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Class Information
Number: 438/503
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Fluid growth from gaseous state combined with preceding diverse operation
Description: Process having a nonfluid growth operation which precedes the fluid growth of semiconductive material from the vapor state and is not merely perfecting thereto.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7601217 |
Method of fabricating an epitaxially grown layer |
Oct. 13, 2009 |
| 7560366 |
Nanowire horizontal growth and substrate removal |
Jul. 14, 2009 |
| 7557027 |
Method of producing microcystalline silicon germanium suitable for micromachining |
Jul. 7, 2009 |
| 7553742 |
Method(s) of forming a thin layer |
Jun. 30, 2009 |
| 7547617 |
Semiconductor device including container having epitaxial silicon therein |
Jun. 16, 2009 |
| 7538015 |
Method of manufacturing micro structure, and method of manufacturing mold material |
May. 26, 2009 |
| 7538010 |
Method of fabricating an epitaxially grown layer |
May. 26, 2009 |
| 7524742 |
Structure of metal interconnect and fabrication method thereof |
Apr. 28, 2009 |
| 7524741 |
Method of forming a low temperature-grown buffer layer, a light emitting element and method of making same, and light emitting device |
Apr. 28, 2009 |
| 7517775 |
Methods of selective deposition of heavily doped epitaxial SiGe |
Apr. 14, 2009 |
| 7510906 |
Diamond substrate and method for fabricating the same |
Mar. 31, 2009 |
| 7504324 |
Semiconductor base and its manufacturing method, and semiconductor crystal manufacturing method |
Mar. 17, 2009 |
| 7482235 |
Semiconductor device and method of manufacturing the same |
Jan. 27, 2009 |
| 7456034 |
Nitride semiconductor device and method for fabricating the same |
Nov. 25, 2008 |
| 7439142 |
Methods to fabricate MOSFET devices using a selective deposition process |
Oct. 21, 2008 |
| 7407872 |
Epitaxial growth of aligned AlGalnN nanowires by metal-organic chemical vapor deposition |
Aug. 5, 2008 |
| 7368368 |
Multi-chamber MOCVD growth apparatus for high performance/high throughput |
May. 6, 2008 |
| 7341844 |
Methods for diagnosing autism |
Mar. 11, 2008 |
| 7329593 |
Germanium deposition |
Feb. 12, 2008 |
| 7320931 |
Interfacial layer for use with high k dielectric materials |
Jan. 22, 2008 |
| 7300859 |
Atmospheric glow discharge with concurrent coating deposition |
Nov. 27, 2007 |
| 7291544 |
Homoepitaxial gallium nitride based photodetector and method of producing |
Nov. 6, 2007 |
| 7271077 |
Deposition methods with time spaced and time abutting precursor pulses |
Sep. 18, 2007 |
| 7250357 |
Manufacturing method for strained silicon wafer |
Jul. 31, 2007 |
| 7244668 |
Methods of manufacturing semiconductor devices |
Jul. 17, 2007 |
| 7244667 |
Method and device for the production of thin epitaxial semiconductor layers |
Jul. 17, 2007 |
| 7229892 |
Semiconductor device and method of manufacturing the same |
Jun. 12, 2007 |
| 7217641 |
Pendeoepitaxial methods of fabricating gallium nitride semiconductor layers on sapphire substrates, and gallium nitride semiconductor structures fabricated thereby |
May. 15, 2007 |
| 7208338 |
Method of manufacturing semiconductor light emitting device |
Apr. 24, 2007 |
| 7205216 |
Modification of electrical properties for semiconductor wafers |
Apr. 17, 2007 |
| 7195993 |
Methods of fabricating gallium nitride semiconductor layers by lateral growth into trenches |
Mar. 27, 2007 |
| 7186627 |
Method for forming device isolation film of semiconductor device |
Mar. 6, 2007 |
| 7183181 |
Dynamic edge bead removal |
Feb. 27, 2007 |
| 7172953 |
Methods of forming nanoscopic wire-based devices and arrays |
Feb. 6, 2007 |
| 7166528 |
Methods of selective deposition of heavily doped epitaxial SiGe |
Jan. 23, 2007 |
| 7157344 |
Vapor-phase growth method, semiconductor manufacturing method and semiconductor device manufacturing method |
Jan. 2, 2007 |
| 7125732 |
Semiconductor light emitting device and its manufacturing method |
Oct. 24, 2006 |
| 7115489 |
Methods of growing epitaxial silicon |
Oct. 3, 2006 |
| 7115427 |
Red light-emitting device and method for preparing the same |
Oct. 3, 2006 |
| 7067405 |
Atmospheric glow discharge with concurrent coating deposition |
Jun. 27, 2006 |
| 7063751 |
Semiconductor substrate formed by epitaxially filling a trench in a semiconductor substrate with a semiconductor material after smoothing the surface and rounding the corners |
Jun. 20, 2006 |
| 7029988 |
Fabrication method and device structure of shallow trench insulation for silicon wafer containing silicon-germanium |
Apr. 18, 2006 |
| 7001787 |
Electrode manufacturing method |
Feb. 21, 2006 |
| 6995077 |
Epitaxially coated semiconductor wafer and process for producing it |
Feb. 7, 2006 |
| 6979370 |
Methods, complexes, and system for forming metal-containing films |
Dec. 27, 2005 |
| 6969627 |
Light-emitting diode and the manufacturing method of the same |
Nov. 29, 2005 |
| 6969670 |
Selective growth method, and semiconductor light emitting device and fabrication method thereof |
Nov. 29, 2005 |
| 6949394 |
Optical semiconductor device and method of fabricating the same |
Sep. 27, 2005 |
| 6890785 |
Nitride semiconductor, semiconductor device, and manufacturing methods for the same |
May. 10, 2005 |
| 6887736 |
Method of forming a p-type group II-VI semiconductor crystal layer on a substrate |
May. 3, 2005 |
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