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Class Information
Number: 438/487
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor > And subsequent crystallization > Utilizing wave energy (e.g., laser, electron beam, etc.)
Description: Process whereby the crystallization is affected by the application of a source of wave energy to the amorphous semiconductor.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17

Patent Number Title Of Patent Date Issued
8703589 Flat panel display and method of manufacturing the same Apr. 22, 2014
8673674 Organic light emitting diode display device and method of fabricating the same Mar. 18, 2014
8658520 Method of manufacturing semiconductor device Feb. 25, 2014
8629739 Out-of plane MEMS resonator with static out-of-plane deflection Jan. 14, 2014
8618568 Method for manufacturing light-emitting device and film formation substrate Dec. 31, 2013
8609521 Method of manufacturing semiconductor device Dec. 17, 2013
8603859 Integrated circuit packaging system with dual side mold and method of manufacture thereof Dec. 10, 2013
8598050 Laser annealing method and apparatus Dec. 3, 2013
8580700 Method for manufacturing semiconductor device Nov. 12, 2013
8575621 Low interconnect resistance integrated switches Nov. 5, 2013
8569187 Thermal processing apparatus Oct. 29, 2013
8551810 Method for manufacturing semiconductor device Oct. 8, 2013
8551868 Irradiation assisted nucleation of quantum confinements by atomic layer deposition Oct. 8, 2013
8530336 Method for manufacturing semiconductor substrate Sep. 10, 2013
8530589 Print processing for patterned conductor, semiconductor and dielectric materials Sep. 10, 2013
8525019 Thin film article and method for forming a reduced conductive area in transparent conductive films for photovoltaic modules Sep. 3, 2013
8519916 Low interconnect resistance integrated switches Aug. 27, 2013
8518763 Thin-film transistor device manufacturing method, thin-film transistor device, and display device Aug. 27, 2013
8513065 Method for manufacturing display device Aug. 20, 2013
8507331 Method of adjusting gap between bumps in pixel region and method of manufacturing display device using the method Aug. 13, 2013
8507368 Single-shot semiconductor processing system and method having various irradiation patterns Aug. 13, 2013
8492248 Manufacturing method of semiconductor substrate Jul. 23, 2013
8486812 Fabrication method for polycrystalline silicon thin film and display device fabricated using the same Jul. 16, 2013
8470696 Laser mask and crystallization method using the same Jun. 25, 2013
8466015 Thin film transistors in pixel and driving portions characterized by surface roughness Jun. 18, 2013
8466048 Selective recrystallization of semiconductor Jun. 18, 2013
8461284 Silicon polymers, methods of polymerizing silicon compounds, and methods of forming thin films from such silicon polymers Jun. 11, 2013
8460954 Semiconductor device, method for manufacturing same, and display device Jun. 11, 2013
8455337 Crystallization apparatus, crystallization method, method of manufacturing thin film transistor and method of manufacturing organic light emitting display apparatus Jun. 4, 2013
8455790 Laser irradiation apparatus, laser irradiation method, and manufacturing method of semiconductor device Jun. 4, 2013
8450159 Thin film transistor, fabrication method of same, and display device having the same May. 28, 2013
8445332 Single crystal silicon rod fabrication methods and a single crystal silicon rod structure May. 21, 2013
8445365 Single scan irradiation for crystallization of thin films May. 21, 2013
8445366 Electron beam annealing apparatus and annealing methods using the same May. 21, 2013
8435871 Method for manufacturing semiconductor device, and semiconductor device and electronic device May. 7, 2013
8426324 Manufacturing method of memory element, laser irradiation apparatus, and laser irradiation method Apr. 23, 2013
8426296 Systems and methods for preparing epitaxially textured polycrystalline films Apr. 23, 2013
8426285 Method of fabricating semiconductor device Apr. 23, 2013
8411713 Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and structure of such film regions Apr. 2, 2013
8404408 Mask for sequential lateral solidification and sequential lateral solidification apparatus having the same Mar. 26, 2013
8389388 Photonic device and method of making the same Mar. 5, 2013
8383452 Semiconductor device and method for manufacturing the same Feb. 26, 2013
8384029 Cross-section systems and methods Feb. 26, 2013
8378252 Method and apparatus for hybrid resolution feedback of a motion stage Feb. 19, 2013
8377805 Semiconductor thin film, thin film transistor, method for manufacturing same, and manufacturing equipment of semiconductor thin film Feb. 19, 2013
8377804 Manufacturing method of semiconductor substrate and semiconductor device Feb. 19, 2013
8372762 Manufacturing method of semiconductor device and laser processing apparatus Feb. 12, 2013
8367527 Method of fabricating polycrystalline silicon thin film Feb. 5, 2013
8361890 Systems, methods and materials including crystallization of substrates via sub-melt laser anneal, as well as products produced by such processes Jan. 29, 2013
8357592 Method and apparatus for manufacturing semiconductor substrate dedicated to semiconductor device, and method and apparatus for manufacturing semiconductor device Jan. 22, 2013

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