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Class Information
Number: 438/487
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor > And subsequent crystallization > Utilizing wave energy (e.g., laser, electron beam, etc.)
Description: Process whereby the crystallization is affected by the application of a source of wave energy to the amorphous semiconductor.

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17

Patent Number Title Of Patent Date Issued
7442629 Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate Oct. 28, 2008
7439115 Semiconductor fabricating apparatus Oct. 21, 2008
7435635 Method for crystallizing semiconductor material Oct. 14, 2008
7435668 Method for doping impurities, and for producing a semiconductor device and applied electronic apparatus using a solution containing impurity ions Oct. 14, 2008
7432176 Method of three-dimensional microfabrication and high-density three-dimentional fine structure Oct. 7, 2008
7422965 Methods of fabricating p-type transistors including germanium channel regions Sep. 9, 2008
7422987 Method for manufacturing semiconductor device Sep. 9, 2008
7419890 Complementary thin film transistor circuit, electro-optical device, and electronic apparatus Sep. 2, 2008
7419887 Laser assisted nano deposition Sep. 2, 2008
7419860 Method of fabricating a semiconductor thin film Sep. 2, 2008
7413608 Crystallization apparatus, crystallization method, and phase shifter Aug. 19, 2008
7410889 Method of fabricating a poly-silicon thin film Aug. 12, 2008
7407873 Method of manufacturing semiconductor device Aug. 5, 2008
7407848 Methods of manufacturing semiconductor thin film, electronic device and liquid crystal display device Aug. 5, 2008
7405114 Laser irradiation apparatus and method of manufacturing semiconductor device Jul. 29, 2008
7405141 Processing method, processing apparatus, crystallization method and crystallization apparatus using pulsed laser beam Jul. 29, 2008
7402505 Single electron devices formed by laser thermal annealing Jul. 22, 2008
7399945 Method of thermal processing a substrate with direct and redirected reflected radiation Jul. 15, 2008
7396712 Thin film processing method and thin processing apparatus Jul. 8, 2008
7393729 Method for fabricating semiconductor device Jul. 1, 2008
7393764 Laser treatment apparatus, laser treatment method, and manufacturing method of semiconductor device Jul. 1, 2008
7390728 Display device and manufacturing method thereof Jun. 24, 2008
7387922 Laser irradiation method, method for manufacturing semiconductor device, and laser irradiation system Jun. 17, 2008
7387954 Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device Jun. 17, 2008
7381632 Semiconductor thin film crystallization device and semiconductor thin film crystallization method Jun. 3, 2008
7381600 Method of annealing polycrystalline silicon using solid-state laser and devices built thereon Jun. 3, 2008
7374985 Laser irradiation apparatus and method for manufacturing semiconductor device May. 20, 2008
7375010 Laser irradiation device May. 20, 2008
7371620 Apparatus and method for laser radiation May. 13, 2008
7368367 Method for forming a semiconductor May. 6, 2008
7364992 Method of forming polycrystalline silicon thin film and method of manufacturing thin film transistor using the method Apr. 29, 2008
7361221 Light irradiation apparatus, crystallization apparatus, crystallization method, semiconductor device and light modulation element Apr. 22, 2008
7357963 Apparatus and method of crystallizing amorphous silicon Apr. 15, 2008
7358165 Semiconductor device and method for manufacturing semiconductor device Apr. 15, 2008
7354810 Method of and apparatus for manufacturing semiconductor thin film, and method of manufacturing thin film transistor Apr. 8, 2008
7351647 Method of irradiating a laser beam, apparatus for irradiating a laser beam and method of fabricating semiconductor devices Apr. 1, 2008
7348222 Method for manufacturing a thin film transistor and method for manufacturing a semiconductor device Mar. 25, 2008
7341928 System and process for processing a plurality of semiconductor thin films which are crystallized using sequential lateral solidification techniques Mar. 11, 2008
7335541 Method for fabricating thin film transistor using the mask for forming polysilicon including slit patterns deviated from each other Feb. 26, 2008
7335539 Method for making thin-film semiconductor device Feb. 26, 2008
7329594 Method of manufacturing a semiconductor device Feb. 12, 2008
7326630 Method of fabricating semiconductor device utilizing laser irradiation Feb. 5, 2008
7326876 Sequential lateral solidification device Feb. 5, 2008
7323399 Clean process for an electron beam source Jan. 29, 2008
7319055 Method of fabricating a semiconductor device utilizing crystallization of semiconductor region with laser beam Jan. 15, 2008
7316968 Methods of forming semiconductor devices having multiple channel MOS transistors Jan. 8, 2008
7312418 Semiconductor thin film forming system Dec. 25, 2007
7309645 Semiconductor thin film crystallization method Dec. 18, 2007
7303980 Laser annealing method and apparatus Dec. 4, 2007
7304005 Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device Dec. 4, 2007

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