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Class Information
Number: 438/487
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor > And subsequent crystallization > Utilizing wave energy (e.g., laser, electron beam, etc.)
Description: Process whereby the crystallization is affected by the application of a source of wave energy to the amorphous semiconductor.

Patents under this class:
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Patent Number Title Of Patent Date Issued
7704812 Semiconductor circuit and method of fabricating the same Apr. 27, 2010
7704861 Electron beam microprocessing method Apr. 27, 2010
7704862 Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method Apr. 27, 2010
7700462 Laser irradiation method, laser irradiation apparatus, and method for manufacturing semiconductor device Apr. 20, 2010
7700463 Method for manufacturing semiconductor device Apr. 20, 2010
7696070 System and method for digital light valve processing Apr. 13, 2010
7696031 Method for manufacturing semiconductor device Apr. 13, 2010
7691733 Laser processing method for trench-edge-defect-free solid phase epitaxy in confined geometrics Apr. 6, 2010
7691687 Method for processing laser-irradiated thin films having variable thickness Apr. 6, 2010
7687380 Laser annealing method and laser annealing device Mar. 30, 2010
7682951 Method for fabricating a polysilicon layer having large and uniform grains Mar. 23, 2010
7682950 Method of manufacturing laterally crystallized semiconductor layer and method of manufacturing thin film transistor using the same method Mar. 23, 2010
7682949 Laser treatment device, laser treatment method, and semiconductor device fabrication method Mar. 23, 2010
7682948 Digital light valve Mar. 23, 2010
7678621 Crystallization pattern and method for crystallizing amorphous silicon using the same Mar. 16, 2010
7670935 Manufacturing method of semiconductor device Mar. 2, 2010
7666772 Heat treatment apparatus and method of manufacturing a semiconductor device Feb. 23, 2010
7666768 Through-die metal vias with a dispersed phase of graphitic structures of carbon for reduced thermal expansion and increased electrical conductance Feb. 23, 2010
7666767 Mask for sequential lateral solidification (SLS) process and a method thereof Feb. 23, 2010
7662703 Method for manufacturing crystalline semiconductor film and semiconductor device Feb. 16, 2010
7664365 Beam homogenizer, and laser irradiation method, laser irradiation apparatus, and laser annealing method of non-single crystalline semiconductor film using the same Feb. 16, 2010
7659185 Method for forming silicon thin-film on flexible metal substrate Feb. 9, 2010
7655881 Laser irradiation stage, laser irradiation optical system, laser irradiation apparatus, laser irradiation method, and method of manufacturing a semiconductor device Feb. 2, 2010
7655544 Self-assembled nanostructures Feb. 2, 2010
7655152 Etching Feb. 2, 2010
7651931 Laser beam projection mask, and laser beam machining method and laser beam machine using same Jan. 26, 2010
7651932 Method for manufacturing antenna and method for manufacturing semiconductor device Jan. 26, 2010
7649206 Sequential lateral solidification mask Jan. 19, 2010
7645337 Systems and methods for creating crystallographic-orientation controlled poly-silicon films Jan. 12, 2010
7642482 Laser crystallization apparatus and crystallization method Jan. 5, 2010
7638377 Semiconductor device and manufacturing method thereof Dec. 29, 2009
7635412 Crystallizing silicon using a laser beam transmitted through a mask Dec. 22, 2009
7629235 Method for manufacturing a semiconductor device that includes adding noble gas to a semiconductor film and then irradiating the semiconductor film with laser light in the presence of a magneti Dec. 8, 2009
7629234 Semiconductor structure processing using multiple laterally spaced laser beam spots with joint velocity profiling Dec. 8, 2009
7629209 Methods for fabricating polysilicon film and thin film transistors Dec. 8, 2009
7625772 Method for making an electromechanical component on a plane substrate Dec. 1, 2009
7622369 Device isolation technology on semiconductor substrate Nov. 24, 2009
7622370 Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and a structure of such film regions Nov. 24, 2009
7618882 Method for manufacturing semiconductor device and laser irradiation apparatus Nov. 17, 2009
7618852 Phase transition method of amorphous material using cap layer Nov. 17, 2009
7615499 Method for oxidizing a layer, and associated holding devices for a substrate Nov. 10, 2009
7615502 Laser anneal of vertically oriented semiconductor structures while maintaining a dopant profile Nov. 10, 2009
7611577 Semiconductor thin film manufacturing method and device, beam-shaping mask, and thin film transistor Nov. 3, 2009
7611807 Method for forming poly-silicon film Nov. 3, 2009
7608529 Method for selective laser crystallization and display panel fabricated by using the same Oct. 27, 2009
7608528 Substrate cover, and charged particle beam writing apparatus and method Oct. 27, 2009
7608527 Laser irradiation method and method for manufacturing crystalline semiconductor film Oct. 27, 2009
7598160 Method for manufacturing thin film semiconductor Oct. 6, 2009
7589032 Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment Sep. 15, 2009
7588990 Dynamic surface annealing of implanted dopants with low temperature HDPCVD process for depositing a high extinction coefficient optical absorber layer Sep. 15, 2009

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