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Class Information
Number: 438/487
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor > And subsequent crystallization > Utilizing wave energy (e.g., laser, electron beam, etc.)
Description: Process whereby the crystallization is affected by the application of a source of wave energy to the amorphous semiconductor.










Patents under this class:
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Patent Number Title Of Patent Date Issued
6057251 Method for forming interlevel dielectric layer in semiconductor device using electron beams May. 2, 2000
6048781 Semiconductor processing method for providing large grain polysilicon films Apr. 11, 2000
6048758 Method for crystallizing an amorphous silicon thin film Apr. 11, 2000
6027987 Method of manufacturing a crystalline semiconductor Feb. 22, 2000
6022764 Exposure apparatus and method for forming thin film transistor Feb. 8, 2000
6020224 Method for making thin film transistor Feb. 1, 2000
6015720 Method of forming polycrystalline semiconductor thin film Jan. 18, 2000
6008144 Window shutter for laser annealing Dec. 28, 1999
5994174 Method of fabrication of display pixels driven by silicon thin film transistors Nov. 30, 1999
5994172 Method for producing semiconductor device Nov. 30, 1999
5994164 Nanostructure tailoring of material properties using controlled crystallization Nov. 30, 1999
5976918 Method of forming insulating film with few hydrogen atom inclusions Nov. 2, 1999
5976959 Method for forming large area or selective area SOI Nov. 2, 1999
5970368 Method for manufacturing polycrystal semiconductor film Oct. 19, 1999
5970327 Method of fabricating a thin film transistor Oct. 19, 1999
5963823 Manufacturing method of thin film semiconductor device Oct. 5, 1999
5960323 Laser anneal method for a semiconductor device Sep. 28, 1999
5956581 Method of manufacturing a semiconductor device Sep. 21, 1999
5953595 Method of manufacturing thin film transistor Sep. 14, 1999
5943593 Method for fabricating thin film transistor device Aug. 24, 1999
5940693 Selective silicide thin-film transistor and method for same Aug. 17, 1999
5937282 Method for producing semiconductor device Aug. 10, 1999
5937304 Method for fabricating semiconductor device and method for producing liquid crystal display apparatus Aug. 10, 1999
5930608 Method of fabricating a thin film transistor in which the channel region of the transistor consists of two portions of differing crystallinity Jul. 27, 1999
5923966 Laser processing method Jul. 13, 1999
5920772 Method of fabricating a hybrid polysilicon/amorphous silicon TFT Jul. 6, 1999
5915174 Semiconductor device and method for producing the same Jun. 22, 1999
5908307 Fabrication method for reduced-dimension FET devices Jun. 1, 1999
5904550 Method of producing a semiconductor device May. 18, 1999
5904770 Method of manufacturing a semiconductor device May. 18, 1999
5893990 Laser processing method Apr. 13, 1999
5882960 Method of preparing a semiconductor having a controlled crystal orientation Mar. 16, 1999
5879974 Method of manufacturing a semiconductor device Mar. 9, 1999
5869362 Method of manufacturing semiconductor device Feb. 9, 1999
5858822 Method for producing semiconductor device Jan. 12, 1999
5854096 Process for fabricating semiconductor device Dec. 29, 1998
5854089 Semiconductor device by selectively controlling growth of an epitaxial layer without a mask Dec. 29, 1998
5851862 Method of crystallizing a silicon film Dec. 22, 1998
5843833 Method for producing semiconductor device Dec. 1, 1998
5830784 Method for producing a semiconductor device including doping with a group IV element Nov. 3, 1998
5827772 Fabrication process for thin film transistor Oct. 27, 1998
5821135 Methods for and applications of making buried structures in semiconductor thin films Oct. 13, 1998
5821137 Thin film semiconductor device including a driver and a matrix circuit Oct. 13, 1998
5817548 Method for fabricating thin film transistor device Oct. 6, 1998
5817550 Method for formation of thin film transistors on plastic substrates Oct. 6, 1998
5811327 Method and an apparatus for fabricating a semiconductor device Sep. 22, 1998
5783468 Semiconductor circuit and method of fabricating the same Jul. 21, 1998
5776803 Manufacture of electronic devices comprising thin-film circuitry on a polymer substrate Jul. 7, 1998
5773329 Polysilicon grown by pulsed rapid thermal annealing Jun. 30, 1998
5773309 Method for producing silicon thin-film transistors with enhanced forward current drive Jun. 30, 1998

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