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Class Information
Number: 438/491
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Polycrystalline semiconductor > And subsequent doping of polycrystalline semiconductor
Description: Process having a subsequent step of incorporating an electrically active dopant species into the polycrystalline semiconductive material.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8603896 Method for transferring a monocrystalline semiconductor layer onto a support substrate Dec. 10, 2013
8569150 Method for producing a semiconductor device with a semiconductor body Oct. 29, 2013
8507369 Method for producing silicon nanowire devices Aug. 13, 2013
8415218 Atomic layer deposition epitaxial silicon growth for TFT flash memory cell Apr. 9, 2013
8367527 Method of fabricating polycrystalline silicon thin film Feb. 5, 2013
8242002 Method for manufacturing semiconductor device Aug. 14, 2012
8236603 Polycrystalline semiconductor layers and methods for forming the same Aug. 7, 2012
8093634 In situ formed drain and source regions in a silicon/germanium containing transistor device Jan. 10, 2012
RE43045 Multi-chamber MOCVD growth apparatus for high performance/high throughput Dec. 27, 2011
8067277 Active matrix device with photo sensor Nov. 29, 2011
8039330 Method for manufacturing semiconductor device Oct. 18, 2011
8030653 Image sensor and method for manufacturing the same Oct. 4, 2011
8017508 Method for manufacturing semiconductor device Sep. 13, 2011
8003423 Method for manufacturing a poly-crystal silicon photovoltaic device using horizontal metal induced crystallization Aug. 23, 2011
7977218 Thin oxide dummy tiling as charge protection Jul. 12, 2011
7959733 Film formation apparatus and method for semiconductor process Jun. 14, 2011
7923356 Semiconductor film, semiconductor device and method for manufacturing same Apr. 12, 2011
7923305 Patterning method for high density pillar structures Apr. 12, 2011
7842595 Fabricating electronic-photonic devices having an active layer with spherical quantum dots Nov. 30, 2010
7838442 Thin film solar cell and its fabrication Nov. 23, 2010
7833864 Method of doping polysilicon layer that utilizes gate insulation layer to prevent diffusion of ion implanted impurities into underlying semiconductor substrate Nov. 16, 2010
7755093 Semiconductor storage device and method of manufacturing the same Jul. 13, 2010
7718518 Low temperature doped silicon layer formation May. 18, 2010
7569462 Directional crystallization of silicon sheets using rapid thermal processing Aug. 4, 2009
7521303 Method of crystallizing amorphous semiconductor thin film and method of fabricating poly crystalline thin film transistor using the same Apr. 21, 2009
7488612 Liquid crystal display device and fabricating method thereof Feb. 10, 2009
7368368 Multi-chamber MOCVD growth apparatus for high performance/high throughput May. 6, 2008
7341787 Process for producing highly doped semiconductor wafers, and dislocation-free highly doped semiconductor wafers Mar. 11, 2008
7294535 Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same Nov. 13, 2007
7232742 Method of manufacturing a semiconductor device that includes forming a material with a high tensile stress in contact with a semiconductor film to getter impurities from the semiconductor film Jun. 19, 2007
7223649 Method of fabricating transistor of DRAM semiconductor device May. 29, 2007
7115488 Method of manufacturing semiconductor device Oct. 3, 2006
7015122 Method of forming polysilicon thin film transistor Mar. 21, 2006
6949452 Method for fabricating image display device Sep. 27, 2005
6890827 Method of fabricating a silicon on insulator transistor structure for imbedded DRAM May. 10, 2005
6881653 Method of manufacturing CMOS semiconductor device Apr. 19, 2005
6881986 Design and fabrication method for finger n-type doped photodiodes with high sensitivity for CIS products Apr. 19, 2005
6878577 Method of forming LDD of semiconductor devices Apr. 12, 2005
6867113 In-situ deposition and doping process for polycrystalline silicon layers and the resulting device Mar. 15, 2005
6855991 Semiconductor device having a doped lattice matching layer and a method of manufacture therefor Feb. 15, 2005
6852611 ROM embedded DRAM with dielectric removal/short Feb. 8, 2005
6750122 Semiconductor device formed with an oxygen implant step Jun. 15, 2004
6743701 Method for the formation of active area utilizing reverse trench isolation Jun. 1, 2004
6737339 Semiconductor device having a doped lattice matching layer and a method of manufacture therefor May. 18, 2004
6730584 Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures May. 4, 2004
6727122 Method of fabricating polysilicon thin film transistor Apr. 27, 2004
6713371 Large grain size polysilicon films formed by nuclei-induced solid phase crystallization Mar. 30, 2004
6703300 Method for making multilayer electronic devices Mar. 9, 2004
6696345 Metal-gate electrode for CMOS transistor applications Feb. 24, 2004
6693022 CVD method of producing in situ-doped polysilicon layers and polysilicon layered structures Feb. 17, 2004

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