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Class Information
Number: 438/507
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Fluid growth from gaseous state combined with subsequent diverse operation
Description: Process having a nonfluid growth operation which is subsequent to the fluid growth of semiconductive active region from the gaseous state and is not merely perfecting thereto.

Sub-classes under this class:

Class Number Class Name Patents
438/508 Doping of semiconductor 149
438/509 Heat treatment 249

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8703590 Vapor-phase growth method for semiconductor film Apr. 22, 2014
8691404 High energy-density radioisotope micro power sources Apr. 8, 2014
8691674 Method for producing group 3-5 nitride semiconductor and method for producing light-emitting device Apr. 8, 2014
8685844 Sub-10 nm graphene nanoribbon lattices Apr. 1, 2014
8679952 Method of manufacturing silicon carbide epitaxial wafer Mar. 25, 2014
8679956 Multiple precursor showerhead with by-pass ports Mar. 25, 2014
8673747 Method of fabricating semiconductor device Mar. 18, 2014
8669168 Method for reducing the concentration of oxygen, carbon, and silicon impurities on nitrogen-polar surfaces of gallium nitride Mar. 11, 2014
8664093 Methods of forming a silicon seed layer and layers of silicon and silicon-containing material therefrom Mar. 4, 2014
8658521 Method and device for layer deposition Feb. 25, 2014
8658449 Semiconductor layer, method of manufacturing the same, laser diode, and method of manufacturing the same Feb. 25, 2014
8642445 Method and apparatus for reducing package warpage Feb. 4, 2014
8592309 Laser spike annealing for GaN LEDs Nov. 26, 2013
8587004 Semiconductor light emitting device, its manufacturing method, semiconductor device and its manufacturing method Nov. 19, 2013
8558304 Methods and devices for forming nanostructure monolayers and devices including such monolayers Oct. 15, 2013
8551871 Method of fabricating semiconductor device Oct. 8, 2013
8551870 Method for producing an epitaxially coated semiconductor wafer Oct. 8, 2013
8541771 Semiconductor device and method of manufacturing the same Sep. 24, 2013
8525303 Photovoltaic device including semiconductor nanocrystals Sep. 3, 2013
8524581 GaN epitaxy with migration enhancement and surface energy modification Sep. 3, 2013
8524582 Silicon-germanium hydrides and methods for making and using same Sep. 3, 2013
8518360 Silicon-germanium hydrides and methods for making and using same Aug. 27, 2013
8501596 Method for fabricating a micro-electronic device equipped with semi-conductor zones on an insulator with a horizontal GE concentration gradient Aug. 6, 2013
8492245 Methods for making thin layers of crystalline materials Jul. 23, 2013
8470698 Method for growing p-type SiC semiconductor single crystal and p-type SiC semiconductor single crystal Jun. 25, 2013
8466049 Semiconductor device producing method with selective epitaxial growth Jun. 18, 2013
8461029 Method for fabricating InGaN-based multi-quantum well layers Jun. 11, 2013
8410511 Methods for high temperature processing of epitaxial chips Apr. 2, 2013
8404571 Film deposition method Mar. 26, 2013
8389389 Semiconductor layer manufacturing method, semiconductor layer manufacturing apparatus, and semiconductor device manufactured using such method and apparatus Mar. 5, 2013
8367528 Cyclical epitaxial deposition and etch Feb. 5, 2013
8367566 Method for manufacturing semiconductor device and method for processing substrate Feb. 5, 2013
8361892 Multiple precursor showerhead with by-pass ports Jan. 29, 2013
8343858 Method for manufacturing microcrystalline semiconductor film and method for manufacturing semiconductor device Jan. 1, 2013
8334154 Method for the production of quantum dots embedded in a matrix, and quantum dots embedded in a matrix produced using the method Dec. 18, 2012
8318522 Surface passivation techniques for chamber-split processing Nov. 27, 2012
8298915 Method of transferring a circuit onto a ground plane Oct. 30, 2012
8288186 Substrate for growing a III-V light emitting device Oct. 16, 2012
8283240 Method for fabricating semiconductor device Oct. 9, 2012
8278135 Highly pure film formation method for light emitting device using gas from evaporated electroluminescent source Oct. 2, 2012
8268706 Semiconductor device manufacturing method Sep. 18, 2012
8242003 Defect removal in Ge grown on Si Aug. 14, 2012
8232186 Methods of integrating reverse eSiGe on NFET and SiGe channel on PFET, and related structure Jul. 31, 2012
8227328 Er doped III-nitride materials and devices synthesized by MOCVD Jul. 24, 2012
8222127 Methods of forming structures having nanotubes extending between opposing electrodes and structures including same Jul. 17, 2012
8216921 Method for production of silicon wafer for epitaxial substrate and method for production of epitaxial substrate Jul. 10, 2012
8216537 Silicon-germanium hydrides and methods for making and using same Jul. 10, 2012
8207046 Method for producing semiconductor device and semiconductor device produced by same method Jun. 26, 2012
8187975 Hydrochloric acid etch and low temperature epitaxy in a single chamber for raised source-drain fabrication May. 29, 2012
8187956 Method for manufacturing microcrystalline semiconductor film, thin film transistor having microcrystalline semiconductor film, and photoelectric conversion device having microcrystalline semic May. 29, 2012

1 2 3 4 5 6

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