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Class Information
Number: 438/506
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Fluid growth from gaseous state combined with preceding diverse operation > Doping of semiconductor > Ion implantation
Description: Process wherein the doping is by implantation of dopant ions into the semiconductor regions of the substrate.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8691673 Semiconductor structure with suppressed STI dishing effect at resistor region Apr. 8, 2014
8673753 Multi-energy ion implantation Mar. 18, 2014
8598017 Fiber SOI substrate, semiconductor device using this, and manufacturing method thereof Dec. 3, 2013
8518808 Defects annealing and impurities activation in III-nitride compound Aug. 27, 2013
8501570 Method of manufacturing source/drain structures Aug. 6, 2013
8487280 Modulating implantation for improved workpiece splitting Jul. 16, 2013
8409975 Method for decreasing polysilicon gate resistance in a carbon co-implantation process Apr. 2, 2013
8399340 Method of manufacturing super-junction semiconductor device Mar. 19, 2013
8361869 Method for manufacturing suspended fin and gate-all-around field effect transistor Jan. 29, 2013
8328936 Producing a diamond semiconductor by implanting dopant using ion implantation Dec. 11, 2012
8304329 Power device structures and methods Nov. 6, 2012
8298915 Method of transferring a circuit onto a ground plane Oct. 30, 2012
8298889 Process of forming an electronic device including a trench and a conductive structure therein Oct. 30, 2012
8263483 Method including producing a monocrystalline layer Sep. 11, 2012
8198180 Ion implanted substrate having capping layer and method Jun. 12, 2012
8183879 Measuring arrangement, semiconductor arrangement and method for operating a semiconductor component as a reference source May. 22, 2012
8173991 Optoelectronic semiconductor chip having a multiple quantum well structure May. 8, 2012
8174074 Asymmetric embedded silicon germanium field effect transistor May. 8, 2012
8067301 Image sensor and method for forming the same Nov. 29, 2011
8034208 Deformation moderation method Oct. 11, 2011
8012843 Optimized halo or pocket cold implants Sep. 6, 2011
7943402 Ion implantation process characterization method May. 17, 2011
7939418 Partial implantation method for semiconductor manufacturing May. 10, 2011
7935616 Dynamic p-n junction growth May. 3, 2011
7927988 Method of fabricating semiconductor device Apr. 19, 2011
7927986 Ion implantation with heavy halogenide compounds Apr. 19, 2011
7924159 Remote wafer presence detection with passive RFID Apr. 12, 2011
7858503 Ion implanted substrate having capping layer and method Dec. 28, 2010
7767549 Method of manufacturing bonded wafer Aug. 3, 2010
7666748 Method of forming amorphous source/drain extensions Feb. 23, 2010
7659584 Substrate isolated integrated high voltage diode integrated within a unit cell Feb. 9, 2010
7659184 Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking Feb. 9, 2010
7611975 Method of implanting a substrate and an ion implanter for performing the method Nov. 3, 2009
7524737 Method of fabricating a semiconductor chip with a nitride compound semiconductor material Apr. 28, 2009
7475102 Random number generation method based on multivariate non-normal distribution, parameter estimation method thereof, and application to simulation of financial field and semiconductor ion impla Jan. 6, 2009
7442657 Producing stress-relaxed crystalline layer on a substrate Oct. 28, 2008
7358127 Power semiconductor rectifier having broad buffer structure and method of manufacturing thereof Apr. 15, 2008
7348231 Methods of fabricating semiconductor devices having insulating layers with differing compressive stresses Mar. 25, 2008
7344933 Method of forming device having a raised extension region Mar. 18, 2008
7341929 Method to fabricate patterned strain-relaxed SiGe epitaxial with threading dislocation density control Mar. 11, 2008
7309634 Non-volatile semiconductor memory devices using prominences and trenches Dec. 18, 2007
7282416 Method for fabricating electronic device Oct. 16, 2007
7276421 Method of forming single crystal semiconductor thin film on insulator and semiconductor device fabricated thereby Oct. 2, 2007
7253072 Implant optimization scheme Aug. 7, 2007
7238598 Formation of a semiconductor substrate that may be dismantled and obtaining a semiconductor element Jul. 3, 2007
7195986 Microfluidic device with controlled substrate conductivity Mar. 27, 2007
7176102 Method for producing SOI wafer and SOI wafer Feb. 13, 2007
7091130 Method of forming a nanocluster charge storage device Aug. 15, 2006
7018913 Method for implanting atomic species through an uneven surface of a semiconductor layer Mar. 28, 2006
6924215 Method of monitoring high tilt angle of medium current implant Aug. 2, 2005

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