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Class Information
Number: 438/487
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor > And subsequent crystallization > Utilizing wave energy (e.g., laser, electron beam, etc.)
Description: Process whereby the crystallization is affected by the application of a source of wave energy to the amorphous semiconductor.










Patents under this class:
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Patent Number Title Of Patent Date Issued
7902051 Method for fabrication of single crystal diodes for resistive memories Mar. 8, 2011
7902049 Method for depositing high-quality microcrystalline semiconductor materials Mar. 8, 2011
7892952 Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electr Feb. 22, 2011
7892953 Method for making multi-crystalline film of solar cell Feb. 22, 2011
7892954 Interconnection of electronic devices with raised leads Feb. 22, 2011
7892955 Laser mask and crystallization method using the same Feb. 22, 2011
7888250 Method and apparatus for activating compound semiconductor Feb. 15, 2011
7888247 Method of forming polycrystalline semiconductor film Feb. 15, 2011
7883934 Method of fabricating oxide semiconductor device Feb. 8, 2011
7879510 Method for quartz photomask plasma etching Feb. 1, 2011
7879700 Crystallization apparatus and method of amorphous silicon Feb. 1, 2011
7881350 Laser apparatus, laser irradiation method, and manufacturing method of semiconductor device Feb. 1, 2011
7875508 Semiconductor device and method for manufacturing the same Jan. 25, 2011
7871907 Mask and method of fabricating a polysilicon layer using the same Jan. 18, 2011
7872246 Laser annealing method and semiconductor device fabricating method Jan. 18, 2011
7863162 Semiconductor device and manufacturing method thereof Jan. 4, 2011
7851076 Method of fabricating silicon substrate for magnetic recording media, and magnetic recording medium Dec. 14, 2010
7846821 Multi-angle rotation for ion implantation of trenches in superjunction devices Dec. 7, 2010
7842589 Laser irradiation apparatus with means for applying magnetic field Nov. 30, 2010
7838397 Process and system for laser annealing and laser-annealed semiconductor film Nov. 23, 2010
7829445 Method of manufacturing a flash memory device Nov. 9, 2010
7820531 Method of manufacturing semiconductor device, method of manufacturing display apparatus, apparatus of manufacturing semiconductor device, and display apparatus Oct. 26, 2010
7811910 Manufacturing method of display device Oct. 12, 2010
7799666 Method of spatially selective laser-assisted doping of a semiconductor Sep. 21, 2010
7799665 Laser processing apparatus and laser processing process Sep. 21, 2010
7799659 Singulating semiconductor wafers to form semiconductor chips Sep. 21, 2010
7790487 Method for fabricating photo sensor Sep. 7, 2010
7790533 Laser irradiation method, laser irradiation apparatus, and method for manufacturing semiconductor device Sep. 7, 2010
7790583 Clean process for an electron beam source Sep. 7, 2010
7785992 Array substrate for flat display device and method for fabricating the same Aug. 31, 2010
7772135 Method for forming poly-silicon film Aug. 10, 2010
7767507 Polycrystalline silicon thin film, fabrication method thereof, and thin film transistor without directional dependency on active channels fabricated using the same Aug. 3, 2010
7767559 Process for fabricating semiconductor device Aug. 3, 2010
7767595 Manufacturing method of semiconductor device Aug. 3, 2010
7763527 Semiconductor element, semiconductor device, and method for fabrication thereof Jul. 27, 2010
7759225 Method for fabricating semiconductor layer and light-emitting diode Jul. 20, 2010
7745314 Method of degassing thin layer and method of manufacturing silicon thin film Jun. 29, 2010
7746528 Beam irradiation apparatus, beam irradiation method, and method for manufacturing thin film transistor Jun. 29, 2010
7741197 Systems and methods for harvesting and reducing contamination in nanowires Jun. 22, 2010
7737054 Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device Jun. 15, 2010
7736917 Laser beam irradiation method and method of manufacturing a thin firm transistor Jun. 15, 2010
7727913 Method of crystallizing semiconductor film Jun. 1, 2010
7723242 Enhanced thin-film oxidation process May. 25, 2010
7723167 Process and system for laser annealing and laser-annealed semiconductor film May. 25, 2010
7718517 Single-shot semiconductor processing system and method having various irradiation patterns May. 18, 2010
7714251 Laser irradiation apparatus May. 11, 2010
7713850 Method for forming a structure provided with at least one zone of one or several semiconductor nanocrystals localised with precision May. 11, 2010
7709398 Process and apparatus for depositing semiconductor layers using two process gases, one of which is preconditioned May. 4, 2010
7709309 Semiconductor device and manufacturing method thereof May. 4, 2010
7709302 Method for manufacturing a semiconductor device May. 4, 2010

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