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Class Information
Number: 438/495
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Plural fluid growth steps with intervening diverse operation > Doping of semiconductor
Description: Process wherein the incorporation of an electrically active dopant species into a semiconductive region of the substrate intermediate to the steps of fluid growth of semiconductive material is the diverse step.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8685809 Semiconductor structures having improved contact resistance Apr. 1, 2014
8558316 Semiconductor device including metal silicide layer and fabrication method thereof Oct. 15, 2013
8546247 Manufacturing method of semiconductor device with amorphous silicon layer formation Oct. 1, 2013
8501141 Method for producing group III nitride semiconductor Aug. 6, 2013
8470712 Process for the transfer of a thin film comprising an inclusion creation step Jun. 25, 2013
8399340 Method of manufacturing super-junction semiconductor device Mar. 19, 2013
8383495 Semiconductor layer structure and method for fabricating a semiconductor layer structure Feb. 26, 2013
8350270 Silicon carbide semiconductor device and method for manufacturing the same Jan. 8, 2013
8334156 Nitride semiconductor single crystal substrate, and methods of fabricating the same and a vertical nitride semiconductor light emitting diode using the same Dec. 18, 2012
8231726 Semiconductor light emitting element, group III nitride semiconductor substrate and method for manufacturing such group III nitride semiconductor substrate Jul. 31, 2012
8198628 Doped substrate to be heated Jun. 12, 2012
8183879 Measuring arrangement, semiconductor arrangement and method for operating a semiconductor component as a reference source May. 22, 2012
8163635 Manufacturing method of semiconductor device Apr. 24, 2012
8102026 Group-III nitride semiconductor freestanding substrate and manufacturing method of the same Jan. 24, 2012
8021947 Method of forming an insulated gate field effect transistor device having a shield electrode structure Sep. 20, 2011
7959733 Film formation apparatus and method for semiconductor process Jun. 14, 2011
7902051 Method for fabrication of single crystal diodes for resistive memories Mar. 8, 2011
7718518 Low temperature doped silicon layer formation May. 18, 2010
7595260 Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices Sep. 29, 2009
7550365 Bonding structure and method of making Jun. 23, 2009
7534685 Method for fabrication of a capacitor, and a monolithically integrated circuit comprising such a capacitor May. 19, 2009
7504279 Method for producing semi-conducting devices and devices obtained with this method Mar. 17, 2009
7344909 Method for producing semi-conducting devices and devices obtained with this method Mar. 18, 2008
7341787 Process for producing highly doped semiconductor wafers, and dislocation-free highly doped semiconductor wafers Mar. 11, 2008
7268079 Method for fabricating a semiconductor having a field zone Sep. 11, 2007
7160748 Method for fabricating nitride semiconductor, method for fabricating nitride semiconductor device, and nitride semiconductor device Jan. 9, 2007
7135387 Method of manufacturing semiconductor element Nov. 14, 2006
7094670 Plasma immersion ion implantation process Aug. 22, 2006
6982212 Method of manufacturing a semiconductor device Jan. 3, 2006
6921678 Method for fabricating nitride semiconductor, method for fabricating nitride semiconductor device, and nitride semiconductor device Jul. 26, 2005
6890816 Compound semiconductor structure including an epitaxial perovskite layer and method for fabricating semiconductor structures and devices May. 10, 2005
6855991 Semiconductor device having a doped lattice matching layer and a method of manufacture therefor Feb. 15, 2005
6776842 Method of epitaxy on a silicon substrate comprising areas heavily doped with arsenic Aug. 17, 2004
6740547 Method for fabricating thin-film transistor May. 25, 2004
6737339 Semiconductor device having a doped lattice matching layer and a method of manufacture therefor May. 18, 2004
6716690 Uniformly doped source/drain junction in a double-gate MOSFET Apr. 6, 2004
6686281 Method for fabricating a semiconductor device and a substrate processing apparatus Feb. 3, 2004
6635956 Semiconductor device, semiconductor module and hard disk Oct. 21, 2003
6593217 Method of manufacturing semiconductor device Jul. 15, 2003
6465333 Method of manufacturing a circuit Oct. 15, 2002
6387779 Method of crystallizing a silicon film and thin film transistor and fabricating method thereof using the same May. 14, 2002
6379990 Method of fabricating a micromechanical semiconductor configuration Apr. 30, 2002
6228181 Making epitaxial semiconductor device May. 8, 2001
6162706 Method of epitaxy on a silicon substrate comprising areas heavily doped with arsenic Dec. 19, 2000
6043139 Process for controlling dopant diffusion in a semiconductor layer Mar. 28, 2000
6010937 Reduction of dislocations in a heteroepitaxial semiconductor structure Jan. 4, 2000
6008110 Semiconductor substrate and method of manufacturing same Dec. 28, 1999
5967795 SiC semiconductor device comprising a pn junction with a voltage absorbing edge Oct. 19, 1999
5913107 Photosemiconductor device and method of fabricating the same Jun. 15, 1999
5756375 Semiconductor growth method with thickness control May. 26, 1998

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