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Class Information
Number: 438/487
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor > And subsequent crystallization > Utilizing wave energy (e.g., laser, electron beam, etc.)
Description: Process whereby the crystallization is affected by the application of a source of wave energy to the amorphous semiconductor.










Patents under this class:
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Patent Number Title Of Patent Date Issued
6468842 Laser illumination system Oct. 22, 2002
6465288 Method of manufacturing a semiconductor device using a crystalline semiconductor film Oct. 15, 2002
6461945 Solid phase epitaxy process for manufacturing transistors having silicon/germanium channel regions Oct. 8, 2002
6458200 Method for fabricating thin-film transistor Oct. 1, 2002
6451631 Thin film crystal growth by laser annealing Sep. 17, 2002
6451636 Semiconductor device and display device having laser-annealed semiconductor element Sep. 17, 2002
6448158 Method of patterning an ITO layer Sep. 10, 2002
6444506 Method of manufacturing silicon thin film devices using laser annealing in a hydrogen mixture gas followed by nitride formation Sep. 3, 2002
6440785 Method of manufacturing a semiconductor device utilizing a laser annealing process Aug. 27, 2002
6437284 Optical system and apparatus for laser heat treatment and method for producing semiconductor devices by using the same Aug. 20, 2002
6436779 Semiconductor device having a plurality of resistive paths Aug. 20, 2002
6432847 Method of activating P-type compound semiconductor by using lasers for reducing the resistivity thereof Aug. 13, 2002
6432758 Recrystallization method of polysilicon film in thin film transistor Aug. 13, 2002
6429100 Method of manufacturing a semiconductor device Aug. 6, 2002
6423586 Method for crystallizing semiconductor material without exposing it to air Jul. 23, 2002
6423585 Heating treatment device, heating treatment method and fabrication method of semiconductor device Jul. 23, 2002
6413805 Semiconductor device forming method Jul. 2, 2002
6410368 Method of manufacturing a semiconductor device with TFT Jun. 25, 2002
6410408 CVD film formation method Jun. 25, 2002
6410374 Method of crystallizing a semiconductor layer in a MIS transistor Jun. 25, 2002
6396560 Method of producing liquid crystal display panel May. 28, 2002
6391747 Method for forming polycrystalline silicon film May. 21, 2002
6391731 Activating source and drain junctions and extensions using a single laser anneal May. 21, 2002
6392810 Laser irradiation apparatus, laser irradiation method, beam homogenizer, semiconductor device, and method of manufacturing the semiconductor device May. 21, 2002
6387779 Method of crystallizing a silicon film and thin film transistor and fabricating method thereof using the same May. 14, 2002
6376276 Method of preparing diamond semiconductor Apr. 23, 2002
6372039 Method and apparatus for irradiation of a pulse laser beam Apr. 16, 2002
6368945 Method and system for providing a continuous motion sequential lateral solidification Apr. 9, 2002
6362021 Silicon thin-film, integrated solar cell, module, and methods of manufacturing the same Mar. 26, 2002
6358822 Method of epitaxially growing III-V compound semiconductor containing nitrogen and at least another group V element utilizing MBE Mar. 19, 2002
6358784 Process for laser processing and apparatus for use in the same Mar. 19, 2002
6352911 Thin-film transistor array and method for producing the same Mar. 5, 2002
6352883 Semiconductor device and method for forming the same Mar. 5, 2002
6346437 Single crystal TFT from continuous transition metal delivery method Feb. 12, 2002
6337229 Method of making crystal silicon semiconductor and thin film transistor Jan. 8, 2002
6337236 Semiconductor device and method for forming the same Jan. 8, 2002
6337109 Method of producing crystalline semiconductor Jan. 8, 2002
6335232 Method of manufacturing a thin film transistor Jan. 1, 2002
6329229 Method for processing semiconductor device, apparatus for processing a semiconductor and apparatus for processing semiconductor device Dec. 11, 2001
6326248 Process for fabricating semiconductor device Dec. 4, 2001
6323069 Method of manufacturing a thin film transistor using light irradiation to form impurity regions Nov. 27, 2001
6323070 Semiconductor device and its manufacturing method Nov. 27, 2001
6319761 Method of fabricating a thin film transistor Nov. 20, 2001
6316338 Laser annealing method Nov. 13, 2001
6309951 Method for crystallizing amorphous silicon Oct. 30, 2001
6303411 Spatially resolved temperature measurement and irradiance control Oct. 16, 2001
6300176 Laser processing method Oct. 9, 2001
6294441 Method of manufacturing a semiconductor device Sep. 25, 2001
6291320 Method of manufacturing a semiconductor device utilizing a line-shaped laser beam Sep. 18, 2001
6287889 Diamond thin film or the like, method for forming and modifying the thin film, and method for processing the thin film Sep. 11, 2001

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