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Class Information
Number: 438/487
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor > And subsequent crystallization > Utilizing wave energy (e.g., laser, electron beam, etc.)
Description: Process whereby the crystallization is affected by the application of a source of wave energy to the amorphous semiconductor.

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17

Patent Number Title Of Patent Date Issued
6808968 Method of manufacturing a semiconductor device Oct. 26, 2004
6809013 Laser processing method and apparatus Oct. 26, 2004
6803296 Method of manufacturing a semiconductor device with leveling of a surface of a semiconductor film through irradiation Oct. 12, 2004
6800540 Method for crystallizing silicon Oct. 5, 2004
6800541 Pulse laser irradiation method for forming a semiconductor thin film Oct. 5, 2004
6797550 Semiconductor device and manufacturing method therefor Sep. 28, 2004
6794274 Method for fabricating a polycrystalline silicon film Sep. 21, 2004
6793980 Method of forming photo-catalytic film made of titanium oxide on base material and laminated material thereof Sep. 21, 2004
6787434 Method of fabricating polysilicon film by nickel/copper induced lateral crystallization Sep. 7, 2004
6783811 Method of reducing resistance for conductive film formed on base material Aug. 31, 2004
6777317 Method for semiconductor gate doping Aug. 17, 2004
6770545 Amorphous silicon crystallization method Aug. 3, 2004
6770546 Method of manufacturing semiconductor device Aug. 3, 2004
6767760 Process of manufacturing a thin-film transistor Jul. 27, 2004
6767804 2N mask design and method of sequential lateral solidification Jul. 27, 2004
6767773 Method of Production of a thin film type semiconductor device having a heat-retaining layer Jul. 27, 2004
6767799 Laser beam irradiation method Jul. 27, 2004
6764886 Manufacturing method of semiconductor device Jul. 20, 2004
6759313 Method of fabricating a semiconductor device Jul. 6, 2004
6753212 Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device Jun. 22, 2004
6753211 Semiconductor devices and manufacturing methods thereof Jun. 22, 2004
6746901 Semiconductor device and method of fabricating thereof Jun. 8, 2004
6743687 Abrupt source/drain extensions for CMOS transistors Jun. 1, 2004
6744008 Laser apparatus and laser annealing method Jun. 1, 2004
6740569 Method of fabricating polysilicon film by excimer laser annealing process May. 25, 2004
6740547 Method for fabricating thin-film transistor May. 25, 2004
6734635 Process of crystallizing semiconductor thin film and laser irradiation system May. 11, 2004
6730549 Semiconductor device and method for its preparation May. 4, 2004
6727121 Method for crystallizing a silicon layer and fabricating a TFT using the same Apr. 27, 2004
6727124 Method of manufacturing a TFT using a catalytic element to promote crystallization of a semiconductor film and gettering the catalytic element Apr. 27, 2004
6723541 Method of producing semiconductor device and semiconductor substrate Apr. 20, 2004
6720240 Silicon based nanospheres and nanowires Apr. 13, 2004
6716726 Thin film semiconductor device containing polycrystalline Si--Ge alloy and method for producing thereof Apr. 6, 2004
6713330 Method of fabricating a thin film transistor Mar. 30, 2004
6709957 Method of producing epitaxial wafers Mar. 23, 2004
6706545 Method of fabricating a liquid crystal display Mar. 16, 2004
6706568 Method for manufacturing a semiconductor device with a crystallized semiconductor film leveled by radiating with laser beams Mar. 16, 2004
6706572 Method for manufacturing a thin film transistor using a high pressure oxidation step Mar. 16, 2004
6706570 Laser illumination system Mar. 16, 2004
6692999 Polysilicon film forming method Feb. 17, 2004
6686978 Method of forming an LCD with predominantly <100> polycrystalline silicon regions Feb. 3, 2004
6680242 Method of forming crystalline semiconductor thin film on base substrate, lamination formed with crystalline semiconductor thin film and color filter Jan. 20, 2004
6677214 Semiconductor device and method of fabricating the same Jan. 13, 2004
6677221 Semiconductor device and the fabricating method therefor Jan. 13, 2004
6673126 Multiple chamber fabrication equipment for thin film transistors in a display or electronic device Jan. 6, 2004
6670225 Method of manufacturing a semiconductor device Dec. 30, 2003
6667198 Method and photo mask for manufacturing an array substrate Dec. 23, 2003
6660609 Method of manufacturing a semiconductor device using laser irradiation Dec. 9, 2003
6660576 Substrate and method for producing variable quality substrate material Dec. 9, 2003

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