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Class Information
Number: 438/5
Name: Semiconductor device manufacturing: process > Including control responsive to sensed condition
Description: Process including the step of regulating an operation by detecting a characteristic or a change in a characteristic of the process or the semiconductor substrate acted upon and by implementing an action in the process based upon the detected characteristic or change therein.










Sub-classes under this class:

Class Number Class Name Patents
438/10 Electrical characteristic sensed 366
438/6 Interconnecting plural devices on semiconductor substrate 194
438/7 Optical characteristic sensed 506


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12

Patent Number Title Of Patent Date Issued
8441106 Apparatus and method for defining laser cleave alignment May. 14, 2013
8435802 Conductor layout technique to reduce stress-induced void formations May. 7, 2013
8431419 UV absorption based monitor and control of chloride gas stream Apr. 30, 2013
8420409 Method for manufacturing semiconductor device Apr. 16, 2013
8415175 Identification of dies on a semiconductor wafer Apr. 9, 2013
8399263 Method for measuring expansion/contraction, method for processing substrate, method for producing device, apparatus for measuring expansion/contraction, and apparatus for processing substrate Mar. 19, 2013
8399334 Method of manufacturing nano device by arbitrarily printing nanowire devices thereon and intermediate building block useful for the method Mar. 19, 2013
8392011 Semiconductor wafer processing tape winding body, semiconductor wafer processing tape sticking apparatus and semiconductor wafer processing apparatus that use the semiconductor wafer processin Mar. 5, 2013
8383428 Exhaust pressure detector Feb. 26, 2013
8377720 Method of manufacturing a semiconductor device including an insulating film beside an element isolation film Feb. 19, 2013
8372296 Manufacturing method for a thermal head Feb. 12, 2013
8372665 Manufacturing method for semiconductor integrated device Feb. 12, 2013
8367429 Adaptive endpoint method for pad life effect on chemical mechanical polishing Feb. 5, 2013
8355810 Method and system for estimating context offsets for run-to-run control in a semiconductor fabrication facility Jan. 15, 2013
8349625 Method of sensing a high voltage Jan. 8, 2013
8344318 Technique for monitoring and controlling a plasma process with an ion mobility spectrometer Jan. 1, 2013
8328494 In vacuum optical wafer heater for cryogenic processing Dec. 11, 2012
8329054 Plasma processing apparatus and plasma processing method Dec. 11, 2012
8323521 Plasma generation controlled by gravity-induced gas-diffusion separation (GIGDS) techniques Dec. 4, 2012
8324657 Semiconductor device Dec. 4, 2012
8304261 Thermal treatment apparatus, thermal treatment method and method of manufacturing semiconductor device Nov. 6, 2012
8304264 Apparatus and method for monitoring chamber status in semiconductor fabrication process Nov. 6, 2012
8298837 System and method for increasing productivity of organic light emitting diode material screening Oct. 30, 2012
8293544 Method and apparatus to reduce thermal variations within an integrated circuit die using thermal proximity correction Oct. 23, 2012
8288846 Power management integrated circuit Oct. 16, 2012
8288174 Electrostatic post exposure bake apparatus and method Oct. 16, 2012
8288173 Method, apparatus and program for filling liquid material Oct. 16, 2012
8283648 Resistance variable memory cell Oct. 9, 2012
8278121 Method and apparatus to fabricate polymer arrays on patterned wafers using electrochemical synthesis Oct. 2, 2012
8268688 Production of VDMOS-transistors having optimized gate contact Sep. 18, 2012
RE43652 Substrate processing control method and storage medium Sep. 11, 2012
8252608 Measurement of a sample using multiple models Aug. 28, 2012
8244482 Photometrically modulated delivery of reagents Aug. 14, 2012
8227265 Method of measuring pattern shape, method of manufacturing semiconductor device, and process control system Jul. 24, 2012
8222050 Manufacturing method for semiconductor integrated device Jul. 17, 2012
8216927 Method of reducing contamination by providing a removable polymer protection film during microstructure processing Jul. 10, 2012
8219341 System and method for implementing wafer acceptance test ("WAT") advanced process control ("APC") with routing model Jul. 10, 2012
8216384 Combinatorial approach to the development of cleaning formulations for wet removal of high dose implant photoresist Jul. 10, 2012
8207066 Dry etching method Jun. 26, 2012
8202738 Endpoint method using peak location of modified spectra Jun. 19, 2012
8196545 Device and method for manufacturing a semiconductor wafer Jun. 12, 2012
8193007 Etch process control using optical metrology and sensor devices Jun. 5, 2012
8178387 Methods for reducing recrystallization time for a phase change material May. 15, 2012
8173451 Etch stage measurement system May. 8, 2012
8173450 Method of designing an etch stage measurement system May. 8, 2012
8163571 Multi-step deposition control Apr. 24, 2012
8163570 Method of initiating molecular bonding Apr. 24, 2012
8153450 Method for manufacturing SIMOX wafer Apr. 10, 2012
8148175 Manufacturing apparatus for semiconductor device and manufacturing method for semiconductor device Apr. 3, 2012
8143074 Semiconductor processing system and method of processing a semiconductor wafer Mar. 27, 2012

1 2 3 4 5 6 7 8 9 10 11 12










 
 
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