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Class Information
Number: 438/493
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Plural fluid growth steps with intervening diverse operation
Description: Process wherein multiple fluid growth steps having combined therewith at least one step not perfecting to either prior or subsequent growth steps and which step is preformed intermediate to the multiple fluid growth steps.

Sub-classes under this class:

Class Number Class Name Patents
438/496 Coating of semiconductive substrate with nonsemiconductive material 78
438/494 Differential etching 140
438/495 Doping of semiconductor 68

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8664028 Semiconductor device production process Mar. 4, 2014
8653563 Semiconductor device Feb. 18, 2014
8637373 Transistors and methods of manufacturing the same Jan. 28, 2014
8633040 Method for synthesising semiconductor quantum dots Jan. 21, 2014
8633569 AlN inter-layers in III-N material grown on REO/silicon substrate Jan. 21, 2014
8610121 Methods for discretized processing and process sequence integration of regions of a substrate Dec. 17, 2013
8551870 Method for producing an epitaxially coated semiconductor wafer Oct. 8, 2013
8502310 III nitride semiconductor electronic device, method for manufacturing III nitride semiconductor electronic device, and III nitride semiconductor epitaxial wafer Aug. 6, 2013
8501598 Semiconductor substrate, semiconductor device, and method of producing semiconductor substrate Aug. 6, 2013
8501597 Method for fabricating group III-nitride semiconductor Aug. 6, 2013
8461029 Method for fabricating InGaN-based multi-quantum well layers Jun. 11, 2013
8440017 Method for growing group 13 nitride crystal and group 13 nitride crystal May. 14, 2013
8399290 Organic transistor with fluropolymer banked crystallization well Mar. 19, 2013
8389445 Methods for discretized processing and process sequence integration of regions of a substrate Mar. 5, 2013
8367587 Methods for discretized processing and process sequence integration of regions of a substrate Feb. 5, 2013
8293652 Substrate processing method, semiconductor chip manufacturing method, and resin-adhesive-layer-backed semiconductor chip manufacturing method Oct. 23, 2012
8288186 Substrate for growing a III-V light emitting device Oct. 16, 2012
8242003 Defect removal in Ge grown on Si Aug. 14, 2012
8198628 Doped substrate to be heated Jun. 12, 2012
8168517 Method for epitaxial growth and epitaxial layer structure using the method May. 1, 2012
8164104 Light emitting element array and image forming apparatus Apr. 24, 2012
8143144 Semiconductor nanowire and its manufacturing method Mar. 27, 2012
8110486 Method of manufacturing semiconductor wafer by forming a strain relaxation SiGe layer on an insulating layer of SOI wafer Feb. 7, 2012
8093143 Method for producing a wafer comprising a silicon single crystal substrate having a front and a back side and a layer of SiGe deposited on the front side Jan. 10, 2012
8084400 Methods for discretized processing and process sequence integration of regions of a substrate Dec. 27, 2011
8067340 Methods for discretized processing and process sequence integration of regions of a substrate Nov. 29, 2011
8026447 Electrical microfilament to circuit interface Sep. 27, 2011
7998847 III-nitride crystal manufacturing method, III-nitride crystal substrate, and III-nitride semiconductor device Aug. 16, 2011
7972961 Purge step-controlled sequence of processing semiconductor wafers Jul. 5, 2011
7968437 Semiconductor device manufacturing method and substrate processing apparatus Jun. 28, 2011
7915150 Method of manufacturing nitride semiconductor substrate using epitaxial growth Mar. 29, 2011
7902557 Semiconductor light emitting device and a method of manufacturing the same Mar. 8, 2011
7897490 Single crystal group III nitride articles and method of producing same by HVPE method incorporating a polycrystalline layer for yield enhancement Mar. 1, 2011
7875535 Compound semiconductor device using SiC substrate and its manufacture Jan. 25, 2011
7768021 Light emitting element array and image forming apparatus Aug. 3, 2010
7713847 Method for forming AlGaN crystal layer May. 11, 2010
7691654 Method for manufacturing active matrix substrate, active matrix substrate, electro-optical device and electronic apparatus Apr. 6, 2010
7682952 Method for forming low defect density alloy graded layers and structure containing such layers Mar. 23, 2010
7682885 Method for fabricating vertical channel transistor in a semiconductor device Mar. 23, 2010
7642179 Semiconductor substrate and manufacturing method for the same Jan. 5, 2010
7629237 MBE growth of a semiconductor layer structure Dec. 8, 2009
7615470 Method of manufacturing gallium nitride semiconductor Nov. 10, 2009
7550370 Method of forming thin SGOI wafers with high relaxation and low stacking fault defect density Jun. 23, 2009
7547952 Method for hafnium nitride deposition Jun. 16, 2009
7514342 Method and apparatus for forming deposited film Apr. 7, 2009
7510952 Single crystalline structure, method of forming the same, semiconductor device having the single crystalline structure, and method of manufacturing the semiconductor device Mar. 31, 2009
7491628 Method for patterning large scale nano-fibrous surfaces using capillography Feb. 17, 2009
7479443 Germanium deposition Jan. 20, 2009
7470581 Electromagnetic waveguide Dec. 30, 2008
7393710 Fabrication method of multi-wavelength semiconductor laser device Jul. 1, 2008

1 2 3

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