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Class Information
Number: 438/5
Name: Semiconductor device manufacturing: process > Including control responsive to sensed condition
Description: Process including the step of regulating an operation by detecting a characteristic or a change in a characteristic of the process or the semiconductor substrate acted upon and by implementing an action in the process based upon the detected characteristic or change therein.

Sub-classes under this class:

Class Number Class Name Patents
438/10 Electrical characteristic sensed 394
438/6 Interconnecting plural devices on semiconductor substrate 202
438/7 Optical characteristic sensed 535

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13

Patent Number Title Of Patent Date Issued
8702997 Balancing a microelectromechanical system Apr. 22, 2014
8691684 Layout and pad floor plan of power transistor for good performance of SPU and STOG Apr. 8, 2014
8679975 Method for forming trenches in a semiconductor component Mar. 25, 2014
8676538 Adjusting weighting of a parameter relating to fault detection based on a detected fault Mar. 18, 2014
8664012 Combined silicon oxide etch and contamination removal process Mar. 4, 2014
8637382 Layer transfer of films utilizing thermal flux regime for energy controlled cleaving Jan. 28, 2014
8633037 Semiconductor device Jan. 21, 2014
8617908 Method for producing a substrate including a step of thinning with stop when a porous zone is detected Dec. 31, 2013
8609441 Substrate comprising a mark Dec. 17, 2013
8609442 Vapor deposition method, vapor deposition device and organic EL display device Dec. 17, 2013
8609443 Semiconductor device manufacturing method Dec. 17, 2013
8600539 Substrate processing apparatus Dec. 3, 2013
8592228 Sealing structure and method of manufacturing the same Nov. 26, 2013
8580584 System and method for increasing productivity of organic light emitting diode material screening Nov. 12, 2013
8580674 Fabrication of atomic scale devices Nov. 12, 2013
8580685 Integrated circuit having interleaved gridded features, mask set, and method for printing Nov. 12, 2013
8574409 Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source Nov. 5, 2013
8573836 Apparatus and method for evaluating a substrate mounting device Nov. 5, 2013
8565278 Semiconductor component and method for producing a semiconductor component Oct. 22, 2013
8563333 Film formation apparatus and film formation method Oct. 22, 2013
8547521 Systems and methods that control liquid temperature in immersion lithography to maintain temperature gradient to reduce turbulence Oct. 1, 2013
8539257 Method and apparatus for detecting an idle mode of processing equipment Sep. 17, 2013
8530242 Wafer process chamber leak detector Sep. 10, 2013
8530247 Control of implant pattern critical dimensions using STI step height offset Sep. 10, 2013
8532796 Contact processing using multi-input/multi-output (MIMO) models Sep. 10, 2013
8525279 Single element three terminal piezoresistive pressure sensor Sep. 3, 2013
8518720 UV irradiance monitoring in semiconductor processing using a temperature dependent signal Aug. 27, 2013
8513777 Method and apparatus for generating reticle data Aug. 20, 2013
8507296 Substrate processing method and film forming method Aug. 13, 2013
8501499 Adaptive recipe selector Aug. 6, 2013
8501500 Method for monitoring the removal of polysilicon pseudo gates Aug. 6, 2013
8501501 Measurement of a sample using multiple models Aug. 6, 2013
8492173 Manufacturing method for semiconductor integrated device Jul. 23, 2013
8492172 Particle detection sensor, method for manufacturing particle detection sensor, and method for detecting particle using particle detection sensor Jul. 23, 2013
8492279 Method of controlling critical dimensions of vias in a metallization system of a semiconductor device during silicon-ARC etch Jul. 23, 2013
8485774 Apparatus for manufacturing solar cells and process for operating such apparatus Jul. 16, 2013
8476629 Enhanced wafer test line structure Jul. 2, 2013
8474403 Apparatus for forming thin film and method of manufacturing semiconductor film Jul. 2, 2013
8452455 Control device and control method of plasma processing system, and storage medium storing control program May. 28, 2013
8445296 Apparatus and methods for end point determination in reactive ion etching May. 21, 2013
8441106 Apparatus and method for defining laser cleave alignment May. 14, 2013
8435802 Conductor layout technique to reduce stress-induced void formations May. 7, 2013
8431419 UV absorption based monitor and control of chloride gas stream Apr. 30, 2013
8420409 Method for manufacturing semiconductor device Apr. 16, 2013
8415175 Identification of dies on a semiconductor wafer Apr. 9, 2013
8399263 Method for measuring expansion/contraction, method for processing substrate, method for producing device, apparatus for measuring expansion/contraction, and apparatus for processing substrate Mar. 19, 2013
8399334 Method of manufacturing nano device by arbitrarily printing nanowire devices thereon and intermediate building block useful for the method Mar. 19, 2013
8392011 Semiconductor wafer processing tape winding body, semiconductor wafer processing tape sticking apparatus and semiconductor wafer processing apparatus that use the semiconductor wafer processin Mar. 5, 2013
8383428 Exhaust pressure detector Feb. 26, 2013
8377720 Method of manufacturing a semiconductor device including an insulating film beside an element isolation film Feb. 19, 2013

1 2 3 4 5 6 7 8 9 10 11 12 13

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