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Class Information
Number: 438/488
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Polycrystalline semiconductor
Description: Process wherein the deposited semiconductive material is polycrystalline (i.e., possesses multiple crystalline regions having grain boundaries therebetween).
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7612379 |
Multi-gate thin film transistor having recrystallized channel regions with different grain sizes |
Nov. 3, 2009 |
| 7589002 |
Method of forming an oxygen- or nitrogen-terminated silicon nanocrystalline structure and an oxygen- or nitrogen-terminated silicon nanocrystalline structure formed by the method |
Sep. 15, 2009 |
| 7585752 |
Process for deposition of semiconductor films |
Sep. 8, 2009 |
| 7583196 |
Method and system for detecting a body in a zone located proximate an interface |
Sep. 1, 2009 |
| 7572715 |
Selective epitaxy process with alternating gas supply |
Aug. 11, 2009 |
| 7569462 |
Directional crystallization of silicon sheets using rapid thermal processing |
Aug. 4, 2009 |
| 7560352 |
Selective deposition |
Jul. 14, 2009 |
| 7556977 |
Semiconductor manufacturing method and semiconductor laser device manufacturing method |
Jul. 7, 2009 |
| 7557050 |
Method of manufacturing polysilicon thin film and method of manufacturing thin film transistor having the same |
Jul. 7, 2009 |
| 7553468 |
Method for producing solid product |
Jun. 30, 2009 |
| 7538011 |
Method of manufacturing a semiconductor device |
May. 26, 2009 |
| 7538014 |
Method of producing crystalline semiconductor material and method of fabricating semiconductor device |
May. 26, 2009 |
| 7521341 |
Method of direct deposition of polycrystalline silicon |
Apr. 21, 2009 |
| 7517772 |
Selective etch for patterning a semiconductor film deposited non-selectively |
Apr. 14, 2009 |
| 7514374 |
Method for manufacturing flat substrates |
Apr. 7, 2009 |
| 7504324 |
Semiconductor base and its manufacturing method, and semiconductor crystal manufacturing method |
Mar. 17, 2009 |
| 7488612 |
Liquid crystal display device and fabricating method thereof |
Feb. 10, 2009 |
| 7476600 |
FET gate structure and fabrication process |
Jan. 13, 2009 |
| 7470602 |
Crystalline film and its manufacture method using laser |
Dec. 30, 2008 |
| 7432140 |
Thin film transistor, thin film transistor substrate, and methods for manufacturing the same |
Oct. 7, 2008 |
| 7419886 |
Thermal treatment equipment and method for heat-treating |
Sep. 2, 2008 |
| 7413967 |
Yield improvement in silicon-germanium epitaxial growth |
Aug. 19, 2008 |
| 7413966 |
Method of fabricating polysilicon thin film transistor with catalyst |
Aug. 19, 2008 |
| 7393715 |
Manufacturing method for image pickup apparatus |
Jul. 1, 2008 |
| 7375005 |
Method for reclaiming and reusing wafers |
May. 20, 2008 |
| 7371665 |
Method for fabricating shallow trench isolation layer of semiconductor device |
May. 13, 2008 |
| 7368067 |
P-type zinc oxide semiconductor film and process for preparation thereof |
May. 6, 2008 |
| 7368368 |
Multi-chamber MOCVD growth apparatus for high performance/high throughput |
May. 6, 2008 |
| 7364976 |
Selective etch for patterning a semiconductor film deposited non-selectively |
Apr. 29, 2008 |
| 7354858 |
Film formation method and apparatus for semiconductor process |
Apr. 8, 2008 |
| 7344962 |
Method of manufacturing dual orientation wafers |
Mar. 18, 2008 |
| 7341910 |
Method for forming a flash memory by using a microcrystalline polysilicon layer as a floating gate |
Mar. 11, 2008 |
| 7338873 |
Method of fabricating a field effect transistor structure with abrupt source/drain junctions |
Mar. 4, 2008 |
| 7329591 |
Method for forming silicon-containing film and method for decreasing number of particles |
Feb. 12, 2008 |
| 7326623 |
Method of manufacturing display device |
Feb. 5, 2008 |
| 7315335 |
Liquid crystal display device with variations of positions of peaks of depth distributions of concentration of impurities in polycrystalline being within 10% of thickness |
Jan. 1, 2008 |
| 7303981 |
Polysilicon structure, thin film transistor panel using the same, and manufacturing method of the same |
Dec. 4, 2007 |
| 7294545 |
Selective polysilicon stud growth |
Nov. 13, 2007 |
| 7282384 |
Thermoelectric transducing material thin film, sensor device, and its manufacturing method |
Oct. 16, 2007 |
| 7279383 |
Liquid crystal display device and method of fabricating the same |
Oct. 9, 2007 |
| 7273799 |
Deposition over mixed substrates |
Sep. 25, 2007 |
| 7268064 |
Method of forming polysilicon layer in semiconductor device |
Sep. 11, 2007 |
| 7265036 |
Deposition of nano-crystal silicon using a single wafer chamber |
Sep. 4, 2007 |
| 7259081 |
Process and system for laser crystallization processing of film regions on a substrate to provide substantial uniformity, and a structure of such film regions |
Aug. 21, 2007 |
| 7253032 |
Method of flattening a crystallized semiconductor film surface by using a plate |
Aug. 7, 2007 |
| 7247535 |
Source/drain extensions having highly activated and extremely abrupt junctions |
Jul. 24, 2007 |
| 7247924 |
Method of controlling grain size in a polysilicon layer and in semiconductor devices having polysilicon structures |
Jul. 24, 2007 |
| 7235466 |
Method of fabricating a polysilicon layer |
Jun. 26, 2007 |
| 7227186 |
Thin film transistor and method of manufacturing the same |
Jun. 5, 2007 |
| 7223802 |
High order silane composition, and method of forming silicon film using the composition |
May. 29, 2007 |
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