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Class Information
Number: 438/487
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor > And subsequent crystallization > Utilizing wave energy (e.g., laser, electron beam, etc.)
Description: Process whereby the crystallization is affected by the application of a source of wave energy to the amorphous semiconductor.

Patents under this class:
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Patent Number Title Of Patent Date Issued
7141491 Method for fabricating a semiconductor device Nov. 28, 2006
7141490 Method of fabricating a semiconductor device Nov. 28, 2006
7141517 Method of repairing and apparatus for repairing multi-color organic light-emitting display device Nov. 28, 2006
7138306 Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device Nov. 21, 2006
7135388 Method for fabricating single crystal silicon film Nov. 14, 2006
7135389 Irradiation method of laser beam Nov. 14, 2006
7135390 Method of fabricating a semiconductor device incorporating crystallizing by laser irradiation Nov. 14, 2006
7132375 Method of manufacturing a semiconductor device by crystallization of a semiconductor region by use of a continuous wave laser beam through the substrate Nov. 7, 2006
7129124 Display device, process of fabricating same, and apparatus for fabricating same Oct. 31, 2006
7129122 Semiconductor memory cell and semiconductor memory device Oct. 31, 2006
7129153 Process for forming polycrystalline silicon layer by laser crystallization Oct. 31, 2006
7125761 Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device Oct. 24, 2006
7115457 Method for crystallizing semiconductor with laser beams Oct. 3, 2006
7115450 Approach to improve line end shortening including simultaneous trimming of photosensitive layer and hardmask Oct. 3, 2006
7115454 Thin film semiconductor device, polycrystalline semiconductor thin film production and process and production apparatus Oct. 3, 2006
7112518 Method and apparatus for cutting devices from substrates Sep. 26, 2006
7112517 Laser treatment device, laser treatment method, and semiconductor device fabrication method Sep. 26, 2006
7112477 Beam homogenizer laser irradiation, apparatus, semiconductor device, and method of fabricating the semiconductor device Sep. 26, 2006
7109075 Method for fabrication of polycrystallin silicon thin film transistors Sep. 19, 2006
7109069 Semiconductor device and method of manufacturing the same Sep. 19, 2006
7109073 Method for fabricating semiconductor device Sep. 19, 2006
7098084 Semiconductor device and manufacturing method thereof Aug. 29, 2006
7091097 End-of-range defect minimization in semiconductor device Aug. 15, 2006
7091112 Method of forming a polycrystalline silicon layer Aug. 15, 2006
7087505 Semiconductor device including semiconductor thin films having different crystallinity, substrate of the same, and manufacturing method of the same, and liquid crystal display and manufacturin Aug. 8, 2006
7078322 Method of manufacturing a thin film transistor Jul. 18, 2006
7078323 Digital light valve semiconductor processing Jul. 18, 2006
7078274 Method of forming active matrix type display including a metal layer having a light shield function Jul. 18, 2006
7071083 Method of fabricating polysilicon film by excimer laser crystallization process Jul. 4, 2006
7071035 Apparatus and method for laser radiation Jul. 4, 2006
7067404 Thin film semiconductor device having a gate electrode insulator formed through high-heat oxidization Jun. 27, 2006
7067403 Method for manufacturing a semiconductor device that includes adding noble gas to a semiconductor film and then irradiating the semiconductor film with laser light in the presence of a magneti Jun. 27, 2006
7064016 Semiconductor device and method of fabricating thereof Jun. 20, 2006
7063999 Thin film processing method and thin film processing apparatus including controlling the cooling rate to control the crystal sizes Jun. 20, 2006
7056806 Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces Jun. 6, 2006
7041580 Laser annealing method and laser annealing device May. 9, 2006
7037811 Method for fabricating a semiconductor device May. 2, 2006
7033915 Method for crystallizing amorphous silicon film Apr. 25, 2006
7033872 Thin film transistor and method of fabricating the same Apr. 25, 2006
7029996 Methods for producing uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors using sequential lateral solidification Apr. 18, 2006
7026227 Method of irradiating a laser beam, and method of fabricating semiconductor devices Apr. 11, 2006
7022556 Exposure device, exposure method and method of manufacturing semiconductor device Apr. 4, 2006
7023500 Display device with active-matrix transistor having silicon film modified by selective laser irradiation Apr. 4, 2006
7022604 Method of forming spatial regions of a second material in a first material Apr. 4, 2006
7015122 Method of forming polysilicon thin film transistor Mar. 21, 2006
7015079 Semiconductor film, semiconductor device, and method of manufacturing the same including adding metallic element to the amorphous semiconductor film and introducing oxygen after crystallizatio Mar. 21, 2006
7015081 Thin film transistor substrate and manufacturing method thereof Mar. 21, 2006
7011911 Mask for polycrystallization and method of manufacturing thin film transistor using polycrystallization mask Mar. 14, 2006
7008863 Method for forming polycrystalline silicon film Mar. 7, 2006
7005362 Method of fabricating a thin film transistor Feb. 28, 2006

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