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Class Information
Number: 438/487
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor > And subsequent crystallization > Utilizing wave energy (e.g., laser, electron beam, etc.)
Description: Process whereby the crystallization is affected by the application of a source of wave energy to the amorphous semiconductor.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17

Patent Number Title Of Patent Date Issued
7585791 Laser irradiation method, laser irradiation apparatus and method for manufacturing semiconductor device Sep. 8, 2009
7582541 Wafer laser processing method Sep. 1, 2009
7575958 Programmable fuse with silicon germanium Aug. 18, 2009
7575985 Method of fabricating semiconductor device Aug. 18, 2009
7569439 Thin film semiconductor device, production process and information displays Aug. 4, 2009
7566617 Method for manufacturing semiconductor elemental device forming an amorphous high dielectric film and an amorphous silicon film Jul. 28, 2009
7566625 Semiconductor device manufacturing method, heat treatment apparatus, and heat treatment method Jul. 28, 2009
7563659 Method of fabricating poly-crystalline silicon thin film and method of fabricating transistor using the same Jul. 21, 2009
7563732 Method and apparatus for forming polycrystalline layer using laser crystallization Jul. 21, 2009
7560365 Method of semiconductor thin film crystallization and semiconductor device fabrication Jul. 14, 2009
7553715 Crystallization method and apparatus thereof Jun. 30, 2009
7553778 Method for producing a semiconductor device including crystallizing an amphorous semiconductor film Jun. 30, 2009
7547593 Method of fabricating semiconductor device Jun. 16, 2009
7547616 Laser processing method for trench-edge-defect-free solid phase epitaxy in confined geometrics Jun. 16, 2009
7541230 Method and apparatus for crystallizing semiconductor with laser beams Jun. 2, 2009
7538014 Method of producing crystalline semiconductor material and method of fabricating semiconductor device May. 26, 2009
7534670 Semiconductor device and manufacturing method of the same May. 19, 2009
7534705 Method of manufacturing a semiconductor device May. 19, 2009
7528057 Laser annealing method and laser annealing device May. 5, 2009
7528023 Apparatus for crystallizing semiconductor with laser beams May. 5, 2009
7521649 Laser processing apparatus and laser processing method Apr. 21, 2009
7517620 Method for fabricating array substrate having color filter on thin film transistor structure for liquid crystal display device Apr. 14, 2009
7517773 Method of manufacturing a thin film transistor Apr. 14, 2009
7517774 Laser annealing method Apr. 14, 2009
7514305 Apparatus and methods for improving the intensity profile of a beam image used to process a substrate Apr. 7, 2009
7510920 Manufacturing method for a thin film transistor that uses a pulse oscillation laser crystallize an amorphous semiconductor film Mar. 31, 2009
7507645 Method of forming polycrystalline semiconductor layer and thin film transistor using the same Mar. 24, 2009
7498212 Laser annealing method and semiconductor device fabricating method Mar. 3, 2009
7492583 Portable computer having magnetic switch Feb. 17, 2009
7491559 Low-temperature polysilicon display and method for fabricating same Feb. 17, 2009
7488633 Method for forming polysilicon by illuminating a laser beam at the amorphous silicon substrate through a mask Feb. 10, 2009
7488670 Direct channel stress Feb. 10, 2009
7482552 Laser crystallizing device and method for crystallizing silicon Jan. 27, 2009
7482274 Metal wiring and method of manufacturing the same, and metal wiring substrate and method of manufacturing the same Jan. 27, 2009
7482273 Transmissive dynamic plasma steering method for radiant electromagnetic energy Jan. 27, 2009
7482253 Fusing nanowires using in situ crystal growth Jan. 27, 2009
7479420 Laser optical apparatus Jan. 20, 2009
7476601 Semiconductor structure having multilayer of polysilicon and display panel applied with the same Jan. 13, 2009
7473622 Laser annealing method and manufacturing method of a semiconductor device Jan. 6, 2009
7473621 Producing method for crystalline thin film Jan. 6, 2009
7470575 Process for fabricating semiconductor device Dec. 30, 2008
7470603 Methods of fabricating semiconductor devices having laser-formed single crystalline active structures Dec. 30, 2008
7470602 Crystalline film and its manufacture method using laser Dec. 30, 2008
7468312 Laser irradiation apparatus, laser irradiation method, and method of manufacturing a semiconductor device Dec. 23, 2008
7466735 Manufacturing method of semiconductor device Dec. 16, 2008
7465648 Laser irradiation apparatus and method for manufacturing semiconductor device Dec. 16, 2008
7459353 Methods of laterally forming single crystalline thin film regions from seed layers Dec. 2, 2008
7459379 Method for manufacturing semiconductor device Dec. 2, 2008
7456371 Laser apparatus and laser annealing method Nov. 25, 2008
7452788 Method of laser annealing using linear beam having quasi-trapezoidal energy profile for increased depth of focus Nov. 18, 2008

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