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Class Information
Number: 438/487
Name: Semiconductor device manufacturing: process > Formation of semiconductive active region on any substrate (e.g., fluid growth, deposition) > Amorphous semiconductor > And subsequent crystallization > Utilizing wave energy (e.g., laser, electron beam, etc.)
Description: Process whereby the crystallization is affected by the application of a source of wave energy to the amorphous semiconductor.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618852 |
Phase transition method of amorphous material using cap layer |
Nov. 17, 2009 |
| 7618882 |
Method for manufacturing semiconductor device and laser irradiation apparatus |
Nov. 17, 2009 |
| 7615499 |
Method for oxidizing a layer, and associated holding devices for a substrate |
Nov. 10, 2009 |
| 7615502 |
Laser anneal of vertically oriented semiconductor structures while maintaining a dopant profile |
Nov. 10, 2009 |
| 7611807 |
Method for forming poly-silicon film |
Nov. 3, 2009 |
| 7611577 |
Semiconductor thin film manufacturing method and device, beam-shaping mask, and thin film transistor |
Nov. 3, 2009 |
| 7608527 |
Laser irradiation method and method for manufacturing crystalline semiconductor film |
Oct. 27, 2009 |
| 7608528 |
Substrate cover, and charged particle beam writing apparatus and method |
Oct. 27, 2009 |
| 7608529 |
Method for selective laser crystallization and display panel fabricated by using the same |
Oct. 27, 2009 |
| 7598160 |
Method for manufacturing thin film semiconductor |
Oct. 6, 2009 |
| 7588990 |
Dynamic surface annealing of implanted dopants with low temperature HDPCVD process for depositing a high extinction coefficient optical absorber layer |
Sep. 15, 2009 |
| 7589032 |
Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment |
Sep. 15, 2009 |
| 7585791 |
Laser irradiation method, laser irradiation apparatus and method for manufacturing semiconductor device |
Sep. 8, 2009 |
| 7582541 |
Wafer laser processing method |
Sep. 1, 2009 |
| 7575985 |
Method of fabricating semiconductor device |
Aug. 18, 2009 |
| 7575958 |
Programmable fuse with silicon germanium |
Aug. 18, 2009 |
| 7569439 |
Thin film semiconductor device, production process and information displays |
Aug. 4, 2009 |
| 7566617 |
Method for manufacturing semiconductor elemental device forming an amorphous high dielectric film and an amorphous silicon film |
Jul. 28, 2009 |
| 7566625 |
Semiconductor device manufacturing method, heat treatment apparatus, and heat treatment method |
Jul. 28, 2009 |
| 7563732 |
Method and apparatus for forming polycrystalline layer using laser crystallization |
Jul. 21, 2009 |
| 7563659 |
Method of fabricating poly-crystalline silicon thin film and method of fabricating transistor using the same |
Jul. 21, 2009 |
| 7560365 |
Method of semiconductor thin film crystallization and semiconductor device fabrication |
Jul. 14, 2009 |
| 7553778 |
Method for producing a semiconductor device including crystallizing an amphorous semiconductor film |
Jun. 30, 2009 |
| 7553715 |
Crystallization method and apparatus thereof |
Jun. 30, 2009 |
| 7547593 |
Method of fabricating semiconductor device |
Jun. 16, 2009 |
| 7547616 |
Laser processing method for trench-edge-defect-free solid phase epitaxy in confined geometrics |
Jun. 16, 2009 |
| 7541230 |
Method and apparatus for crystallizing semiconductor with laser beams |
Jun. 2, 2009 |
| 7538014 |
Method of producing crystalline semiconductor material and method of fabricating semiconductor device |
May. 26, 2009 |
| 7534670 |
Semiconductor device and manufacturing method of the same |
May. 19, 2009 |
| 7534705 |
Method of manufacturing a semiconductor device |
May. 19, 2009 |
| 7528023 |
Apparatus for crystallizing semiconductor with laser beams |
May. 5, 2009 |
| 7528057 |
Laser annealing method and laser annealing device |
May. 5, 2009 |
| 7521649 |
Laser processing apparatus and laser processing method |
Apr. 21, 2009 |
| 7517773 |
Method of manufacturing a thin film transistor |
Apr. 14, 2009 |
| 7517774 |
Laser annealing method |
Apr. 14, 2009 |
| 7517620 |
Method for fabricating array substrate having color filter on thin film transistor structure for liquid crystal display device |
Apr. 14, 2009 |
| 7514305 |
Apparatus and methods for improving the intensity profile of a beam image used to process a substrate |
Apr. 7, 2009 |
| 7510920 |
Manufacturing method for a thin film transistor that uses a pulse oscillation laser crystallize an amorphous semiconductor film |
Mar. 31, 2009 |
| 7507645 |
Method of forming polycrystalline semiconductor layer and thin film transistor using the same |
Mar. 24, 2009 |
| 7498212 |
Laser annealing method and semiconductor device fabricating method |
Mar. 3, 2009 |
| 7491559 |
Low-temperature polysilicon display and method for fabricating same |
Feb. 17, 2009 |
| 7492583 |
Portable computer having magnetic switch |
Feb. 17, 2009 |
| 7488670 |
Direct channel stress |
Feb. 10, 2009 |
| 7488633 |
Method for forming polysilicon by illuminating a laser beam at the amorphous silicon substrate through a mask |
Feb. 10, 2009 |
| 7482253 |
Fusing nanowires using in situ crystal growth |
Jan. 27, 2009 |
| 7482273 |
Transmissive dynamic plasma steering method for radiant electromagnetic energy |
Jan. 27, 2009 |
| 7482274 |
Metal wiring and method of manufacturing the same, and metal wiring substrate and method of manufacturing the same |
Jan. 27, 2009 |
| 7482552 |
Laser crystallizing device and method for crystallizing silicon |
Jan. 27, 2009 |
| 7479420 |
Laser optical apparatus |
Jan. 20, 2009 |
| 7476601 |
Semiconductor structure having multilayer of polysilicon and display panel applied with the same |
Jan. 13, 2009 |
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