Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Browse by Category: Main > Engineering
Class Information
Number: 438/5
Name: Semiconductor device manufacturing: process > Including control responsive to sensed condition
Description: Process including the step of regulating an operation by detecting a characteristic or a change in a characteristic of the process or the semiconductor substrate acted upon and by implementing an action in the process based upon the detected characteristic or change therein.


Sub-classes under this class:

Class Number Class Name Patents
438/10 Electrical characteristic sensed 277
438/6 Interconnecting plural devices on semiconductor substrate 149
438/7 Optical characteristic sensed 386


Patents under this class:
1 2 3 4 5 6 7 8 9

Patent Number Title Of Patent Date Issued
7625495 Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Dec. 1, 2009
7625824 Process change detection through the use of evolutionary algorithms Dec. 1, 2009
7622308 Process control using process data and yield data Nov. 24, 2009
7618830 Rapid thermal processing apparatus and methods Nov. 17, 2009
7601547 Magnetic annealing sequences for patterned MRAM synthetic antiferromagnetic pinned layers Oct. 13, 2009
7599811 Sensor for lithographic apparatus and method of obtaining measurements of lithographic apparatus Oct. 6, 2009
7595496 Optimized correction of wafer thermal deformations in a lithographic process Sep. 29, 2009
7592190 Method of evaluating characteristics of and forming of an insulating film for a semiconductor device Sep. 22, 2009
7582490 Controlled fabrication of gaps in electrically conducting structures Sep. 1, 2009
7572647 Internal balanced coil for inductively coupled high density plasma processing chamber Aug. 11, 2009
7569402 Chip data providing system and chip data providing server used therefore Aug. 4, 2009
7553678 Method for detecting semiconductor manufacturing conditions Jun. 30, 2009
7547561 Advanced process control model incorporating a target offset term Jun. 16, 2009
7534627 Methods and systems for controlling critical dimensions in track lithography tools May. 19, 2009
7534628 Method for forming semiconductor device and method for forming photovoltaic device May. 19, 2009
7531368 In-line lithography and etch system May. 12, 2009
7521697 Method for fabricating semiconductor device and equipment for fabricating the same Apr. 21, 2009
7517141 Simultaneous control of deposition time and temperature of multi-zone furnaces Apr. 14, 2009
7517813 Two-step oxidation process for semiconductor wafers Apr. 14, 2009
7510884 Semiconductor production system and semiconductor production process Mar. 31, 2009
7504268 Adaptive shape substrate support method Mar. 17, 2009
7482178 Chamber stability monitoring using an integrated metrology tool Jan. 27, 2009
7476554 Substrate processing method Jan. 13, 2009
7473567 Change rate prediction method, storage medium, and substrate processing system Jan. 6, 2009
7474979 Integrated circuit device test system and method Jan. 6, 2009
7460972 Methods and systems for performing real-time wireless temperature measurement for semiconductor substrates Dec. 2, 2008
7452732 Comparing identifying indicia formed using laser marking techniques to an identifying indicia model Nov. 18, 2008
7449348 Feedback control of imprint mask feature profile using scatterometry and spacer etchback Nov. 11, 2008
7440869 Mapping yield information of semiconductor dice Oct. 21, 2008
7439068 Plasma monitoring method, plasma processing method, method of manufacturing semiconductor device, and plasma processing system Oct. 21, 2008
7435514 Active mask lithography Oct. 14, 2008
7432179 Controlling gate formation by removing dummy gate structures Oct. 7, 2008
7416472 Systems for planarizing workpieces, e.g., microelectronic workpieces Aug. 26, 2008
7413500 Methods for planarizing workpieces, e.g., microelectronic workpieces Aug. 19, 2008
7402442 Physically highly secure multi-chip assembly Jul. 22, 2008
7403832 Method and system for advanced process control including tool dependent machine constants Jul. 22, 2008
7402801 Inspecting method of a defect inspection device Jul. 22, 2008
7399705 Method for producing a local coating and combinatory substrate having such coating Jul. 15, 2008
7390751 Dry etching method and apparatus for performing dry etching Jun. 24, 2008
7387902 Methods for packaging image sensitive electronic devices Jun. 17, 2008
7384876 Method and apparatus for determining consumable lifetime Jun. 10, 2008
7368302 Dynamic metal fill for correcting non-planar region May. 6, 2008
7364922 Automated semiconductor wafer salvage during processing Apr. 29, 2008
7353379 Methods for configuring a plasma cluster tool Apr. 1, 2008
7348187 Method, device, computer-readable storage medium and computer program element for the monitoring of a manufacturing process of a plurality of physical objects Mar. 25, 2008
7340372 Apparatus and method for investigating parameters of layers deposited on semiconductor wafers Mar. 4, 2008
7337091 Method and apparatus for coordinating fault detection settings and process control changes Feb. 26, 2008
7332368 Light guide for image sensor Feb. 19, 2008
7324865 Run-to-run control method for automated control of metal deposition processes Jan. 29, 2008
7320895 Thyristor-based device having dual control ports Jan. 22, 2008

1 2 3 4 5 6 7 8 9


 
 
  Recently Added Patents
Enclosure for symbiotic active/passive operation of an acoustic driver
Processing path-based database operations
Method of notifying a party of an emergency
Guzmania plant named `Skohicli`
Liquid discharge head having hollow portions for relaxing stress in the head and manufacturing method of the same
Digital transmit phase trimming
Scaffold-organized clusters and electronic devices made using such clusters
  Randomly Featured Patents
Bottle
Zero set-up high speed CMOS latched-receiver
Vehicle seat air bag guide having flexible panel with inner extremity grommet securement
Continuous production crown core/crown making process
Device for controlling relative humidity within a substantially sealed container
Continuously variable transmission oil pressure control device
Rigid drive axle with cambered wheel hubs
Continuous annealing and pickling method and apparatus for steel strips
Function test support system and function test support method and hardware description model
Cheek pad