of semiconductive material from the gaseous state.










Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8685845 Epitaxial growth of silicon doped with carbon and phosphorus using hydrogen carrier gas Apr. 1, 2014
8679957 Method of manufacturing semiconductor device Mar. 25, 2014
8637955 Semiconductor structure with reduced junction leakage and method of fabrication thereof Jan. 28, 2014
8597978 Method for attaching wide bus memory and serial memory to a processor within a chip scale package footprint Dec. 3, 2013
8575010 Method for fabricating a semiconductor substrate Nov. 5, 2013
8557671 Method for forming a transient voltage suppressor having symmetrical breakdown voltages Oct. 15, 2013
8513644 Strain-controlled atomic layer epitaxy, quantum wells and superlattices prepared thereby and uses thereof Aug. 20, 2013
8501571 Method of manufacturing semiconductor device having silicon carbide layers containing phosphorus Aug. 6, 2013
8502191 Semiconductor device, manufacturing method therefor, and solar cell Aug. 6, 2013
8470689 Method for forming a multilayer structure Jun. 25, 2013
8450131 Imprinted semiconductor multiplex detection array May. 28, 2013
8334156 Nitride semiconductor single crystal substrate, and methods of fabricating the same and a vertical nitride semiconductor light emitting diode using the same Dec. 18, 2012
8329541 InP-based transistor fabrication Dec. 11, 2012
8318522 Surface passivation techniques for chamber-split processing Nov. 27, 2012
8293628 Strain-controlled atomic layer epitaxy, quantum wells and superlattices prepared thereby and uses thereof Oct. 23, 2012
8293553 Method for producing an area having reduced electrical conductivity within a semiconductor layer and optoelectronic semiconductor element Oct. 23, 2012
8253220 Nitride semiconductor device and method for fabricating the same Aug. 28, 2012
8227328 Er doped III-nitride materials and devices synthesized by MOCVD Jul. 24, 2012
8216921 Method for production of silicon wafer for epitaxial substrate and method for production of epitaxial substrate Jul. 10, 2012
8183879 Measuring arrangement, semiconductor arrangement and method for operating a semiconductor component as a reference source May. 22, 2012
8102026 Group-III nitride semiconductor freestanding substrate and manufacturing method of the same Jan. 24, 2012
8088675 Methods of making an emitter having a desired dopant profile Jan. 3, 2012
8040604 Imaging system and method for providing extended depth of focus, range extraction and super resolved imaging Oct. 18, 2011
8026160 Semiconductor device and semiconductor device manufacturing method Sep. 27, 2011
8021947 Method of forming an insulated gate field effect transistor device having a shield electrode structure Sep. 20, 2011
7977220 Substrates for silicon solar cells and methods of producing the same Jul. 12, 2011
7951694 Semiconductor structure and method of manufacture of same May. 31, 2011
7947548 Multifunctional tape May. 24, 2011
7939436 Method of fabricating a semiconductor device May. 10, 2011
7939437 Metallization method for solar cells May. 10, 2011
7897495 Formation of epitaxial layer containing silicon and carbon Mar. 1, 2011
7888266 Band gap modulated optical sensor Feb. 15, 2011
7884029 Solar cell, solar module and system and fabrication method thereof Feb. 8, 2011
7867551 Processing method for group IBIIIAVIA semiconductor layer growth Jan. 11, 2011
7863167 Method of manufacturing group III nitride crystal Jan. 4, 2011
7838400 Rapid thermal oxide passivated solar cell with improved junction Nov. 23, 2010
7833873 Method and structure to reduce contact resistance on thin silicon-on-insulator device Nov. 16, 2010
7824955 Hybrid beam deposition system and methods for fabricating metal oxide-ZnO films, p-type ZnO films, and ZnO-based II-VI compound semiconductor devices Nov. 2, 2010
7704776 Method of forming a vertical image sensor that includes patterning an oxide layer to form a mask for implanting a floating diffusion area Apr. 27, 2010
7678673 Strengthening of a structure by infiltration Mar. 16, 2010
7674694 Process for manufacturing a TFT device with source and drain regions having gradual dopant profile Mar. 9, 2010
7648577 MBE growth of p-type nitride semiconductor materials Jan. 19, 2010
7648895 Vertical CVD apparatus for forming silicon-germanium film Jan. 19, 2010
7646549 Imaging system and method for providing extended depth of focus, range extraction and super resolved imaging Jan. 12, 2010
7534685 Method for fabrication of a capacitor, and a monolithically integrated circuit comprising such a capacitor May. 19, 2009
7531423 Reduced-resistance finFETs by sidewall silicidation and methods of manufacturing the same May. 12, 2009
7521282 Method for producing ZnTe system compound semiconductor single crystal, ZnTe system compound semiconductor single crystal, and semiconductor device Apr. 21, 2009
7517720 Method for producing ZnTe system compound semiconductor single crystal, ZnTe system compound semiconductor single crystal, and semiconductor device Apr. 14, 2009
7262117 Germanium integrated CMOS wafer and method for manufacturing the same Aug. 28, 2007
7226833 Semiconductor device structure and method therefor Jun. 5, 2007

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