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Class Information
Number: 438/487
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor > And subsequent crystallization > Utilizing wave energy (e.g., laser, electron beam, etc.)
Description: Process whereby the crystallization is affected by the application of a source of wave energy to the amorphous semiconductor.

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17

Patent Number Title Of Patent Date Issued
7300858 Laser crystallization and selective patterning using multiple beamlets Nov. 27, 2007
7294589 Laser irradiation apparatus Nov. 13, 2007
7288294 Method of crystallizing amorphous silicon using nanoparticles Oct. 30, 2007
7279398 Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces Oct. 9, 2007
7279372 Manufacturing method of semiconductor device Oct. 9, 2007
7273774 Method for making thin-film semiconductor device Sep. 25, 2007
7268062 Method of crystallizing a semiconductor film using laser irradiation Sep. 11, 2007
7268063 Process for fabricating semiconductor component Sep. 11, 2007
7259081 Process and system for laser crystallization processing of film regions on a substrate to provide substantial uniformity, and a structure of such film regions Aug. 21, 2007
7259082 Method of manufacturing semiconductor device Aug. 21, 2007
7256109 Isotropic polycrystalline silicon Aug. 14, 2007
7253032 Method of flattening a crystallized semiconductor film surface by using a plate Aug. 7, 2007
7253010 Method of deciding focal plane and method of crystallization using thereof Aug. 7, 2007
7247527 Method for manufacturing semiconductor device, and laser irradiation apparatus Jul. 24, 2007
7244669 Patterning of devices Jul. 17, 2007
7241708 Laser irradiation method that includes moving a center of rotation along a straight line in order to enhance the crystallinity of the semiconductor film Jul. 10, 2007
7241650 Method of manufacturing a polysilicon layer and a mask used therein Jul. 10, 2007
7238559 Method of forming single crystal silicon thin film using sequential lateral solidification (SLS) Jul. 3, 2007
7235466 Method of fabricating a polysilicon layer Jun. 26, 2007
7235467 Method for forming a semiconductor device having a structure of a single crystal scandium oxide film formed on a silicon substrate Jun. 26, 2007
7232714 Semiconductor device Jun. 19, 2007
7232716 Display device and method for manufacturing the same Jun. 19, 2007
7223938 Method for manufacturing a display device including irradiating overlapping regions May. 29, 2007
7220660 Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method May. 22, 2007
7218004 Fusing nanowires using in situ crystal growth May. 15, 2007
7217642 Mask for crystallizing polysilicon and a method for forming thin film transistor using the mask May. 15, 2007
7214574 Heating treatment device, heating treatment method and fabrication method of semiconductor device May. 8, 2007
7208696 Method of forming a polycrystalline silicon layer Apr. 24, 2007
7208395 Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device Apr. 24, 2007
7205184 Method of crystallizing silicon film and method of manufacturing thin film transistor liquid crystal display Apr. 17, 2007
7205215 Fabrication method of thin film transistor Apr. 17, 2007
7202144 Manufacturing method of semiconductor film and image display device Apr. 10, 2007
7202119 Method of manufacturing semiconductor device Apr. 10, 2007
7195992 Method of uniform seeding to control grain and defect density of crystallized silicon for use in sub-micron thin film transistors Mar. 27, 2007
7186601 Method of fabricating a semiconductor device utilizing a catalyst material solution Mar. 6, 2007
7183145 Semiconductor device and manufacturing method thereof Feb. 27, 2007
7183148 Display panel and method for manufacturing the same Feb. 27, 2007
7179726 Laser processing apparatus and laser processing process Feb. 20, 2007
7179729 Heat treatment apparatus and method of manufacturing a semiconductor device Feb. 20, 2007
7179699 Method of fabricating semiconductor device Feb. 20, 2007
7176042 Laser beam irradiation method that includes determining a thickness of semiconductor prior to crystallizing Feb. 13, 2007
7169689 Method of manufacturing a semiconductor device Jan. 30, 2007
7169690 Method of producing crystalline semiconductor material and method of fabricating semiconductor device Jan. 30, 2007
7166500 Method of manufacturing a semiconductor device Jan. 23, 2007
7160764 Laser annealing method and semiconductor device fabricating method Jan. 9, 2007
7160792 Laser processing method Jan. 9, 2007
7153729 Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same Dec. 26, 2006
7151046 Semiconductor thin film decomposing method, decomposed semiconductor thin film, decomposed semiconductor thin film evaluation method, thin film transistor made of decomposed semiconductor thin Dec. 19, 2006
7148095 Semiconductor device, electro-optic device, integrated circuit, and electronic apparatus Dec. 12, 2006
7144793 Method of producing crystalline semiconductor material and method of fabricating semiconductor device Dec. 5, 2006

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