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Class Information
Number: 438/5
Name: Semiconductor device manufacturing: process > Including control responsive to sensed condition
Description: Process including the step of regulating an operation by detecting a characteristic or a change in a characteristic of the process or the semiconductor substrate acted upon and by implementing an action in the process based upon the detected characteristic or change therein.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 8441106 |
Apparatus and method for defining laser cleave alignment |
May. 14, 2013 |
| 8435802 |
Conductor layout technique to reduce stress-induced void formations |
May. 7, 2013 |
| 8431419 |
UV absorption based monitor and control of chloride gas stream |
Apr. 30, 2013 |
| 8420409 |
Method for manufacturing semiconductor device |
Apr. 16, 2013 |
| 8415175 |
Identification of dies on a semiconductor wafer |
Apr. 9, 2013 |
| 8399263 |
Method for measuring expansion/contraction, method for processing substrate, method for producing device, apparatus for measuring expansion/contraction, and apparatus for processing substrate |
Mar. 19, 2013 |
| 8399334 |
Method of manufacturing nano device by arbitrarily printing nanowire devices thereon and intermediate building block useful for the method |
Mar. 19, 2013 |
| 8392011 |
Semiconductor wafer processing tape winding body, semiconductor wafer processing tape sticking apparatus and semiconductor wafer processing apparatus that use the semiconductor wafer processin |
Mar. 5, 2013 |
| 8383428 |
Exhaust pressure detector |
Feb. 26, 2013 |
| 8377720 |
Method of manufacturing a semiconductor device including an insulating film beside an element isolation film |
Feb. 19, 2013 |
| 8372296 |
Manufacturing method for a thermal head |
Feb. 12, 2013 |
| 8372665 |
Manufacturing method for semiconductor integrated device |
Feb. 12, 2013 |
| 8367429 |
Adaptive endpoint method for pad life effect on chemical mechanical polishing |
Feb. 5, 2013 |
| 8355810 |
Method and system for estimating context offsets for run-to-run control in a semiconductor fabrication facility |
Jan. 15, 2013 |
| 8349625 |
Method of sensing a high voltage |
Jan. 8, 2013 |
| 8344318 |
Technique for monitoring and controlling a plasma process with an ion mobility spectrometer |
Jan. 1, 2013 |
| 8328494 |
In vacuum optical wafer heater for cryogenic processing |
Dec. 11, 2012 |
| 8329054 |
Plasma processing apparatus and plasma processing method |
Dec. 11, 2012 |
| 8323521 |
Plasma generation controlled by gravity-induced gas-diffusion separation (GIGDS) techniques |
Dec. 4, 2012 |
| 8324657 |
Semiconductor device |
Dec. 4, 2012 |
| 8304261 |
Thermal treatment apparatus, thermal treatment method and method of manufacturing semiconductor device |
Nov. 6, 2012 |
| 8304264 |
Apparatus and method for monitoring chamber status in semiconductor fabrication process |
Nov. 6, 2012 |
| 8298837 |
System and method for increasing productivity of organic light emitting diode material screening |
Oct. 30, 2012 |
| 8293544 |
Method and apparatus to reduce thermal variations within an integrated circuit die using thermal proximity correction |
Oct. 23, 2012 |
| 8288846 |
Power management integrated circuit |
Oct. 16, 2012 |
| 8288174 |
Electrostatic post exposure bake apparatus and method |
Oct. 16, 2012 |
| 8288173 |
Method, apparatus and program for filling liquid material |
Oct. 16, 2012 |
| 8283648 |
Resistance variable memory cell |
Oct. 9, 2012 |
| 8278121 |
Method and apparatus to fabricate polymer arrays on patterned wafers using electrochemical synthesis |
Oct. 2, 2012 |
| 8268688 |
Production of VDMOS-transistors having optimized gate contact |
Sep. 18, 2012 |
| RE43652 |
Substrate processing control method and storage medium |
Sep. 11, 2012 |
| 8252608 |
Measurement of a sample using multiple models |
Aug. 28, 2012 |
| 8244482 |
Photometrically modulated delivery of reagents |
Aug. 14, 2012 |
| 8227265 |
Method of measuring pattern shape, method of manufacturing semiconductor device, and process control system |
Jul. 24, 2012 |
| 8222050 |
Manufacturing method for semiconductor integrated device |
Jul. 17, 2012 |
| 8216927 |
Method of reducing contamination by providing a removable polymer protection film during microstructure processing |
Jul. 10, 2012 |
| 8219341 |
System and method for implementing wafer acceptance test ("WAT") advanced process control ("APC") with routing model |
Jul. 10, 2012 |
| 8216384 |
Combinatorial approach to the development of cleaning formulations for wet removal of high dose implant photoresist |
Jul. 10, 2012 |
| 8207066 |
Dry etching method |
Jun. 26, 2012 |
| 8202738 |
Endpoint method using peak location of modified spectra |
Jun. 19, 2012 |
| 8196545 |
Device and method for manufacturing a semiconductor wafer |
Jun. 12, 2012 |
| 8193007 |
Etch process control using optical metrology and sensor devices |
Jun. 5, 2012 |
| 8178387 |
Methods for reducing recrystallization time for a phase change material |
May. 15, 2012 |
| 8173451 |
Etch stage measurement system |
May. 8, 2012 |
| 8173450 |
Method of designing an etch stage measurement system |
May. 8, 2012 |
| 8163571 |
Multi-step deposition control |
Apr. 24, 2012 |
| 8163570 |
Method of initiating molecular bonding |
Apr. 24, 2012 |
| 8153450 |
Method for manufacturing SIMOX wafer |
Apr. 10, 2012 |
| 8148175 |
Manufacturing apparatus for semiconductor device and manufacturing method for semiconductor device |
Apr. 3, 2012 |
| 8143074 |
Semiconductor processing system and method of processing a semiconductor wafer |
Mar. 27, 2012 |
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