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Class Information
Number: 438/487
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor > And subsequent crystallization > Utilizing wave energy (e.g., laser, electron beam, etc.)
Description: Process whereby the crystallization is affected by the application of a source of wave energy to the amorphous semiconductor.

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17

Patent Number Title Of Patent Date Issued
8053339 Semiconductor device and manufacturing method thereof Nov. 8, 2011
8048783 Method of forming polycrystalline silicon layer and atomic layer deposition apparatus used for the same Nov. 1, 2011
8048784 Methods of manufacturing semiconductor devices including a doped silicon layer Nov. 1, 2011
8043942 Method for producing core-shell nanowires, nanowires produced by the method and nanowire device comprising the nanowires Oct. 25, 2011
8043943 Low-temperature formation of polycrystalline semiconductor films via enhanced metal-induced crystallization Oct. 25, 2011
8043977 Method of manufacturing a semiconductor device having a group-III nitride superlattice layer on a silicon substrate Oct. 25, 2011
8034698 Systems and methods for inducing crystallization of thin films using multiple optical paths Oct. 11, 2011
8034672 Method of producing display device, display device, method of producing thin-film transistor substrate, and thin-film transistor substrate Oct. 11, 2011
8030190 Method of manufacturing crystalline semiconductor thin film Oct. 4, 2011
8026158 Systems and methods for processing semiconductor structures using laser pulses laterally distributed in a scanning window Sep. 27, 2011
8026519 Systems and methods for forming a time-averaged line image Sep. 27, 2011
8017507 Method of manufacturing a polycrystalline semiconductor thin film Sep. 13, 2011
8017508 Method for manufacturing semiconductor device Sep. 13, 2011
8012861 Systems and methods for preparing epitaxially textured polycrystalline films Sep. 6, 2011
8008172 Methods of forming semiconductor devices including multistage planarization and crystalization of a semiconductor layer Aug. 30, 2011
8008156 Nitride read only memory device with buried diffusion spacers and method for making the same Aug. 30, 2011
8003499 Laser irradiating device, laser irradiating method and manufacturing method of semiconductor device Aug. 23, 2011
8003510 Fabrication methods for nano-scale chalcopyritic powders and polymeric thin-film solar cells Aug. 23, 2011
7998841 Method for dehydrogenation treatment and method for forming crystalline silicon film Aug. 16, 2011
7998845 Semiconductor device and method of manufacturing the same Aug. 16, 2011
7998846 3-D integrated circuit system and method Aug. 16, 2011
7994029 Method for patterning crystalline indium tin oxide using femtosecond laser Aug. 9, 2011
7994030 Method for manufacturing antenna and method for manufacturing semiconductor device Aug. 9, 2011
7985665 Method of forming polycrystalline silicon thin film and method of manufacturing thin film transistor using the method Jul. 26, 2011
7985635 Laser process Jul. 26, 2011
7981701 Semiconductor thin film manufacturing method Jul. 19, 2011
7981733 Laser irradiation method, laser irradiation apparatus, and semiconductor device Jul. 19, 2011
7981778 Directional solid phase crystallization of thin amorphous silicon for solar cell applications Jul. 19, 2011
7977217 Method of crystallizing silicon Jul. 12, 2011
7972943 Manufacturing method of semiconductor device Jul. 5, 2011
7964480 Single scan irradiation for crystallization of thin films Jun. 21, 2011
7960263 Amorphization/templated recrystallization method for hybrid orientation substrates Jun. 14, 2011
7960262 Method for manufacturing semiconductor device by applying laser beam to single-crystal semiconductor layer and non-single-crystal semiconductor layer through cap film Jun. 14, 2011
7960261 Method for manufacturing crystalline semiconductor film and method for manufacturing thin film transistor Jun. 14, 2011
7960252 Method for forming a semiconductor film including a film forming gas and decomposing gas while emitting a laser sheet Jun. 14, 2011
7955934 Nitride read only memory device with buried diffusion spacers and method for making the same Jun. 7, 2011
7943533 Method for surface modification May. 17, 2011
7943534 Semiconductor device manufacturing method and semiconductor device manufacturing system May. 17, 2011
7943885 Laser irradiation method and method of manufacturing semiconductor device May. 17, 2011
7939435 Laser annealing method May. 10, 2011
7927936 Laser mask and crystallization method using the same Apr. 19, 2011
7927935 Method for crystallizing semiconductor with laser beams Apr. 19, 2011
7927983 Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device Apr. 19, 2011
7923660 Pulsed laser anneal system architecture Apr. 12, 2011
7919366 Laser crystallization method for amorphous semiconductor thin film Apr. 5, 2011
7919399 Semiconductor device manufacturing method and display device Apr. 5, 2011
7910415 Semiconductor device and method of manufacturing the same, and semiconductor substrate and method of manufacturing the same Mar. 22, 2011
7910465 Manufacturing method of semiconductor substrate Mar. 22, 2011
7906414 Single-shot semiconductor processing system and method having various irradiation patterns Mar. 15, 2011
7902052 System and process for processing a plurality of semiconductor thin films which are crystallized using sequential lateral solidification techniques Mar. 8, 2011

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