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Class Information
Number: 438/505
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Fluid growth from gaseous state combined with preceding diverse operation > Doping of semiconductor
Description: Process wherein a semiconductive region of the substrate is incorporated with an electrically active dopant species prior to a step of fluid growth of semiconductive material from the vapor or gaseous state.

Sub-classes under this class:

Class Number Class Name Patents
438/506 Ion implantation 111

Patents under this class:
1 2

Patent Number Title Of Patent Date Issued
8704335 Spacer formation in the fabrication of planar bipolar transistors Apr. 22, 2014
8664093 Methods of forming a silicon seed layer and layers of silicon and silicon-containing material therefrom Mar. 4, 2014
8518809 Manufacturing method of silicon carbide single crystal Aug. 27, 2013
8501571 Method of manufacturing semiconductor device having silicon carbide layers containing phosphorus Aug. 6, 2013
8470697 Method of forming p-type compound semiconductor layer Jun. 25, 2013
8470675 Thick gate oxide for LDMOS and DEMOS Jun. 25, 2013
8450191 Polysilicon films by HDP-CVD May. 28, 2013
8445367 Methods of manufacturing semiconductor devices May. 21, 2013
8399340 Method of manufacturing super-junction semiconductor device Mar. 19, 2013
8328936 Producing a diamond semiconductor by implanting dopant using ion implantation Dec. 11, 2012
8216921 Method for production of silicon wafer for epitaxial substrate and method for production of epitaxial substrate Jul. 10, 2012
8183879 Measuring arrangement, semiconductor arrangement and method for operating a semiconductor component as a reference source May. 22, 2012
8163635 Manufacturing method of semiconductor device Apr. 24, 2012
8102026 Group-III nitride semiconductor freestanding substrate and manufacturing method of the same Jan. 24, 2012
8101528 Low temperature ion implantation Jan. 24, 2012
8088677 Method of manufacturing semiconductor device, and semiconductor device Jan. 3, 2012
RE43045 Multi-chamber MOCVD growth apparatus for high performance/high throughput Dec. 27, 2011
8084312 Nitrogen based implants for defect reduction in strained silicon Dec. 27, 2011
8034669 Drive current adjustment for transistors formed in the same active region by locally providing embedded strain-inducing semiconductor material in the active region Oct. 11, 2011
8034648 Epitaxial regrowth in a distributed feedback laser Oct. 11, 2011
7951694 Semiconductor structure and method of manufacture of same May. 31, 2011
7947548 Multifunctional tape May. 24, 2011
7939437 Metallization method for solar cells May. 10, 2011
7897495 Formation of epitaxial layer containing silicon and carbon Mar. 1, 2011
7867551 Processing method for group IBIIIAVIA semiconductor layer growth Jan. 11, 2011
7799626 Lateral DMOS device structure and fabrication method therefor Sep. 21, 2010
7772097 Methods of selectively depositing silicon-containing films Aug. 10, 2010
7713753 Dual-level self-assembled patterning method and apparatus fabricated using the method May. 11, 2010
7700467 Methodology of implementing ultra high temperature (UHT) anneal in fabricating devices that contain sige Apr. 20, 2010
7682953 Method of forming p-type compound semiconductor layer Mar. 23, 2010
7648895 Vertical CVD apparatus for forming silicon-germanium film Jan. 19, 2010
7642178 Semiconductor device, method for manufacturing the same and method for evaluating the same Jan. 5, 2010
7521282 Method for producing ZnTe system compound semiconductor single crystal, ZnTe system compound semiconductor single crystal, and semiconductor device Apr. 21, 2009
7517720 Method for producing ZnTe system compound semiconductor single crystal, ZnTe system compound semiconductor single crystal, and semiconductor device Apr. 14, 2009
7485538 High performance SiGe HBT with arsenic atomic layer doping Feb. 3, 2009
7368368 Multi-chamber MOCVD growth apparatus for high performance/high throughput May. 6, 2008
7268052 Method for reducing soft error rates of memory cells Sep. 11, 2007
7208338 Method of manufacturing semiconductor light emitting device Apr. 24, 2007
7208396 Permanent adherence of the back end of a wafer to an electrical component or sub-assembly Apr. 24, 2007
7198992 Method of manufacturing a semiconductor device comprising doping steps using gate electrodes and resists as masks Apr. 3, 2007
7195986 Microfluidic device with controlled substrate conductivity Mar. 27, 2007
7122449 Methods of fabricating semiconductor structures having epitaxially grown source and drain elements Oct. 17, 2006
7033921 Method and device for depositing crystalline layers on crystalline substrates Apr. 25, 2006
7018856 Calibration standards for dopants/impurities in silicon and preparation method Mar. 28, 2006
6887736 Method of forming a p-type group II-VI semiconductor crystal layer on a substrate May. 3, 2005
6797571 Method of manufacturing semiconductor device Sep. 28, 2004
6784002 Method to make wafer laser marks visable after bumping process Aug. 31, 2004
6746941 Semiconductor wafer and production method therefor Jun. 8, 2004
6743702 Nitride-based semiconductor laser device and method of forming the same Jun. 1, 2004
6559038 Method for growing p-n heterojunction-based structures utilizing HVPE techniques May. 6, 2003

1 2

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