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Class Information
Number: 438/5
Name: Semiconductor device manufacturing: process > Including control responsive to sensed condition
Description: Process including the step of regulating an operation by detecting a characteristic or a change in a characteristic of the process or the semiconductor substrate acted upon and by implementing an action in the process based upon the detected characteristic or change therein.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7625495 |
Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies |
Dec. 1, 2009 |
| 7625824 |
Process change detection through the use of evolutionary algorithms |
Dec. 1, 2009 |
| 7622308 |
Process control using process data and yield data |
Nov. 24, 2009 |
| 7618830 |
Rapid thermal processing apparatus and methods |
Nov. 17, 2009 |
| 7601547 |
Magnetic annealing sequences for patterned MRAM synthetic antiferromagnetic pinned layers |
Oct. 13, 2009 |
| 7599811 |
Sensor for lithographic apparatus and method of obtaining measurements of lithographic apparatus |
Oct. 6, 2009 |
| 7595496 |
Optimized correction of wafer thermal deformations in a lithographic process |
Sep. 29, 2009 |
| 7592190 |
Method of evaluating characteristics of and forming of an insulating film for a semiconductor device |
Sep. 22, 2009 |
| 7582490 |
Controlled fabrication of gaps in electrically conducting structures |
Sep. 1, 2009 |
| 7572647 |
Internal balanced coil for inductively coupled high density plasma processing chamber |
Aug. 11, 2009 |
| 7569402 |
Chip data providing system and chip data providing server used therefore |
Aug. 4, 2009 |
| 7553678 |
Method for detecting semiconductor manufacturing conditions |
Jun. 30, 2009 |
| 7547561 |
Advanced process control model incorporating a target offset term |
Jun. 16, 2009 |
| 7534627 |
Methods and systems for controlling critical dimensions in track lithography tools |
May. 19, 2009 |
| 7534628 |
Method for forming semiconductor device and method for forming photovoltaic device |
May. 19, 2009 |
| 7531368 |
In-line lithography and etch system |
May. 12, 2009 |
| 7521697 |
Method for fabricating semiconductor device and equipment for fabricating the same |
Apr. 21, 2009 |
| 7517141 |
Simultaneous control of deposition time and temperature of multi-zone furnaces |
Apr. 14, 2009 |
| 7517813 |
Two-step oxidation process for semiconductor wafers |
Apr. 14, 2009 |
| 7510884 |
Semiconductor production system and semiconductor production process |
Mar. 31, 2009 |
| 7504268 |
Adaptive shape substrate support method |
Mar. 17, 2009 |
| 7482178 |
Chamber stability monitoring using an integrated metrology tool |
Jan. 27, 2009 |
| 7476554 |
Substrate processing method |
Jan. 13, 2009 |
| 7473567 |
Change rate prediction method, storage medium, and substrate processing system |
Jan. 6, 2009 |
| 7474979 |
Integrated circuit device test system and method |
Jan. 6, 2009 |
| 7460972 |
Methods and systems for performing real-time wireless temperature measurement for semiconductor substrates |
Dec. 2, 2008 |
| 7452732 |
Comparing identifying indicia formed using laser marking techniques to an identifying indicia model |
Nov. 18, 2008 |
| 7449348 |
Feedback control of imprint mask feature profile using scatterometry and spacer etchback |
Nov. 11, 2008 |
| 7440869 |
Mapping yield information of semiconductor dice |
Oct. 21, 2008 |
| 7439068 |
Plasma monitoring method, plasma processing method, method of manufacturing semiconductor device, and plasma processing system |
Oct. 21, 2008 |
| 7435514 |
Active mask lithography |
Oct. 14, 2008 |
| 7432179 |
Controlling gate formation by removing dummy gate structures |
Oct. 7, 2008 |
| 7416472 |
Systems for planarizing workpieces, e.g., microelectronic workpieces |
Aug. 26, 2008 |
| 7413500 |
Methods for planarizing workpieces, e.g., microelectronic workpieces |
Aug. 19, 2008 |
| 7402442 |
Physically highly secure multi-chip assembly |
Jul. 22, 2008 |
| 7403832 |
Method and system for advanced process control including tool dependent machine constants |
Jul. 22, 2008 |
| 7402801 |
Inspecting method of a defect inspection device |
Jul. 22, 2008 |
| 7399705 |
Method for producing a local coating and combinatory substrate having such coating |
Jul. 15, 2008 |
| 7390751 |
Dry etching method and apparatus for performing dry etching |
Jun. 24, 2008 |
| 7387902 |
Methods for packaging image sensitive electronic devices |
Jun. 17, 2008 |
| 7384876 |
Method and apparatus for determining consumable lifetime |
Jun. 10, 2008 |
| 7368302 |
Dynamic metal fill for correcting non-planar region |
May. 6, 2008 |
| 7364922 |
Automated semiconductor wafer salvage during processing |
Apr. 29, 2008 |
| 7353379 |
Methods for configuring a plasma cluster tool |
Apr. 1, 2008 |
| 7348187 |
Method, device, computer-readable storage medium and computer program element for the monitoring of a manufacturing process of a plurality of physical objects |
Mar. 25, 2008 |
| 7340372 |
Apparatus and method for investigating parameters of layers deposited on semiconductor wafers |
Mar. 4, 2008 |
| 7337091 |
Method and apparatus for coordinating fault detection settings and process control changes |
Feb. 26, 2008 |
| 7332368 |
Light guide for image sensor |
Feb. 19, 2008 |
| 7324865 |
Run-to-run control method for automated control of metal deposition processes |
Jan. 29, 2008 |
| 7320895 |
Thyristor-based device having dual control ports |
Jan. 22, 2008 |
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